PARK; Song Hwan
Patent Applications and Registrations
Patent applications and USPTO patent grants for PARK; Song Hwan.The latest application filed is for "apparatus and method of processing a substrate".
- PARK; Song Hwan - Yongin-si Gyeonggi-do KR
- Park; Song Hwan - Yongin-Si KR
- Park; Song Hwan - Chungcheongnam-do KR
- Park; Song Hwan - Cheonrabuk-do KR
| Patent | Date |
|---|---|
| Apparatus And Method Of Processing A Substrate App 20200392619 - JUNG; Min Jin ; et al. | 2020-12-17 |
| Substrate processing apparatus Grant 10,392,702 - Jung , et al. A | 2019-08-27 |
| Substrate Processing Apparatus App 20180122638 - JUNG; Woo Duck ; et al. | 2018-05-03 |
| Substrate Processing Apparatus App 20170025293 - JUNG; Woo Duck ; et al. | 2017-01-26 |
| Substrate processing device equipped with semicircle shaped antenna Grant 9,416,451 - Je , et al. August 16, 2 | 2016-08-16 |
| Substrate Processing Device For Supplying Reaction Gas Through Symmetry-type Inlet And Outlet App 20130186337 - Je; Sung Tae ; et al. | 2013-07-25 |
| Substrate Processing Device Equipped With Semicircle Shaped Antenna App 20130180453 - Je; Sung Tae ; et al. | 2013-07-18 |
| Method For Depositing Ultra Fine Grain Polysilicon Thin Film App 20110294284 - Kim; Hai Won ; et al. | 2011-12-01 |
| Method For Depositing Ultra Fine Grain Polysilicon Thin Film App 20110136328 - Kim; Hai Won ; et al. | 2011-06-09 |
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