Patent | Date |
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Semiconductor Devices App 20220190168 - Kim; Jung Taek ;   et al. | 2022-06-16 |
Semiconductor Device App 20220190134 - JEONG; SEO JIN ;   et al. | 2022-06-16 |
Semiconductor Device App 20220181498 - KIM; Jung Taek ;   et al. | 2022-06-09 |
Semiconductor Devices App 20220181500 - Ha; Ryong ;   et al. | 2022-06-09 |
Precleaning apparatus and substrate processing system Grant 10,790,133 - Park , et al. September 29, 2 | 2020-09-29 |
Apparatus For Manufacturing Semiconductor Device App 20200194235 - KIM; Ki-hwan ;   et al. | 2020-06-18 |
Field effect transistor with stacked nanowire-like channels and methods of manufacturing the same Grant 10,312,152 - Rodder , et al. | 2019-06-04 |
Semiconductor Process Chamber Including Lower Volume Upper Dome App 20180355510 - Park; Keum Seok ;   et al. | 2018-12-13 |
Semiconductor device having embedded strain-inducing pattern and method of forming the same Grant 9,985,036 - Shin , et al. May 29, 2 | 2018-05-29 |
Field Effect Transistor With Stacked Nanowire-like Channels And Methods Of Manufacturing The Same App 20180114727 - Rodder; Mark S. ;   et al. | 2018-04-26 |
Precleaning Apparatus and Substrate Processing System App 20180025901 - Park; Keum Seok ;   et al. | 2018-01-25 |
Semiconductor device having insulating pattern and method of forming the same Grant 9,793,399 - Park , et al. October 17, 2 | 2017-10-17 |
Semiconductor devices including a stressor in a recess and methods of forming the same Grant 9,768,300 - Shin , et al. September 19, 2 | 2017-09-19 |
Semiconductor Devices Including A Stressor In A Recess And Methods Of Forming The Same App 20170186869 - SHIN; Dong-Suk ;   et al. | 2017-06-29 |
Methods of manufacturing semiconductor devices Grant 9,583,592 - Park , et al. February 28, 2 | 2017-02-28 |
Semiconductor Device Having Embedded Strain-inducing Pattern And Method Of Forming The Same App 20170033114 - Shin; Dong-Suk ;   et al. | 2017-02-02 |
Semiconductor devices including a stressor in a recess and methods of forming the same Grant 9,548,301 - Shin , et al. January 17, 2 | 2017-01-17 |
Semiconductor device having embedded strain-inducing pattern and method of forming the same Grant 9,502,563 - Shin , et al. November 22, 2 | 2016-11-22 |
Semiconductor Device Having Embedded Strain-inducing Pattern And Method Of Forming The Same App 20160197188 - Shin; Dong-Suk ;   et al. | 2016-07-07 |
Semiconductor Devices Including A Stressor In A Recess And Methods Of Forming The Same App 20160148930 - Shin; Dong-Suk ;   et al. | 2016-05-26 |
Semiconductor device having embedded strain-inducing pattern and method of forming the same Grant 9,324,834 - Shin , et al. April 26, 2 | 2016-04-26 |
Semiconductor devices including a stressor in a recess and methods of forming the same Grant 9,257,520 - Shin , et al. February 9, 2 | 2016-02-09 |
Methods Of Manufacturing Semiconductor Devices App 20160035861 - PARK; PAN-KWI ;   et al. | 2016-02-04 |
Semiconductor Device Having Insulating Pattern And Method Of Forming The Same App 20160020324 - Park; Pan-Kwi ;   et al. | 2016-01-21 |
Semiconductor devices including a stressor in a recess and methods of forming the same Grant 9,129,952 - Shin , et al. September 8, 2 | 2015-09-08 |
Semiconductor Devices Including A Stressor In A Recess And Methods Of Forming The Same App 20150214329 - SHIN; Dong-Suk ;   et al. | 2015-07-30 |
Semiconductor Device Having Embedded Strain-inducing Pattern And Method Of Forming The Same App 20150064870 - Shin; Dong-Suk ;   et al. | 2015-03-05 |
Method of forming semiconductor device using Si-H rich silicon nitride layer Grant 8,951,853 - Park , et al. February 10, 2 | 2015-02-10 |
Semiconductor device having embedded strain-inducing pattern and method of forming the same Grant 8,907,426 - Shin , et al. December 9, 2 | 2014-12-09 |
Method of manufacturing semiconductor device Grant 8,772,173 - Yu , et al. July 8, 2 | 2014-07-08 |
Semiconductor Devices Including A Stressor In A Recess And Methods Of Forming The Same App 20140138745 - Shin; Dong-Suk ;   et al. | 2014-05-22 |
Semiconductor Device Having Embedded Strain-inducing Pattern And Method Of Forming The Same App 20130320434 - Shin; Dong-Suk ;   et al. | 2013-12-05 |
Etch stop layers and methods of forming the same Grant 8,502,286 - Lim , et al. August 6, 2 | 2013-08-06 |
Method Of Manufacturing Semiconductor Device App 20120315760 - YU; Hyun-kwan ;   et al. | 2012-12-13 |
Method of fabricating semiconductor integrated circuit device Grant 8,227,308 - Lim , et al. July 24, 2 | 2012-07-24 |
Methods of manufacturing semiconductor devices Grant 7,977,257 - Kim , et al. July 12, 2 | 2011-07-12 |
Etch Stop Layers And Methods Of Forming The Same App 20110018044 - LIM; HA-JIN ;   et al. | 2011-01-27 |
Method Of Forming A Semiconductor Device Having Selective Stress Relaxation Of Etch Stop Layer App 20100171182 - Shin; Dong-Suk ;   et al. | 2010-07-08 |
Method Of Fabricating Semiconductor Integrated Circuit Device App 20100167533 - Lim; Ha-Jin ;   et al. | 2010-07-01 |
Method of manufacturing semiconductor devices Grant 7,704,867 - Kim , et al. April 27, 2 | 2010-04-27 |
Methods of manufacturing semiconductor devices App 20090246949 - Kim; Weon-Hong ;   et al. | 2009-10-01 |
Method Of Manufacturing Semiconductor Devices App 20090233434 - KIM; Weon-Hong ;   et al. | 2009-09-17 |