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Patent applications and USPTO patent grants for Park; Kiejin.The latest application filed is for "method to deposit cvd ruthenium".
Patent | Date |
---|---|
Method to deposit CVD ruthenium Grant 9,938,622 - Ha , et al. April 10, 2 | 2018-04-10 |
Method To Deposit Cvd Ruthenium App 20160160350 - HA; Tae Hong ;   et al. | 2016-06-09 |
Tungsten growth modulation by controlling surface composition Grant 9,169,556 - Wu , et al. October 27, 2 | 2015-10-27 |
Low temperature high pressure high H.sub.2/WF.sub.6 ratio W process for 3D NAND application Grant 8,900,999 - Wu , et al. December 2, 2 | 2014-12-02 |
Method To Deposit Cvd Ruthenium App 20140134351 - Ha; Tae Hong ;   et al. | 2014-05-15 |
Tungsten Growth Modulation By Controlling Surface Composition App 20140106083 - WU; KAI ;   et al. | 2014-04-17 |
High density plasma etchback process for advanced metallization applications Grant 8,431,033 - Zhou , et al. April 30, 2 | 2013-04-30 |
High Density Plasma Etchback Process For Advanced Metallization Applications App 20120152896 - Zhou; Chunming ;   et al. | 2012-06-21 |
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