PARK; Sang Kwon
Patent Applications and Registrations
Patent applications and USPTO patent grants for PARK; Sang Kwon.The latest application filed is for "cluster-batch type system for processing substrate".
- PARK; Sang Kwon - Osan-si KR
- Park; Sang Kwon - Pyungtaek KR
- Park, Sang Kwon - Pyungtaek-city KR
| Patent | Date |
|---|---|
| Cluster-batch Type System For Processing Substrate App 20150144060 - PARK; Sang Kwon | 2015-05-28 |
| Method of depositing thin film using hafnium compound Grant 7,163,719 - Park , et al. January 16, 2 | 2007-01-16 |
| Thin film deposition reactor App 20040187779 - Park, Young Hoon ; et al. | 2004-09-30 |
| Method of depositing ALD thin films on wafer App 20040180553 - Park, Young Hoon ; et al. | 2004-09-16 |
| Method of depositing thin film using hafnium compound App 20040105935 - Park, Young Hoon ; et al. | 2004-06-03 |
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