| Patent | Date |
|---|
Method of manufacturing integrated circuit device
Grant 10,115,640 - Hwang , et al. October 30, 2 | 2018-10-30 |
Method Of Manufacturing Integrated Circuit Device
App 20180025947 - Hwang; Hee-don ; et al. | 2018-01-25 |
Methods of manufacturing semiconductor devices
Grant 9,716,128 - Kim , et al. July 25, 2 | 2017-07-25 |
Semiconductor Device And Method Of Manufacturing The Same
App 20160118331 - KIM; Young-kuk ; et al. | 2016-04-28 |
Methods Of Manufacturing Semiconductor Devices
App 20160035788 - KIM; Young-Kuk ; et al. | 2016-02-04 |
Semiconductor Devices And Methods For Fabricating The Same
App 20160027896 - LEE; Jin-Su ; et al. | 2016-01-28 |
Flexible Gas Barrier Film, Method For Preparing The Same, And Flexible Display Device Using The Same
App 20120114910 - JU; Byeong Kwon ; et al. | 2012-05-10 |
Layer deposition methods
Grant 8,039,054 - Park , et al. October 18, 2 | 2011-10-18 |
Method of forming a layer on a semiconductor substrate
Grant 7,902,090 - Seo , et al. March 8, 2 | 2011-03-08 |
Method of forming a layer on a wafer
Grant 7,763,550 - Yahng , et al. July 27, 2 | 2010-07-27 |
Measuring Device For Permeation Rate Of Water And Oxygen Of Protective Layer In Organic Electronic Device And Measuring Method Using The Device
App 20090205978 - JU; Byeong Kwon ; et al. | 2009-08-20 |
Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same
Grant 7,544,607 - Kim , et al. June 9, 2 | 2009-06-09 |
Cryptographic apparatus for supporting multiple modes
Grant 7,509,501 - Park , et al. March 24, 2 | 2009-03-24 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage
Grant 7,498,213 - Kim , et al. March 3, 2 | 2009-03-03 |
Method for forming a thin film
Grant 7,481,882 - Won , et al. January 27, 2 | 2009-01-27 |
Method Of Forming A Layer On A Semiconductor Substrate And Apparatus For Performing The Same
App 20090011595 - SEO; Jung-Hun ; et al. | 2009-01-08 |
Method of forming a layer on a semiconductor substrate
Grant 7,439,192 - Seo , et al. October 21, 2 | 2008-10-21 |
Methods And Apparatus For Forming Thin Films For Semiconductor Devices
App 20080029031 - Yeo; Jae-Hyun ; et al. | 2008-02-07 |
Methods of fabricating integrated circuit devices that utilize doped poly-Si.sub.1-xGe.sub.x conductive plugs as interconnects
Grant 7,316,954 - Oh , et al. January 8, 2 | 2008-01-08 |
Methods and apparatus for forming thin films for semiconductor devices
Grant 7,273,822 - Yeo , et al. September 25, 2 | 2007-09-25 |
Multi-link rear suspension system
Grant 7,243,934 - Lee , et al. July 17, 2 | 2007-07-17 |
Method of forming a metal oxide film
Grant 7,217,669 - Choi , et al. May 15, 2 | 2007-05-15 |
Pad structure, method of forming a pad structure, semiconductor device having a pad structure and method of manufacturing a semiconductor device
App 20070085207 - Lee; Woo-Sung ; et al. | 2007-04-19 |
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning
Grant 7,201,807 - Yim , et al. April 10, 2 | 2007-04-10 |
Non-volatile semiconductor memory device and method of manufacturing the same
App 20070047304 - Lee; Seong-Soo ; et al. | 2007-03-01 |
Method of forming plasma and method of forming a layer using the same
App 20070042132 - Seo; Jung-Hun ; et al. | 2007-02-22 |
Methods Of Fabricating A Semiconductor Substrate For Reducing Wafer Warpage
App 20070004211 - Kim; Won Jin ; et al. | 2007-01-04 |
Method of manufacturing a capacitor
App 20060292810 - Seo; Jung-Hun ; et al. | 2006-12-28 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage
Grant 7,129,174 - Kim , et al. October 31, 2 | 2006-10-31 |
Method for manufacturing a semiconductor device
Grant 7,118,975 - Han , et al. October 10, 2 | 2006-10-10 |
Combination of showerhead and temperature control means for controlling the temperature of the showerhead, and deposition apparatus having the same
App 20060137607 - Seo; Jung-Hun ; et al. | 2006-06-29 |
Method of depositing a metal compound layer and apparatus for depositing a metal compound layer
App 20060128127 - Seo; Jung-Hun ; et al. | 2006-06-15 |
Methods of manufacturing a capacitor and a semiconductor device
App 20060115954 - Shim; Woo-Seok ; et al. | 2006-06-01 |
Apparatus and method of forming a layer on a semiconductor substrate
App 20060096541 - Seo; Jung-Hun ; et al. | 2006-05-11 |
Method of manufacturing a semiconductor device
App 20060073670 - Bae; Yong-Kug ; et al. | 2006-04-06 |
Process chamber for manufacturing seminconductor devices
App 20060054087 - Seo; Jung-Hun ; et al. | 2006-03-16 |
ALD thin film deposition apparatus and thin film deposition method using same
App 20060045970 - Seo; Jung-Hun ; et al. | 2006-03-02 |
Method and apparatus of forming thin film using atomic layer deposition
App 20060024964 - Seo; Jung-Hun ; et al. | 2006-02-02 |
Chemical vapor deposition apparatus
App 20060021578 - Seo; Jung-Hun ; et al. | 2006-02-02 |
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure
Grant 6,989,338 - Choi , et al. January 24, 2 | 2006-01-24 |
Method of forming a layer on a semiconductor substrate and apparatus for performing the same
App 20060000411 - Seo; Jung-Hun ; et al. | 2006-01-05 |
Method and apparatus for processing a semiconductor substrate
App 20050279282 - Park, Kun-Sang ; et al. | 2005-12-22 |
Method of forming a layer on a wafer
App 20050233559 - Yahng, Ji-Sang ; et al. | 2005-10-20 |
Methods of fabricating integrated circuit devices providing improved short prevention
Grant 6,953,744 - Kim , et al. October 11, 2 | 2005-10-11 |
Methods and apparatus for forming thin films for semiconductor devices
App 20050158977 - Yeo, Jae-Hyun ; et al. | 2005-07-21 |
Lift pin for used in semiconductor manufacturing facilities and method of manufacturing the same
App 20050150462 - Seo, Jung-Hun ; et al. | 2005-07-14 |
Multi-link rear suspension system
App 20050140110 - Lee, Un-Koo ; et al. | 2005-06-30 |
One-cylinder stack capacitor and method for fabricating the same
Grant 6,911,364 - Oh , et al. June 28, 2 | 2005-06-28 |
Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same
App 20050087828 - Kim, Yeong-kwan ; et al. | 2005-04-28 |
Integrated circuit capacitors having doped HSG electrodes
Grant 6,876,029 - Lee , et al. April 5, 2 | 2005-04-05 |
Methods of fabricating integrated circuit devices that utilize doped poly-Si1-xGex conductive plugs as interconnects
App 20050064660 - Oh, Sang-jeong ; et al. | 2005-03-24 |
Methods of fabricating integrated circuit devices providing improved short prevention
App 20050054189 - Kim, Hyoung-Joon ; et al. | 2005-03-10 |
Chemical vapor deposition apparatus and method of forming thin layer using same
App 20050022741 - Seo, Jung-Hun ; et al. | 2005-02-03 |
Integrated circuit devices including a resistor pattern
Grant 6,844,610 - Won , et al. January 18, 2 | 2005-01-18 |
Method for manufacturing a semiconductor device
App 20040266118 - Han, Jae-Jong ; et al. | 2004-12-30 |
Method of forming a metal oxide film
App 20040259383 - Choi, Han-mei ; et al. | 2004-12-23 |
Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same
Grant 6,833,310 - Kim , et al. December 21, 2 | 2004-12-21 |
Method of forming a thin film using atomic layer deposition
Grant 6,828,218 - Kim , et al. December 7, 2 | 2004-12-07 |
Integrated circuit devices that utilize doped Poly-Si1-xGex conductive plugs as interconnects
Grant 6,828,616 - Oh , et al. December 7, 2 | 2004-12-07 |
Layer deposition methods
App 20040237893 - Park, In-Sung ; et al. | 2004-12-02 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage
App 20040241946 - Kim, Won-Jin ; et al. | 2004-12-02 |
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure
App 20040209430 - Choi, Han-Mei ; et al. | 2004-10-21 |
Methods for forming capacitors on semiconductor substrates
Grant 6,806,183 - Kang , et al. October 19, 2 | 2004-10-19 |
Method of forming a metal oxide film
Grant 6,800,570 - Choi , et al. October 5, 2 | 2004-10-05 |
Method of manufacturing a semiconductor device including alignment mark
Grant 6,794,263 - Lee , et al. September 21, 2 | 2004-09-21 |
Cryptographic apparatus for supporting multiple modes
App 20040148512 - Park, Tae-Gon ; et al. | 2004-07-29 |
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning
App 20040123879 - Yim, Eun-Taek ; et al. | 2004-07-01 |
Methods of fabricating integrated circuit devices providing improved short prevention
App 20040097067 - Kim, Hyoung-Joon ; et al. | 2004-05-20 |
One-cylinder stack capacitor and method for fabricating the same
App 20040085708 - Oh, Jung-Hwan ; et al. | 2004-05-06 |
Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure
Grant 6,720,275 - Park , et al. April 13, 2 | 2004-04-13 |
Integrated circuit devices including a resistor pattern
App 20040056755 - Won, Seok-Jun ; et al. | 2004-03-25 |
One-cylinder stack capacitor and method for fabricating the same
Grant 6,700,153 - Oh , et al. March 2, 2 | 2004-03-02 |
Integrated circuit capacitors having doped HSG electrodes
App 20040033662 - Lee, Seung-Hwan ; et al. | 2004-02-19 |
Method of forming a contact structure having an anchoring portion
Grant 6,693,032 - Yoo , et al. February 17, 2 | 2004-02-17 |
Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters
Grant 6,680,251 - Won , et al. January 20, 2 | 2004-01-20 |
Integrated circuit devices providing improved short prevention
Grant 6,680,511 - Kim , et al. January 20, 2 | 2004-01-20 |
Integrated circuit devices including a resistor pattern and methods for manufacturing the same
Grant 6,653,155 - Won , et al. November 25, 2 | 2003-11-25 |
Methods of forming integrated circuit capacitors having doped HSG electrodes
Grant 6,624,069 - Lee , et al. September 23, 2 | 2003-09-23 |
Methods of fabricating capacitors including TA2O5 layers in a chamber including changing a TA2O5 layer to heater separation or chamber pressure
App 20030166346 - Park, Ki-Yeon ; et al. | 2003-09-04 |
One-cylinder stack capacitor and method for fabricating the same
App 20030121132 - Oh, Jung-Hwan ; et al. | 2003-07-03 |
Method of forming thin film using atomic layer deposition method
Grant 6,576,053 - Kim , et al. June 10, 2 | 2003-06-10 |
Methods for forming capacitors on semiconductor substrates
App 20030096472 - Kang, Chang-Seok ; et al. | 2003-05-22 |
Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure
Grant 6,555,394 - Park , et al. April 29, 2 | 2003-04-29 |
Method of forming a metal oxide film
App 20030049943 - Choi, Han-Mei ; et al. | 2003-03-13 |
Method of forming a thin film using atomic layer deposition
App 20030013320 - Kim, Yeong-Kwan ; et al. | 2003-01-16 |
Semiconductor device and method for manufacturing the same
App 20020195683 - Kim, Yeong-kwan ; et al. | 2002-12-26 |
Methods of forming thin films by atomic layer deposition
Grant 6,468,924 - Lee , et al. October 22, 2 | 2002-10-22 |
Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters
App 20020137335 - Won, Seok-jun ; et al. | 2002-09-26 |
Integrated circuit devices including a resistor pattern and methods for manufacturing the same
App 20020137273 - Won, Seok-Jun ; et al. | 2002-09-26 |
Method for forming a thin film
App 20020115306 - Won, Seok-Jun ; et al. | 2002-08-22 |
Methods for forming films having high dielectric constants
Grant 6,426,308 - Park , et al. July 30, 2 | 2002-07-30 |
Integrated circuit devices providing improved short prevention and methods of fabricating the same
App 20020096711 - Kim, Hyoung-Joon ; et al. | 2002-07-25 |
Integrated circuit devices that utilize doped Poly-Si1-xGex conductive plugs as interconnects and methods of fabricating the same
App 20020093042 - Oh, Sang-jeong ; et al. | 2002-07-18 |
Front wheel suspension system for a vehicle
Grant 6,412,797 - Park July 2, 2 | 2002-07-02 |
Methods of forming thin films by atomic layer deposition
App 20020068466 - Lee, Seung-hwan ; et al. | 2002-06-06 |
Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane
Grant 6,391,803 - Kim , et al. May 21, 2 | 2002-05-21 |
Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same
App 20020047151 - Kim, Yeong-Kwan ; et al. | 2002-04-25 |
Methods of manufacturing integrated circuit capacitors having ruthenium upper electrodes and capacitors formed thereby
App 20020047148 - Won, Seok-Jun ; et al. | 2002-04-25 |
Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure
App 20020034857 - Park, Ki-Yeon ; et al. | 2002-03-21 |
Method For Manufacturing A Capacitor Having A Two-layer Lower Electrode
App 20020020866 - LEE, JOO-WON ; et al. | 2002-02-21 |
Apparatus and manufacturing method for semiconductor device adopting an interlayer contact structure
App 20010036722 - Yoo, Bong-Young ; et al. | 2001-11-01 |
Capacitor fabricating method of semiconductor device
App 20010003065 - Kim, Young-sun ; et al. | 2001-06-07 |
Methods of forming integrated circuit capacitors having doped HSG electrodes and capacitors formed thereby
App 20010001501 - Lee, Seung-Hwan ; et al. | 2001-05-24 |
Method for fabricating polysilicon film for semiconductor device
Grant 6,221,742 - Park , et al. April 24, 2 | 2001-04-24 |
Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film
Grant 6,207,489 - Nam , et al. March 27, 2 | 2001-03-27 |
Method for manufacturing capacitor of semiconductor device including thermal treatment to dielectric film under hydrogen atmosphere
Grant 6,136,641 - Won , et al. October 24, 2 | 2000-10-24 |
Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method
Grant 6,133,148 - Won , et al. October 17, 2 | 2000-10-17 |
Calibrated methods of forming hemispherical grained silicon layers
Grant 6,117,692 - Kim , et al. September 12, 2 | 2000-09-12 |
Methods of fabricating microelectronic electrode structures using hemispherical grained (HSG) silicon
Grant 5,960,281 - Nam , et al. September 28, 1 | 1999-09-28 |
Systems for forming films having high dielectric constants
Grant 5,910,218 - Park , et al. June 8, 1 | 1999-06-08 |
Manufacturing method of transistors
Grant 5,837,605 - Park , et al. November 17, 1 | 1998-11-17 |
Method of making capacitor of highly integrated semiconductor device using multiple insulation layers
Grant 5,721,153 - Kim , et al. February 24, 1 | 1998-02-24 |
Method for interconnecting layers in semiconductor device
Grant 5,591,671 - Kim , et al. January 7, 1 | 1997-01-07 |
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