Patent | Date |
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Substrate carrier Grant 10,790,176 - Bae , et al. September 29, 2 | 2020-09-29 |
Evaluation systems of block copolymer patterns Grant 10,495,615 - Suh , et al. De | 2019-12-03 |
Substrate Carrier App 20190131152 - Bae; Du-Sik ;   et al. | 2019-05-02 |
Thermal Desorption System And Method Of Analyzing A Substrate Using The Same App 20180045697 - SUK; Kyung-Ju ;   et al. | 2018-02-15 |
Evaluation Systems Of Block Copolymer Patterns App 20170089871 - SUH; Min-Soo ;   et al. | 2017-03-30 |
Methods of detecting inhomogeneity of a layer and apparatus for performing the same Grant 9,528,949 - Kim , et al. December 27, 2 | 2016-12-27 |
Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same App 20140270078 - Kim; Jung-Hoon ;   et al. | 2014-09-18 |
Plating Method Using Analysis Photoresist Residue In Plating Solution App 20120183696 - Park; Jung-Dae ;   et al. | 2012-07-19 |
Semiconductor Wet Etchant And Method Of Forming Interconnection Structure Using The Same App 20120009792 - Park; Jung-Dae ;   et al. | 2012-01-12 |
Semiconductor wet etchant and method of forming interconnection structure using the same Grant 8,043,974 - Park , et al. October 25, 2 | 2011-10-25 |
Method of cleaning a quartz part Grant 7,985,297 - Park , et al. July 26, 2 | 2011-07-26 |
Methods Of Manufacturing A Semiconductor Device Using Compositions For Etching Copper App 20110130000 - PARK; Jung-Dae ;   et al. | 2011-06-02 |
Methods of manufacturing a semiconductor device using compositions for etching copper Grant 7,951,653 - Park , et al. May 31, 2 | 2011-05-31 |
Apparatus For Detecting Metal Concentration In An Atmosphere App 20110123400 - Hong; Hyun-Kee ;   et al. | 2011-05-26 |
Semiconductor substrate cleaning methods, and methods of manufacture using same Grant 7,943,562 - Lee , et al. May 17, 2 | 2011-05-17 |
Composition for removing a polymeric contaminant and method of removing a polymeric contaminant using the same Grant 7,795,198 - Lee , et al. September 14, 2 | 2010-09-14 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,687,448 - Park , et al. March 30, 2 | 2010-03-30 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same Grant 7,678,751 - Park , et al. March 16, 2 | 2010-03-16 |
Composition For Removing A Photoresist, Method Of Preparing The Composition, Method Of Removing A Photoresist And Method Of Manufacturing A Semiconductor Device Using The Composition App 20100009885 - PARK; Jung-Dae ;   et al. | 2010-01-14 |
Method Of Cleaning A Quartz Part App 20100009883 - PARK; Jung-Dae ;   et al. | 2010-01-14 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,608,540 - Park , et al. October 27, 2 | 2009-10-27 |
Semiconductor Substrate Cleaning Methods, And Methods Of Manufacture Using Same App 20090093107 - LEE; Da-Hee ;   et al. | 2009-04-09 |
Semiconductor Wet Etchant And Method Of Forming Interconnection Structure Using The Same App 20090017626 - Park; Jung-Dae ;   et al. | 2009-01-15 |
Apparatus And Methods For Detecting Metal Concentration In An Atmosphere App 20080194037 - Hong; Hyun-Kee ;   et al. | 2008-08-14 |
Etching solution for silicon oxide method of manufacturing a semiconductor device using the same Grant 7,351,667 - Hwang , et al. April 1, 2 | 2008-04-01 |
Composition For Removing A Polymeric Contaminant And Method Of Removing A Polymeric Contaminant Using The Same App 20080051313 - Lee; Sang-Mi ;   et al. | 2008-02-28 |
Compositions For Cleaning A Probe Card And Methods Of Cleaning A Probe Card Using The Same App 20080000502 - PARK; Jung-Dae ;   et al. | 2008-01-03 |
Etching solution for silicon oxide and method of manufacturing a semiconductor device using the same App 20070090325 - Hwang; Dong-Won ;   et al. | 2007-04-26 |
Composition and methods removing polysilicon App 20070037400 - Hwang; Dong-Won ;   et al. | 2007-02-15 |
Cleaning composition and related methods App 20070000523 - Kim; Se-Yeon ;   et al. | 2007-01-04 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition App 20060287207 - Park; Jung-Dae ;   et al. | 2006-12-21 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same App 20060122084 - Park; Jung-Dae ;   et al. | 2006-06-08 |