| Patent | Date |
|---|
Fill on demand ampoule refill
Grant 11,072,860 - Nguyen , et al. July 27, 2 | 2021-07-27 |
Low volume showerhead with porous baffle
Grant 10,741,365 - Chandrasekharan , et al. A | 2020-08-11 |
Selective atomic layer deposition with post-dose treatment
Grant 10,679,848 - Kumar , et al. | 2020-06-09 |
Systems and methods for tilting a wafer for achieving deposition uniformity
Grant 10,541,117 - Swaminathan , et al. Ja | 2020-01-21 |
Hardware and process for film uniformity improvement
Grant 10,526,700 - Kumar , et al. J | 2020-01-07 |
Composite dielectric interface layers for interconnect structures
Grant 10,418,236 - Reddy , et al. Sept | 2019-09-17 |
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
Grant 10,407,773 - LaVoie , et al. Sept | 2019-09-10 |
Hardware And Process For Film Uniformity Improvement
App 20190040528 - Kumar; Purushottam ; et al. | 2019-02-07 |
Soft landing nanolaminates for advanced patterning
Grant 10,192,742 - Pasquale , et al. Ja | 2019-01-29 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180342389 - Reddy; Kapu Sirish ; et al. | 2018-11-29 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180323057 - Kumar; Purushottam ; et al. | 2018-11-08 |
Hardware and process for film uniformity improvement
Grant 10,100,407 - Kumar , et al. October 16, 2 | 2018-10-16 |
Selective atomic layer deposition with post-dose treatment
Grant 10,062,563 - Kumar , et al. August 28, 2 | 2018-08-28 |
Temporally pulsed and kinetically modulated CVD dielectrics for gapfill applications
Grant 10,049,911 - Swaminathan , et al. August 14, 2 | 2018-08-14 |
Composite dielectric interface layers for interconnect structures
Grant 10,049,869 - Reddy , et al. August 14, 2 | 2018-08-14 |
Plasma assisted atomic layer deposition metal oxide for patterning applications
Grant 10,043,657 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
Soft Landing Nanolaminates For Advanced Patterning
App 20180158683 - Pasquale; Frank L. ; et al. | 2018-06-07 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180096886 - Reddy; Kapu Sirish ; et al. | 2018-04-05 |
Temporally Pulsed And Kinetically Modulated Cvd Dielectrics For Gapfill Applications
App 20180082886 - Swaminathan; Shankar ; et al. | 2018-03-22 |
Soft landing nanolaminates for advanced patterning
Grant 9,905,423 - Pasquale , et al. February 27, 2 | 2018-02-27 |
Plasma assisted atomic layer deposition of multi-layer films for patterning applications
Grant 9,892,917 - Swaminathan , et al. February 13, 2 | 2018-02-13 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180005814 - Kumar; Purushottam ; et al. | 2018-01-04 |
Plasma Assisted Atomic Layer Deposition Metal Oxide For Patterning Applications
App 20170263450 - Swaminathan; Shankar ; et al. | 2017-09-14 |
Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
Grant 9,698,042 - Baldasseroni , et al. July 4, 2 | 2017-07-04 |
Methods And Apparatuses For Showerhead Backside Parasitic Plasma Suppression In A Secondary Purge Enabled Ald System
App 20170167017 - LaVoie; Adrien ; et al. | 2017-06-15 |
Plasma assisted atomic layer deposition titanium oxide for patterning applications
Grant 9,673,041 - Swaminathan , et al. June 6, 2 | 2017-06-06 |
Systems And Methods For Tilting A Wafer For Achieving Deposition Uniformity
App 20170121819 - Swaminathan; Shankar ; et al. | 2017-05-04 |
Method for RF compensation in plasma assisted atomic layer deposition
Grant 9,624,578 - Qian , et al. April 18, 2 | 2017-04-18 |
Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications
Grant 9,570,290 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors
Grant 9,508,547 - Pasquale , et al. November 29, 2 | 2016-11-29 |
Plasma Assisted Atomic Layer Deposition Of Multi-layer Films For Patterning Applications
App 20160336178 - Swaminathan; Shankar ; et al. | 2016-11-17 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Patterning Applications
App 20160293838 - Swaminathan; Shankar ; et al. | 2016-10-06 |
Soft Landing Nanolaminates For Advanced Patterning
App 20160293418 - Pasquale; Frank L. ; et al. | 2016-10-06 |
Soft landing nanolaminates for advanced patterning
Grant 9,390,909 - Pasquale , et al. July 12, 2 | 2016-07-12 |
Hardware And Process For Film Uniformity Improvement
App 20160177443 - Kumar; Purushottam ; et al. | 2016-06-23 |
Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications
Grant 9,373,500 - Swaminathan , et al. June 21, 2 | 2016-06-21 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Conformal Encapsulation And Gapfill Applications
App 20160163972 - Swaminathan; Shankar ; et al. | 2016-06-09 |
Method And Apparatus For Rf Compensation In Plasma Assisted Atomic Layer Deposition
App 20160090650 - Qian; Jun ; et al. | 2016-03-31 |
Fill On Demand Ampoule
App 20160052651 - Nguyen; Tuan ; et al. | 2016-02-25 |
Fill On Demand Ampoule Refill
App 20160052655 - Nguyen; Tuan ; et al. | 2016-02-25 |
Low Volume Showerhead With Porous Baffle
App 20150315706 - Chandrasekharan; Ramesh ; et al. | 2015-11-05 |
Rf Cycle Purging To Reduce Surface Roughness In Metal Oxide And Metal Nitride Films
App 20150247238 - Pasquale; Frank L. ; et al. | 2015-09-03 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Conformal Encapsulation And Gapfill Applications
App 20150243883 - Swaminathan; Shankar ; et al. | 2015-08-27 |
Soft Landing Nanolaminates For Advanced Patterning
App 20150126042 - Pasquale; Frank L. ; et al. | 2015-05-07 |
| 