Pashkovskiy; Vasily

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pashkovskiy; Vasily.The latest application filed is for "hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode".

Company Profile

5.7.16

Pashkovskiy; Vasily - Suwon-si KR
Pashkovskiy; Vasily - Osan-si KR
Pashkovskiy; Vasily - Gyeonggi-do KR
Pashkovskiy; Vasily - Hwasung-City KR
Pashkovskiy; Vasily - Yongin-si KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma processing apparatus and method of manufacturing semiconductor device using the same Grant 10,950,414 - Nam , et al. March 16, 2	2021-03-16
Hollow Cathode, An Apparatus Including A Hollow Cathode For Manufacturing A Semiconductor Device, And A Method Of Manufacturing A Semiconductor Device Using A Hollow Cathode App 20210057193 - NAM; SANG KI ; et al.	2021-02-25
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system Grant 10,566,176 - Oh , et al. Feb	2020-02-18
Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same Grant 10,410,874 - Yoo , et al. Sept	2019-09-10
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same App 20190122866 - Nam; Sang Ki ; et al.	2019-04-25
Hollow Cathode, An Apparatus Including A Hollow Cathode For Manufacturing A Semiconductor Device, And A Method Of Manufacturing A Semiconductor Device Using A Hollow Cathode App 20190122867 - Nam; Sang Ki ; et al.	2019-04-25
Plasma Processing Apparatus and Method, and Method of Manufacturing Semiconductor Device Using the Same App 20190035606 - Yoo; Beom Jin ; et al.	2019-01-31
Microwave Probe, Plasma Monitoring System Including The Microwave Probe, And Method For Fabricating Semiconductor Device Using The System App 20170148613 - Oh; Se-jin ; et al.	2017-05-25
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system Grant 9,601,397 - Oh , et al. March 21, 2	2017-03-21
Microwave Probe, Plasma Monitoring System Including The Microwave Probe, And Method For Fabricating Semiconductor Device Using The System App 20170069553 - Oh; Se-jin ; et al.	2017-03-09
Method of plasma processing and apparatuses using the method Grant 9,136,094 - Cho , et al. September 15, 2	2015-09-15
Plasma Generating Apparatus App 20150206716 - KIM; HYUNGJOON ; et al.	2015-07-23
Method Of Plasma Processing And Apparatuses Using The Method App 20140193978 - CHO; Jung Hyun ; et al.	2014-07-10
Plasma Generating Apparatus App 20120007503 - Kim; Hyungjoon ; et al.	2012-01-12
Apparatus and method to generate plasma Grant 7,804,250 - Ushakov , et al. September 28, 2	2010-09-28
Plasma generating apparatus App 20100065215 - Jeon; Sang Jean ; et al.	2010-03-18
Plasma processing apparatus and method thereof App 20080314318 - Han; Kyung Hyun ; et al.	2008-12-25
Plasma based ion implantation system App 20080289576 - Lee; Young dong ; et al.	2008-11-27
Apparatus And Method To Generate Plasma App 20080061702 - Ushakov; Andrey ; et al.	2008-03-13
Ion Analysis System Based On Analyzer Of Ion Energy Distribution Using Retarded Electric Field App 20080032427 - Lee; Yung Hee ; et al.	2008-02-07
Plasma based ion implantation apparatus App 20080023653 - Lee; Young dong ; et al.	2008-01-31

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