Pasadyn; Alexander J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pasadyn; Alexander J..The latest application filed is for "method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information".

Company Profile

0.59.9

Pasadyn; Alexander J. - Austin TX US
Pasadyn; Alexander J - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Process control using analysis of an upstream process Grant 8,615,314 - Sonderman , et al. December 24, 2	2013-12-24
Parallel fault detection Grant 8,359,494 - Coss, Jr. , et al. January 22, 2	2013-01-22
Dynamic adaptive sampling rate for model prediction Grant 8,017,411 - Sonderman , et al. September 13, 2	2011-09-13
Controlling processing of semiconductor wafers based upon end of line parameters Grant 7,797,073 - Pasadyn , et al. September 14, 2	2010-09-14
Initiating test runs based on fault detection results Grant 7,581,140 - Pasadyn , et al. August 25, 2	2009-08-25
Applying a self-adaptive filter to a drifting process Grant 7,424,392 - Wang , et al. September 9, 2	2008-09-09
Determining transmission of error effects for improving parametric performance Grant 7,117,062 - Sonderman , et al. October 3, 2	2006-10-03
Method and apparatus for initializing tool controllers based on tool event data Grant 7,103,439 - Bode , et al. September 5, 2	2006-09-05
Method and apparatus for implementing competing control models Grant 7,067,333 - Pasadyn , et al. June 27, 2	2006-06-27
Matching data related to multiple metrology tools Grant 6,978,189 - Bode , et al. December 20, 2	2005-12-20
Method and apparatus for updating control state variables of a process control model based on rework data Grant 6,970,757 - Hewett , et al. November 29, 2	2005-11-29
Method and apparatus for dispatching based on metrology tool performance Grant 6,968,252 - Pasadyn , et al. November 22, 2	2005-11-22
Method and apparatus for dynamically monitoring controller tuning parameters Grant 6,961,636 - Chong , et al. November 1, 2	2005-11-01
Dispatch and/or disposition of material based upon an expected parameter result Grant 6,947,803 - Bode , et al. September 20, 2	2005-09-20
Method and apparatus for controlling process target values based on manufacturing metrics Grant 6,937,914 - Bode , et al. August 30, 2	2005-08-30
Process control based on an estimated process result Grant 6,925,347 - Miller , et al. August 2, 2	2005-08-02
Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters Grant 6,917,849 - Pasadyn , et al. July 12, 2	2005-07-12
Determining a next tool state based on fault detection information Grant 6,912,433 - Chong , et al. June 28, 2	2005-06-28
Method and apparatus for modifying design constraints based on observed performance Grant 6,907,369 - Markle , et al. June 14, 2	2005-06-14
Method and apparatus for distinguishing between sources of process variation Grant 6,901,340 - Pasadyn , et al. May 31, 2	2005-05-31
Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information Grant 6,897,075 - Bode , et al. May 24, 2	2005-05-24
Method and apparatus for determining a sampling plan based on process and equipment state information Grant 6,821,792 - Sonderman , et al. November 23, 2	2004-11-23
Tuning of a process control based upon layer dependencies Grant 6,823,231 - Bode , et al. November 23, 2	2004-11-23
Method and apparatus for integrating multiple process controllers Grant 6,801,817 - Bode , et al. October 5, 2	2004-10-05
Method and apparatus using integrated metrology data for pre-process and post-process control Grant 6,788,988 - Pasadyn , et al. September 7, 2	2004-09-07
Method and apparatus for adaptively scheduling tool maintenance Grant 6,785,586 - Toprac , et al. August 31, 2	2004-08-31
Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information App 20040159397 - Bode, Christopher A. ; et al.	2004-08-19
Identifying a cause of a fault based on a process controller output Grant 6,778,873 - Wang , et al. August 17, 2	2004-08-17
Dynamic targeting for a process control system Grant 6,773,931 - Pasadyn , et al. August 10, 2	2004-08-10
Use of slurry waste composition to determine the amount of metal removed during chemical mechanical polishing, and system for accomplishing same Grant 6,764,868 - Oey Hewett , et al. July 20, 2	2004-07-20
Kalman filter state estimation for a manufacturing system Grant 6,757,579 - Pasadyn June 29, 2	2004-06-29
Method and apparatus for cascade control using integrated metrology Grant 6,756,243 - Pasadyn , et al. June 29, 2	2004-06-29
Dynamic adaptive sampling rate for model prediction App 20040121495 - Sonderman, Thomas J. ; et al.	2004-06-24
Parallel fault detection App 20040123182 - Cross, Elfido JR. ; et al.	2004-06-24
Dynamic process state adjustment of a processing tool to reduce non-uniformity Grant 6,751,518 - Sonderman , et al. June 15, 2	2004-06-15
Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same Grant 6,746,308 - Bode , et al. June 8, 2	2004-06-08
Method and apparatus for determining control actions incorporating defectivity effects Grant 6,745,086 - Pasadyn , et al. June 1, 2	2004-06-01
Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information Grant 6,737,208 - Bode , et al. May 18, 2	2004-05-18
Method and apparatus for scheduling based on state estimation uncertainties Grant 6,738,682 - Pasadyn May 18, 2	2004-05-18
Method and apparatus for implementing dynamic qualification recipes Grant 6,732,007 - Pasadyn , et al. May 4, 2	2004-05-04
Method and apparatus for using a dynamic control model to compensate for a process interrupt Grant 6,725,121 - Pasadyn , et al. April 20, 2	2004-04-20
Method and apparatus for utilizing integrated metrology data as feed-forward data Grant 6,708,075 - Sonderman , et al. March 16, 2	2004-03-16
Method and apparatus for wafer-to-wafer control with partial measurement data Grant 6,708,129 - Pasadyn , et al. March 16, 2	2004-03-16
Method for prioritizing production lots based on grade estimates and output requirements Grant 6,699,727 - Toprac , et al. March 2, 2	2004-03-02
Method and apparatus for modeling of batch dynamics based upon integrated metrology Grant 6,698,009 - Pasadyn , et al. February 24, 2	2004-02-24
Dynamic targeting for a process control system App 20040029299 - Pasadyn, Alexander J. ; et al.	2004-02-12
Method and apparatus for determining a sampling plan based on defectivity Grant 6,687,561 - Pasadyn , et al. February 3, 2	2004-02-03
Method and apparatus for determining output characteristics using tool state data Grant 6,678,570 - Pasadyn , et al. January 13, 2	2004-01-13
Method and apparatus for controlling the flow of wafers through a process flow Grant 6,675,058 - Pasadyn , et al. January 6, 2	2004-01-06
Method and apparatus for optimizing downstream uniformity Grant 6,665,623 - Pasadyn , et al. December 16, 2	2003-12-16
Methods for dynamically controlling etch endpoint time, and system for accomplishing same Grant 6,660,539 - Sonderman , et al. December 9, 2	2003-12-09
Method and apparatus for determining a sampling plan based on process and equipment fingerprinting Grant 6,650,955 - Sonderman , et al. November 18, 2	2003-11-18
Method and apparatus for combining integrated and offline metrology for process control Grant 6,645,780 - Sonderman , et al. November 11, 2	2003-11-11
Automated method of controlling critical dimensions of features by controlling stepper exposure dose, and system for accomplishing same Grant 6,632,692 - Hewett , et al. October 14, 2	2003-10-14
Method and apparatus for controlling a tool using a baseline control script Grant 6,615,098 - Bode , et al. September 2, 2	2003-09-02
Method and apparatus for correlating error model with defect data Grant 6,610,550 - Pasadyn , et al. August 26, 2	2003-08-26
Method of using damaged areas of a wafer for process qualifications and experiments, and system for accomplishing same Grant 6,605,479 - Pasadyn , et al. August 12, 2	2003-08-12
Use of endpoint system to match individual processing stations within a tool Grant 6,588,007 - Pasadyn , et al. July 1, 2	2003-07-01
Method and apparatus for utilizing integrated metrology data as feed-forward data App 20030097198 - Sonderman, Thomas J. ; et al.	2003-05-22
Method and apparatus for cascade control using integrated metrology App 20030082837 - Pasadyn, Alexander J. ; et al.	2003-05-01
Method and apparatus for post-polish thickness and uniformity control Grant 6,540,591 - Pasadyn , et al. April 1, 2	2003-04-01
Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile App 20020177245 - Sonderman, Thomas J. ; et al.	2002-11-28
Method and apparatus for controlling a plating process Grant 6,444,481 - Pasadyn , et al. September 3, 2	2002-09-03
Method and apparatus for dynamic sampling of a production line Grant 6,442,496 - Pasadyn , et al. August 27, 2	2002-08-27
Method of varying stepper exposure dose to compensate for across-wafer variations in photoresist thickness, and system for accomplishing same App 20020106821 - Bode, Christopher A. ; et al.	2002-08-08
Use of endpoint system to match individual processing stations wirhin a tool App 20020087229 - Pasadyn, Alexander J. ; et al.	2002-07-04

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