Partlo; William N.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Partlo; William N..The latest application filed is for "euv light source with subsystem(s) for maintaining lpp drive laser output during euv non-output periods".
Company Profile
3.173.144
- Partlo; William N. - Poway CA
- Partlo; William N. - San Diego CA US
- Partlo; William N. - Fairport NY
- Partlo; William N. - Berkeley CA
Patent Activity
| Patent | Date |
|---|---|
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 10,966,308 - Partlo , et al. March 30, 2 | 2021-03-30 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180184509 - Partlo; William N. ; et al. | 2018-06-28 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180020532 - Partlo; William N. ; et al. | 2018-01-18 |
| Alignment of light source focus Grant 9,832,853 - Graham , et al. November 28, 2 | 2017-11-28 |
| Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material Grant 9,669,334 - Fomenkov , et al. June 6, 2 | 2017-06-06 |
| High pulse repetition rate gas discharge laser Grant 9,620,920 - Gillespie , et al. April 11, 2 | 2017-04-11 |
| Systems and methods for buffer gas flow stabilization in a laser produced plasma light source Grant 9,516,730 - Fleurov , et al. December 6, 2 | 2016-12-06 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 9,390,827 - Partlo , et al. July 12, 2 | 2016-07-12 |
| Corrosion resistant electrodes for laser chambers Grant 9,246,298 - Kardokus , et al. January 26, 2 | 2016-01-26 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 9,119,278 - Chrobak , et al. August 25, 2 | 2015-08-25 |
| Filter For Material Supply Apparatus Of An Extreme Ultraviolet Light Source App 20150209701 - Fomenkov; Igor V. ; et al. | 2015-07-30 |
| Source collector, lithographic apparatus and device manufacturing method Grant 9,091,944 - Loopstra , et al. July 28, 2 | 2015-07-28 |
| Systems and methods for cooling an optic Grant 9,066,412 - Ershov , et al. June 23, 2 | 2015-06-23 |
| Filter for material supply apparatus of an extreme ultraviolet light source Grant 9,029,813 - Fomenkov , et al. May 12, 2 | 2015-05-12 |
| Systems and methods for optics cleaning in an EUV light source Grant 9,000,404 - Bykanov , et al. April 7, 2 | 2015-04-07 |
| Master oscillator--power amplifier drive laser with pre-pulse for EUV light source Grant 8,958,143 - Hou , et al. February 17, 2 | 2015-02-17 |
| Laser system Grant 8,908,735 - Ershov , et al. December 9, 2 | 2014-12-09 |
| System method and apparatus for selecting and controlling light source bandwidth Grant RE45,249 - Figueroa , et al. November 18, 2 | 2014-11-18 |
| System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror Grant 8,847,183 - Partlo , et al. September 30, 2 | 2014-09-30 |
| Alignment Of Light Source Focus App 20140151583 - Graham; Matthew R. ; et al. | 2014-06-05 |
| EUV Light Source With Subsystem(s) For Maintaining LPP Drive Laser Output During EUV Non-Output Periods App 20140145096 - Partlo; William N. ; et al. | 2014-05-29 |
| Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EUV Light Source App 20140146387 - Hou; Kai-Chung ; et al. | 2014-05-29 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20140110609 - Bykanov; Alexander N. ; et al. | 2014-04-24 |
| System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output App 20140103229 - Chroback; Christopher C. ; et al. | 2014-04-17 |
| System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror App 20140048099 - Partlo; William N. ; et al. | 2014-02-20 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 8,653,437 - Partlo , et al. February 18, 2 | 2014-02-18 |
| Master oscillator-power amplifier drive laser with pre-pulse for EUV light source Grant 8,654,438 - Hou , et al. February 18, 2 | 2014-02-18 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 8,653,491 - Partlo , et al. February 18, 2 | 2014-02-18 |
| Alignment of light source focus Grant 8,648,999 - Graham , et al. February 11, 2 | 2014-02-11 |
| Systems and methods for optics cleaning in an EUV light source Grant 8,633,459 - Bykanov , et al. January 21, 2 | 2014-01-21 |
| Corrosion Resistant Electrodes For Laser Chambers App 20130329763 - Kardokus; Janine ; et al. | 2013-12-12 |
| System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror Grant 8,575,575 - Partlo , et al. November 5, 2 | 2013-11-05 |
| Oscillator-amplifier drive laser with seed protection for an EUV light source Grant 8,462,425 - Hou , et al. June 11, 2 | 2013-06-11 |
| Gas discharge laser line narrowing module Grant 8,379,687 - Cybulski , et al. February 19, 2 | 2013-02-19 |
| EUV light source glint reduction system Grant 8,368,039 - Govindaraju , et al. February 5, 2 | 2013-02-05 |
| System and method for compensating for thermal effects in an EUV light source Grant 8,368,041 - Graham , et al. February 5, 2 | 2013-02-05 |
| Laser thin film poly-silicon annealing optical system Grant 8,362,391 - Partlo , et al. January 29, 2 | 2013-01-29 |
| Systems And Methods For Buffer Gas Flow Stabilization In A Laser Produced Plasma Light Source App 20120313016 - Fleurov; Vladimir B. ; et al. | 2012-12-13 |
| Filter for Material Supply Apparatus App 20120292527 - Fomenkov; Igor V. ; et al. | 2012-11-22 |
| EUV light producing system and method utilizing an alignment laser Grant 8,304,752 - Fomenkov , et al. November 6, 2 | 2012-11-06 |
| Systems and methods for drive laser beam delivery in an EUV light source Grant 8,283,643 - Partlo , et al. October 9, 2 | 2012-10-09 |
| System And Method For Compensating For Thermal Effects In An Euv Light Source App 20120248341 - Graham; Matthew R. ; et al. | 2012-10-04 |
| Systems and methods for target material delivery protection in a laser produced plasma EUV light source Grant 8,263,953 - Fomenkov , et al. September 11, 2 | 2012-09-11 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20120223256 - Bykanov; Alexander N. ; et al. | 2012-09-06 |
| Bandwidth control device Grant 8,259,764 - Fomenkov , et al. September 4, 2 | 2012-09-04 |
| Source Collector, Lithographic Apparatus And Device Manufacturing Method App 20120182536 - Loopstra; Erik Roelof ; et al. | 2012-07-19 |
| Beam transport system for extreme ultraviolet light source Grant 8,173,985 - Bergstedt , et al. May 8, 2 | 2012-05-08 |
| Laser system Grant 8,170,078 - Ershov , et al. May 1, 2 | 2012-05-01 |
| Oscillator-amplifier Drive Laser With Seed Protection For An Euv Light Source App 20120092746 - Hou; Kai-Chung ; et al. | 2012-04-19 |
| Laser System App 20120087386 - Brown; Daniel J.W. ; et al. | 2012-04-12 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20120080584 - Partlo; William N. ; et al. | 2012-04-05 |
| System method and apparatus for selecting and controlling light source bandwidth Grant 8,144,739 - Figueroa , et al. March 27, 2 | 2012-03-27 |
| Laser system Grant 8,144,740 - Brown , et al. March 27, 2 | 2012-03-27 |
| System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber Grant 8,138,487 - Vaschenko , et al. March 20, 2 | 2012-03-20 |
| Line narrowing module Grant 8,126,027 - Algots , et al. February 28, 2 | 2012-02-28 |
| Alignment Of Light Source Focus App 20120019826 - Graham; Matthew R. ; et al. | 2012-01-26 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing Grant 8,102,889 - Jacques , et al. January 24, 2 | 2012-01-24 |
| Laser System App 20120002687 - Ershov; Alexander I. ; et al. | 2012-01-05 |
| Master Oscillator-power Amplifier Drive Laser With Pre-pulse For Euv Light Source App 20110317256 - Hou; Kai-Chung ; et al. | 2011-12-29 |
| EUV collector debris management Grant 8,075,732 - Partlo , et al. December 13, 2 | 2011-12-13 |
| Systems And Methods For Cooling An Optic App 20110253349 - Ershov; Alexander I. ; et al. | 2011-10-20 |
| Systems And Methods For Target Material Delivery Protection In A Laser Produced Plasma Euv Light Source App 20110248191 - Fomenkov; Igor V. ; et al. | 2011-10-13 |
| Extreme Ultraviolet Light Source App 20110240890 - Govindaraju; Abhiram ; et al. | 2011-10-06 |
| Metrology for extreme ultraviolet light source Grant 8,000,212 - Senekerimyan , et al. August 16, 2 | 2011-08-16 |
| Laser system Grant 7,999,915 - Ershov , et al. August 16, 2 | 2011-08-16 |
| Line Narrowing Module App 20110194580 - Algots; J. Martin ; et al. | 2011-08-11 |
| Gas discharge laser chamber Grant 7,995,637 - Sandstrom , et al. August 9, 2 | 2011-08-09 |
| Control system for a two chamber gas discharge laser system Grant RE42,588 - Fallon , et al. August 2, 2 | 2011-08-02 |
| Laser Thin Film Poly-silicon Annealing Optical System App 20110163077 - Partlo; William N. ; et al. | 2011-07-07 |
| Metrology for Extreme Ultraviolet Light Source App 20110141865 - Senekerimyan; Vahan ; et al. | 2011-06-16 |
| Beam Transport System for Extreme Ultraviolet Light Source App 20110140008 - Bergstedt; Robert A. ; et al. | 2011-06-16 |
| High Power High Pulse Repetition Rate Gas Discharge Laser System App 20110122901 - Sandstrom; Richard L. ; et al. | 2011-05-26 |
| Laser System App 20110102759 - Ershov; Alexander I. ; et al. | 2011-05-05 |
| Laser system Grant 7,920,616 - Brown , et al. April 5, 2 | 2011-04-05 |
| Laser lithography system with improved bandwidth control Grant 7,899,095 - Partlo March 1, 2 | 2011-03-01 |
| Laser system Grant 7,885,309 - Ershov , et al. February 8, 2 | 2011-02-08 |
| Laser thin film poly-silicon annealing optical system Grant 7,884,303 - Partlo , et al. February 8, 2 | 2011-02-08 |
| Alignment Laser App 20100327192 - Fomenkov; Igor V. ; et al. | 2010-12-30 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing App 20100309939 - Jacques; Robert N. ; et al. | 2010-12-09 |
| Method and apparatus for EUV plasma source target delivery Grant 7,838,854 - Algots , et al. November 23, 2 | 2010-11-23 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing Grant 7,830,934 - Jacques , et al. November 9, 2 | 2010-11-09 |
| Laser system Grant 7,822,092 - Ershov , et al. October 26, 2 | 2010-10-26 |
| System, Method And Apparatus For Droplet Catcher For Prevention Of Backsplash In A Euv Generation Chamber App 20100258748 - Vaschenko; Georgiy O. ; et al. | 2010-10-14 |
| System, Method And Apparatus For Aligning And Synchronizing Target Material For Optimum Extreme Ultraviolet Light Output App 20100258750 - Partlo; William N. ; et al. | 2010-10-14 |
| System, Method And Apparatus For Laser Produced Plasma Extreme Ultraviolet Chamber With Hot Walls And Cold Collector Mirror App 20100258749 - Partlo; William N. ; et al. | 2010-10-14 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus Grant 7,812,329 - Bykanov , et al. October 12, 2 | 2010-10-12 |
| Laser system Grant 7,778,302 - Ershov , et al. August 17, 2 | 2010-08-17 |
| Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ; et al. | 2010-07-15 |
| Laser system Grant 7,746,913 - Ershov , et al. June 29, 2 | 2010-06-29 |
| System Method and Apparatus for Selecting and Controlling Light Source Bandwidth App 20100149647 - Figueroa; Efrain ; et al. | 2010-06-17 |
| Gas Discharge Laser Chamber App 20100142582 - Sandstrom; Richard L. ; et al. | 2010-06-10 |
| Systems and methods for drive laser beam delivery in an euv light source App 20100127191 - Partlo; William N. ; et al. | 2010-05-27 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser system Grant 7,715,459 - Brown , et al. May 11, 2 | 2010-05-11 |
| Laser system App 20100108913 - Ershov; Alexander I. ; et al. | 2010-05-06 |
| Line narrowing module App 20100097704 - Algots; J. Martin ; et al. | 2010-04-22 |
| Immersion lithography laser light source with pulse stretcher App 20100074295 - Partlo; William N. ; et al. | 2010-03-25 |
| High pulse repetition rate gas discharge laser App 20100054295 - Gillespie; Walter D. ; et al. | 2010-03-04 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Laser produced plasma euv light source App 20100024980 - Ershov; Alexander I. ; et al. | 2010-02-04 |
| Laser system Grant 7,643,529 - Brown , et al. January 5, 2 | 2010-01-05 |
| Immersion lithography laser light source with pulse stretcher Grant 7,643,528 - Partlo , et al. January 5, 2 | 2010-01-05 |
| High pulse repetition rate gas discharge laser Grant 7,633,989 - Gillespie , et al. December 15, 2 | 2009-12-15 |
| Laser system Grant 7,630,424 - Ershov , et al. December 8, 2 | 2009-12-08 |
| Laser system App 20090296758 - Brown; Daniel J.W. ; et al. | 2009-12-03 |
| Laser system App 20090296755 - Brown; Daniel J. W. ; et al. | 2009-12-03 |
| Laser produced plasma EUV light source Grant 7,598,509 - Ershov , et al. October 6, 2 | 2009-10-06 |
| Control system for a two chamber gas discharge laser Grant 7,596,164 - Fallon , et al. September 29, 2 | 2009-09-29 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus App 20090154642 - Bykanov; Alexander N. ; et al. | 2009-06-18 |
| Laser system App 20090122825 - Ershov; Alexander I. ; et al. | 2009-05-14 |
| Gas discharge laser chamber improvements Grant 7,522,650 - Partlo , et al. April 21, 2 | 2009-04-21 |
| Drive laser for EUV light source Grant 7,518,787 - Bykanov , et al. April 14, 2 | 2009-04-14 |
| Immersion lithography laser light source with pulse stretcher App 20090080476 - Partlo; William N. ; et al. | 2009-03-26 |
| Laser system App 20090067468 - Brown; Daniel J.W. ; et al. | 2009-03-12 |
| Gas discharge laser output light beam parameter control Grant 7,471,708 - Besaucele , et al. December 30, 2 | 2008-12-30 |
| Method and apparatus for EUV plasma source target delivery App 20080283776 - Algots; J. Martin ; et al. | 2008-11-20 |
| Laser system App 20080267241 - Brown; Daniel J.W. ; et al. | 2008-10-30 |
| Laser system App 20080267242 - Ershov; Alexander I. ; et al. | 2008-10-30 |
| Laser lithography system with improved bandwidth control App 20080253413 - Partlo; William N. | 2008-10-16 |
| Laser system App 20080225904 - Brown; Daniel J.W. ; et al. | 2008-09-18 |
| Laser system App 20080225908 - Ershov; Alexander I. ; et al. | 2008-09-18 |
| High repetition rate laser produced plasma EUV light source App 20080197297 - Akins; Robert P. ; et al. | 2008-08-21 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Method and apparatus for EUV plasma source target delivery Grant 7,405,416 - Algots , et al. July 29, 2 | 2008-07-29 |
| Laser system App 20080165337 - Ershov; Alexander I. ; et al. | 2008-07-10 |
| Line narrowing module App 20080151944 - Algots; J. Martin ; et al. | 2008-06-26 |
| Laser system App 20080144671 - Ershov; Alexander I. ; et al. | 2008-06-19 |
| Chamber for a high energy excimer laser source Grant 7,369,596 - Steiger , et al. May 6, 2 | 2008-05-06 |
| Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
| EUV light source collector lifetime improvements Grant 7,365,349 - Partlo , et al. April 29, 2 | 2008-04-29 |
| Line narrowing module Grant 7,366,219 - Algots , et al. April 29, 2 | 2008-04-29 |
| High repetition rate laser produced plasma EUV light source Grant 7,361,918 - Akins , et al. April 22, 2 | 2008-04-22 |
| DUV light source optical element improvements Grant 7,346,093 - Sandstrom , et al. March 18, 2 | 2008-03-18 |
| Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ; et al. | 2008-01-31 |
| EUV light source Grant 7,323,703 - Oliver , et al. January 29, 2 | 2008-01-29 |
| LPP EUV light source Grant 7,317,196 - Partlo , et al. January 8, 2 | 2008-01-08 |
| Bandwidth control device App 20070297467 - Fomenkov; Igor V. ; et al. | 2007-12-27 |
| Drive laser for EUV light source App 20070291350 - Ershov; Alexander I. ; et al. | 2007-12-20 |
| Chamber for a high energy excimer laser source App 20070280323 - Steiger; Thomas D. ; et al. | 2007-12-06 |
| Discharge produced plasma EUV light source Grant 7,291,853 - Fomenkov , et al. November 6, 2 | 2007-11-06 |
| Collector for EUV light source Grant 7,288,777 - Partlo , et al. October 30, 2 | 2007-10-30 |
| High power gas discharge laser with helium purged line narrowing unit Grant 7,277,466 - Partlo , et al. October 2, 2 | 2007-10-02 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris Grant 7,247,870 - Ershov , et al. July 24, 2 | 2007-07-24 |
| EUV light source App 20070158596 - Oliver; I. Roger ; et al. | 2007-07-12 |
| Collector for EUV light source App 20070114469 - Partlo; William N. ; et al. | 2007-05-24 |
| Collector for EUV light source App 20070114468 - Partlo; William N. ; et al. | 2007-05-24 |
| Collector for EUV light source Grant 7,217,940 - Partlo , et al. May 15, 2 | 2007-05-15 |
| Line selected F.sub.2 two chamber laser system Grant 7,218,661 - Knowles , et al. May 15, 2 | 2007-05-15 |
| EUV light source collector erosion mitigation Grant 7,180,083 - Partlo , et al. February 20, 2 | 2007-02-20 |
| High repetition rate laser produced plasma EUV light source App 20070029511 - Akins; Robert P. ; et al. | 2007-02-08 |
| Discharge produced plasma EUV light source App 20070023711 - Fomenkov; Igor V. ; et al. | 2007-02-01 |
| EUV light source collector lifetime improvements App 20070023705 - Partlo; William N. ; et al. | 2007-02-01 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris App 20070018122 - Ershov; Alexander I. ; et al. | 2007-01-25 |
| EUV light source Grant 7,164,144 - Partlo , et al. January 16, 2 | 2007-01-16 |
| Gas discharge laser line narrowing module App 20070002919 - Cybulski; Raymond F. ; et al. | 2007-01-04 |
| Euv Light Source Collector Erosion Mitigation App 20060289808 - Partlo; William N. ; et al. | 2006-12-28 |
| High pulse repetition rate gas discharge laser App 20060291517 - Gillespie; Walter D. ; et al. | 2006-12-28 |
| Laser output beam wavefront splitter for bandwidth spectrum control Grant 7,154,928 - Sandstrom , et al. December 26, 2 | 2006-12-26 |
| High repetition rate gas discharge laser with precise pulse timing control Grant 7,149,234 - Das , et al. December 12, 2 | 2006-12-12 |
| EUV light source collector erosion mitigation Grant 7,141,806 - Partlo , et al. November 28, 2 | 2006-11-28 |
| Gas discharge laser output light beam parameter control App 20060227839 - Besaucele; Herve A. ; et al. | 2006-10-12 |
| Laser produced plasma EUV light source App 20060219957 - Ershov; Alexander I. ; et al. | 2006-10-05 |
| Control system for a two chamber gas discharge laser App 20060209917 - Fallon; John P. ; et al. | 2006-09-21 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris Grant 7,109,503 - Bowering , et al. September 19, 2 | 2006-09-19 |
| Systems For Protecting Internal Components Of An Euv Light Source From Plasma-generated Debris App 20060192151 - Bowering; Norbert R. ; et al. | 2006-08-31 |
| Method and apparatus for EUV plasma source target delivery App 20060192154 - Algots; J. Martin ; et al. | 2006-08-31 |
| High repetition rate laser produced plasma EUV light source Grant 7,087,914 - Akins , et al. August 8, 2 | 2006-08-08 |
| Relax gas discharge laser lithography light source Grant 7,088,758 - Sandstrom , et al. August 8, 2 | 2006-08-08 |
| Control system for a two chamber gas discharge laser Grant 7,079,564 - Fallon , et al. July 18, 2 | 2006-07-18 |
| Multi-chamber gas discharge laser bandwidth control through discharge timing App 20060146900 - Jacques; Robert N. ; et al. | 2006-07-06 |
| LLP EUV drive laser App 20060146906 - Brown; Daniel J.W. ; et al. | 2006-07-06 |
| Collector for EUV light source App 20060131515 - Partlo; William N. ; et al. | 2006-06-22 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system App 20060126697 - Knowles; David S. ; et al. | 2006-06-15 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
| Laser thin film poly-silicon annealing system Grant 7,061,959 - Partlo , et al. June 13, 2 | 2006-06-13 |
| Line selected F2 two chamber laser system Grant 7,058,107 - Knowles , et al. June 6, 2 | 2006-06-06 |
| High power high pulse repetition rate gas discharge laser system bandwidth management App 20060114956 - Sandstrom; Richard L. ; et al. | 2006-06-01 |
| Line narrowing module App 20060114957 - Algots; J. Martin ; et al. | 2006-06-01 |
| EUV collector debris management App 20060091109 - Partlo; William N. ; et al. | 2006-05-04 |
| Control system for a two chamber gas discharge laser Grant 7,039,086 - Fallon , et al. May 2, 2 | 2006-05-02 |
| Method and apparatus for cooling magnetic circuit elements Grant 7,002,443 - Ness , et al. February 21, 2 | 2006-02-21 |
| Very narrow band, two chamber, high reprate gas discharge laser system Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
| Laser output beam wavefront splitter for bandwidth spectrum control App 20050286598 - Sandstrom, Richard L. ; et al. | 2005-12-29 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20050269529 - Ershov, Alexander I. ; et al. | 2005-12-08 |
| Laser thin film poly-silicon annealing optical system App 20050269300 - Partlo, William N. ; et al. | 2005-12-08 |
| Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System App 20050271109 - Knowles, David S. ; et al. | 2005-12-08 |
| Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
| Control system for a two chamber gas discharge laser App 20050265417 - Fallon, John P. ; et al. | 2005-12-01 |
| Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate App 20050259709 - Das, Palash P. ; et al. | 2005-11-24 |
| Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ; et al. | 2005-10-20 |
| Gas discharge laser chamber improvements App 20050226301 - Partlo, William N. ; et al. | 2005-10-13 |
| High repetition rate laser produced plasma EUV light source App 20050205810 - Akins, Robert P. ; et al. | 2005-09-22 |
| LPP EUV light source App 20050205811 - Partlo, William N. ; et al. | 2005-09-22 |
| EUV light source App 20050199829 - Partlo, William N. ; et al. | 2005-09-15 |
| Laser thin film poly-silicon annealing system App 20050141580 - Partlo, William N. ; et al. | 2005-06-30 |
| Relax gas discharge laser lithography light source App 20050083983 - Sandstrom, Richard L. ; et al. | 2005-04-21 |
| Four KHz gas discharge laser system Grant 6,882,674 - Wittak , et al. April 19, 2 | 2005-04-19 |
| Laser thin film poly-silicon annealing optical system App 20050035103 - Partlo, William N. ; et al. | 2005-02-17 |
| Optical elements with protective undercoating App 20050025882 - Partlo, William N. ; et al. | 2005-02-03 |
| Method and apparatus for cooling magnetic circuit elements App 20040264521 - Ness, Richard M. ; et al. | 2004-12-30 |
| Line selected F2 two chamber laser system App 20040258122 - Knowles, David S. ; et al. | 2004-12-23 |
| DUV light source optical element improvements App 20040240506 - Sandstrom, Richard L. ; et al. | 2004-12-02 |
| Plasma focus light source with improved pulse power system Grant 6,815,700 - Melnychuk , et al. November 9, 2 | 2004-11-09 |
| Line selected F2 two chamber laser system Grant 6,801,560 - Knowles , et al. October 5, 2 | 2004-10-05 |
| High power gas discharge laser with helium purged line narrowing unit App 20040190578 - Partlo, William N. ; et al. | 2004-09-30 |
| Gas discharge laser with improved beam path Grant 6,795,474 - Partlo , et al. September 21, 2 | 2004-09-21 |
| Line selected F2 two chamber laser system App 20040174919 - Knowles, David S. ; et al. | 2004-09-09 |
| Discharge produced plasma EUV light source App 20040160155 - Partlo, William N. ; et al. | 2004-08-19 |
| High power gas discharge laser with helium purged line narrowing unit Grant 6,778,584 - Partlo , et al. August 17, 2 | 2004-08-17 |
| Injection seeded F2 laser with pre-injection filter Grant 6,765,945 - Sandstrom , et al. July 20, 2 | 2004-07-20 |
| Fan for gas discharge laser Grant 6,765,946 - Partlo , et al. July 20, 2 | 2004-07-20 |
| Four KHz gas discharge laser Grant 6,757,316 - Newman , et al. June 29, 2 | 2004-06-29 |
| Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ; et al. | 2004-06-10 |
| Pulse power system for extreme ultraviolet and x-ray sources Grant 6,744,060 - Ness , et al. June 1, 2 | 2004-06-01 |
| Line narrowed laser with bidirection beam expansion Grant 6,738,410 - Partlo , et al. May 18, 2 | 2004-05-18 |
| High resolution spectral measurement device Grant 6,713,770 - Sandstrom , et al. March 30, 2 | 2004-03-30 |
| Control system for a two chamber gas discharge laser App 20040057489 - Fallon, John P. ; et al. | 2004-03-25 |
| High repetition rate gas discharge laser with precise pulse timing control App 20040047386 - Das, Palash P. ; et al. | 2004-03-11 |
| Very narrow band, two chamber, high reprate gas discharge laser system App 20040047385 - Knowles, David S. ; et al. | 2004-03-11 |
| Lithography laser system with in-place alignment tool Grant 6,704,340 - Ershov , et al. March 9, 2 | 2004-03-09 |
| Control system for a two chamber gas discharge laser Grant 6,690,704 - Fallon , et al. February 10, 2 | 2004-02-10 |
| Laser chamber insulator with sealed electrode feedthrough Grant 6,661,826 - Ujazdowski , et al. December 9, 2 | 2003-12-09 |
| High power deep ultraviolet laser with long life optics App 20030219056 - Yager, Thomas A. ; et al. | 2003-11-27 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
| Electric discharge laser with active wavelength chirp correction Grant 6,621,846 - Sandstrom , et al. September 16, 2 | 2003-09-16 |
| High repetition rate gas discharge laser with precise pulse timing control Grant 6,618,421 - Das , et al. September 9, 2 | 2003-09-09 |
| Injection seeded F2 laser with line selection and discrimination Grant 6,590,922 - Onkels , et al. July 8, 2 | 2003-07-08 |
| Plasma focus light source with active and buffer gas control Grant 6,586,757 - Melnychuk , et al. July 1, 2 | 2003-07-01 |
| Four KHz gas discharge laser system App 20030118072 - Wittak, Christian J. ; et al. | 2003-06-26 |
| Plasma focus light source with improved pulse power system Grant 6,566,667 - Partlo , et al. May 20, 2 | 2003-05-20 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
| Plasma focus light source with tandem ellipsoidal mirror units Grant 6,566,668 - Rauch , et al. May 20, 2 | 2003-05-20 |
| Lithography laser system with in-place alignment tool App 20030091087 - Ershov, Alexander I. ; et al. | 2003-05-15 |
| Injection seeded laser with precise timing control Grant 6,549,551 - Ness , et al. April 15, 2 | 2003-04-15 |
| Plasma pinch high energy with debris collector Grant 6,541,786 - Partlo , et al. April 1, 2 | 2003-04-01 |
| Reliable, modular, production quality narrow-band high rep rate F2 laser Grant RE38,054 - Hofmann , et al. April 1, 2 | 2003-04-01 |
| High resolution etalon-grating spectrometer Grant 6,538,737 - Sandstrom , et al. March 25, 2 | 2003-03-25 |
| Laser wavelength control unit with piezoelectric driver Grant 6,532,247 - Spangler , et al. March 11, 2 | 2003-03-11 |
| Control system for a two chamber gas discharge laser App 20030031216 - Fallon, John P. ; et al. | 2003-02-13 |
| Plasma focus light source with improved pulse power system App 20030006383 - Melnychuk, Stephan T. ; et al. | 2003-01-09 |
| Laser chamber insulator with sealed electrode feedthrough App 20020196830 - Ujazdowski, Richard C. ; et al. | 2002-12-26 |
| Injection seeded F2 laser with wavelength control App 20020186739 - Sandstrom, Richard L. ; et al. | 2002-12-12 |
| Pulse power system for extreme ultraviolet and x-ray sources App 20020163313 - Ness, Richard M. ; et al. | 2002-11-07 |
| Extreme repetition rate gas discharge laser with improved blower motor Grant 6,477,193 - Oliver , et al. November 5, 2 | 2002-11-05 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020154668 - Knowles, David S. ; et al. | 2002-10-24 |
| Line selected F2 two chamber laser system App 20020154671 - Knowles, David S. ; et al. | 2002-10-24 |
| Plasma focus high energy photon source with blast shield Grant 6,452,199 - Partlo , et al. September 17, 2 | 2002-09-17 |
| High resolution spectral measurement device App 20020121608 - Sandstrom, Richard L. ; et al. | 2002-09-05 |
| Extreme repetition rate gas discharge laser Grant 6,442,181 - Oliver , et al. August 27, 2 | 2002-08-27 |
| Injection seeded F2 laser with line selection and discrimination App 20020114370 - Onkels, Eckehard D. ; et al. | 2002-08-22 |
| Gas discharge laser with improved beam path App 20020105994 - Partlo, William N. ; et al. | 2002-08-08 |
| Plasma Focus High Energy Photon Source With Blast Shield App 20020100882 - PARTLO, WILLIAM N. ; et al. | 2002-08-01 |
| High resolution etalon-grating spectrometer App 20020101589 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| High resolution etalon-grating monochromator App 20020101588 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| Fan for gas discharge laser App 20020094005 - Partlo, William N. ; et al. | 2002-07-18 |
| Injection seeded laser with precise timing control App 20020085606 - Ness, Richard M. ; et al. | 2002-07-04 |
| Injection seeded F2 laser with pre-injection filter App 20020071468 - Sandstrom, Richard L. ; et al. | 2002-06-13 |
| Injection seeded F2 laser with pre-injection filter App 20020064202 - Sandstrom, Richard L. ; et al. | 2002-05-30 |
| Very narrow band injection seeded F2 lithography laser Grant 6,381,257 - Ershov , et al. April 30, 2 | 2002-04-30 |
| Extreme repetition rate gas discharge laser with improved blower motor App 20020044587 - Oliver, I. Roger ; et al. | 2002-04-18 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020044586 - Myers, David W. ; et al. | 2002-04-18 |
| Injection seeded F2 lithography laser Grant 6,370,174 - Onkels , et al. April 9, 2 | 2002-04-09 |
| Single chamber gas discharge laser with line narrowed seed beam Grant 6,359,922 - Partlo , et al. March 19, 2 | 2002-03-19 |
| Four KHz gas discharge laser App 20020021728 - Newman, Peter C. ; et al. | 2002-02-21 |
| Plasma focus light source with tandem ellipsoidal mirror units App 20020014599 - Rauch, John E. ; et al. | 2002-02-07 |
| Plasma focus light source with active and buffer gas control App 20020014598 - Melnychuk, Stephan T. ; et al. | 2002-02-07 |
| High repetition rate gas discharge laser with precise pulse timing control App 20020012376 - Das, Palash P. ; et al. | 2002-01-31 |
| Laser wavelength control unit with piezoelectric driver App 20020006149 - Spangler, Ronald L. ; et al. | 2002-01-17 |
| Reliable, modular, production quality narrow-band high rep rate ArF excimer laser Grant 6,330,261 - Ishihara , et al. December 11, 2 | 2001-12-11 |
| Electric discharge laser with acoustic chirp correction Grant 6,317,447 - Partlo , et al. November 13, 2 | 2001-11-13 |
| Line narrowed laser with bidirection beam expansion App 20010014110 - Partlo, William N. ; et al. | 2001-08-16 |
| High pulse rate pulse power system with liquid cooling Grant 6,240,112 - Partlo , et al. May 29, 2 | 2001-05-29 |
| Laser chamber with fully integrated electrode feedthrough main insulator Grant 6,208,674 - Webb , et al. March 27, 2 | 2001-03-27 |
| High pulse rate pulse power system with fast rise time and low current Grant 6,151,346 - Partlo , et al. November 21, 2 | 2000-11-21 |
| Reliable modular production quality narrow-band high REP rate excimer laser Grant 6,128,323 - Myers , et al. October 3, 2 | 2000-10-03 |
| Excimer laser with pulse multiplier Grant 6,067,311 - Morton , et al. May 23, 2 | 2000-05-23 |
| Plasma focus high energy photon source Grant 6,064,072 - Partlo , et al. May 16, 2 | 2000-05-16 |
| Long life fused silica ultraviolet optical elements Grant 6,058,739 - Morton , et al. May 9, 2 | 2000-05-09 |
| Plasma focus high energy photon source Grant 6,051,841 - Partlo April 18, 2 | 2000-04-18 |
| Gas discharge laser with gas temperature control Grant 6,034,978 - Ujazdowski , et al. March 7, 2 | 2000-03-07 |
| High pulse rate pulse power system with resonant power supply Grant 6,028,872 - Partlo , et al. February 22, 2 | 2000-02-22 |
| Gas discharge laser with roller bearings and stable magnetic axial positioning Grant 6,026,103 - Oliver , et al. February 15, 2 | 2000-02-15 |
| Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser Grant 6,018,537 - Hofmann , et al. January 25, 2 | 2000-01-25 |
| Magnetic modulator voltage and temperature timing compensation circuit Grant 6,016,325 - Ness , et al. January 18, 2 | 2000-01-18 |
| Reliable. modular, production quality narrow-band KRF excimer laser Grant 5,991,324 - Knowles , et al. November 23, 1 | 1999-11-23 |
| High voltage cable interlock circuit Grant 5,949,806 - Ness , et al. September 7, 1 | 1999-09-07 |
| Current reversal prevention circuit for a pulsed gas discharge laser Grant 5,940,421 - Partlo , et al. August 17, 1 | 1999-08-17 |
| High pulse rate pulse power system Grant 5,936,988 - Partlo , et al. August 10, 1 | 1999-08-10 |
| Illumination design for scanning microlithography systems Grant 5,844,727 - Partlo December 1, 1 | 1998-12-01 |
| Laser having improved beam quality and reduced operating cost Grant 5,748,656 - Watson , et al. May 5, 1 | 1998-05-05 |
| Pulse power generating circuit with energy recovery Grant 5,729,562 - Birx , et al. March 17, 1 | 1998-03-17 |
| Laser system with anamorphic confocal unstable resonator Grant 5,684,822 - Partlo November 4, 1 | 1997-11-04 |
| Full field mask illumination enhancement methods and apparatus Grant 5,601,733 - Partlo February 11, 1 | 1997-02-11 |
| Variable annular illuminator for photolithographic projection imager Grant 5,452,054 - Dewa , et al. September 19, 1 | 1995-09-19 |
| Partial coherence varier for microlithographic system Grant 5,383,000 - Michaloski , et al. January 17, 1 | 1995-01-17 |
| Method and means for reducing speckle in coherent laser pulses Grant 5,233,460 - Partlo , et al. August 3, 1 | 1993-08-03 |
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