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Semiconductor device and semiconductor logic device Grant 11,205,466 - Park , et al. December 21, 2 | 2021-12-21 |
Semiconductor Device And Method For Fabricating The Same App 20210183718 - LEE; Sang Young ;   et al. | 2021-06-17 |
Semiconductor device and method for fabricating the same Grant 10,964,614 - Lee , et al. March 30, 2 | 2021-03-30 |
Semiconductor Device And Semiconductor Logic Device App 20210082487 - Park; Byong Guk ;   et al. | 2021-03-18 |
Semiconductor device and semiconductor logic device Grant 10,861,526 - Park , et al. December 8, 2 | 2020-12-08 |
Semiconductor Device And Method For Fabricating The Same App 20200105633 - LEE; Sang Young ;   et al. | 2020-04-02 |
Semiconductor device and semiconductor logic device Grant 10,360,963 - Park , et al. | 2019-07-23 |
Semiconductor Device And Semiconductor Logic Device App 20190189175 - Park; Byong Guk ;   et al. | 2019-06-20 |
Semiconductor Device And Semiconductor Logic Device App 20180114557 - Park; Byong Guk ;   et al. | 2018-04-26 |
Method for fabricating semiconductor device Grant 9,058,984 - Lee , et al. June 16, 2 | 2015-06-16 |
Method for fabricating capacitor with high aspect ratio Grant 8,962,437 - Kim , et al. February 24, 2 | 2015-02-24 |
Method For Fabricating Semiconductor Device App 20140242772 - LEE; Kee-Jeung ;   et al. | 2014-08-28 |
Method for fabricating semiconductor device Grant 8,716,842 - Lee , et al. May 6, 2 | 2014-05-06 |
Method For Fabricating Capacitor With High Aspect Ratio App 20130244394 - KIM; Beom-Yong ;   et al. | 2013-09-19 |
Method For Forming Multi-component Layer, Method For Forming Multi-component Dielectric Layer And Method For Fabricating Semiconductor Device App 20130171797 - PARK; Kyung-Woong ;   et al. | 2013-07-04 |
Capacitor with pillar type storage node and method for fabricating the same Grant 8,441,100 - Lee , et al. May 14, 2 | 2013-05-14 |
Electrode of semiconductor device and method for fabricating capacitor Grant 8,372,746 - Do , et al. February 12, 2 | 2013-02-12 |
Method Of Forming Noble Metal Layer Using Ozone Reaction Gas App 20130022744 - KIL; Deok-Sin ;   et al. | 2013-01-24 |
Semiconductor Device And Method For Fabricating The Same App 20120273921 - DO; Kwan-Woo ;   et al. | 2012-11-01 |
Semiconductor device and method for fabricating the same Grant 8,298,909 - Do , et al. October 30, 2 | 2012-10-30 |
Method of forming noble metal layer using ozone reaction gas Grant 8,288,274 - Kil , et al. October 16, 2 | 2012-10-16 |
Electrode In Semiconductor Device, Capacitor And Method Of Fabricating The Same App 20120147519 - DO; Kwan-Woo ;   et al. | 2012-06-14 |
Method For Fabricating Semiconductor Device App 20120146196 - LEE; Kee-Jeung ;   et al. | 2012-06-14 |
Method of fabricating capacitor Grant 8,148,231 - Do , et al. April 3, 2 | 2012-04-03 |
Semiconductor device and method of fabricating the same Grant 8,134,195 - Lee , et al. March 13, 2 | 2012-03-13 |
Method of fabricating capacitor in semiconductor device Grant 8,035,193 - Do , et al. October 11, 2 | 2011-10-11 |
Capacitor With Pillar Type Storage Node And Method For Fabricating The Same App 20110169134 - Lee; Kee-Jeung ;   et al. | 2011-07-14 |
Electrode Of Semiconductor Device And Method For Fabricating Capacitor App 20110128668 - DO; Kwan-Woo ;   et al. | 2011-06-02 |
Capacitor with pillar type storage node and method for fabricating the same including conductive capping layer Grant 7,910,428 - Lee , et al. March 22, 2 | 2011-03-22 |
Method for fabricating capacitor in semiconductor device Grant 7,816,202 - Do , et al. October 19, 2 | 2010-10-19 |
Electrode In Semiconductor Device, Capacitor And Method Of Fabricating The Same App 20100046138 - DO; Kwan-Woo ;   et al. | 2010-02-25 |
Semiconductor Device And Method Of Fabricating The Same App 20100012989 - LEE; Kee-Jeung ;   et al. | 2010-01-21 |
Capacitor And Method For Fabricating The Same App 20090273882 - PARK; Kyung-Woong ;   et al. | 2009-11-05 |
Method of forming noble metal layer using ozone reaction gas App 20090263967 - Kil; Deok-Sin ;   et al. | 2009-10-22 |
Capacitor In Semiconductor Device And Method Of Fabricating The Same App 20090261454 - DO; Kwan-Woo ;   et al. | 2009-10-22 |
Method For Fabricating Capacitor In Semiconductor Device App 20090061587 - Do; Kwan-Woo ;   et al. | 2009-03-05 |
Capacitor With Pillar Type Storage Node And Method For Fabricating The Same App 20090008743 - Lee; Kee-Jeung ;   et al. | 2009-01-08 |
Capacitor In Semiconductor Device And Method For Fabricating The Same App 20090002917 - KIL; Deok-Sin ;   et al. | 2009-01-01 |
Semiconductor Device And Method For Fabricating The Same App 20080157278 - Do; Kwan-Woo ;   et al. | 2008-07-03 |
Method of forming ruthenium thin film using plasma enhanced process Grant 6,734,100 - Park , et al. May 11, 2 | 2004-05-11 |
Method for forming ruthenium film of a semiconductor device App 20030215994 - Choi, Jung-Hwan ;   et al. | 2003-11-20 |
Method of forming ruthenium thin film using plasma enhanced process App 20030119315 - Park, Kyung Woong ;   et al. | 2003-06-26 |