Patent | Date |
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Thickness Measurement Device App 20220268568 - KIM; Hak Sung ;   et al. | 2022-08-25 |
Apparatus For Treating Substrate And Method For Treating Substrate App 20220208569 - KIM; JU WON ;   et al. | 2022-06-30 |
Apparatus For Processing Substrate App 20220205090 - KIM; Ju Won ;   et al. | 2022-06-30 |
Apparatus For Treating A Substrate App 20220197145 - KIM; Ju Won ;   et al. | 2022-06-23 |
Specimen Inspection Apparatus And Specimen Inspection Method App 20210389238 - KIM; Hak Sung ;   et al. | 2021-12-16 |
Thickness measurement apparatus, thickness measurement method, and thickness measurement program Grant 11,150,080 - Kim , et al. October 19, 2 | 2021-10-19 |
Specimen Inspection Device And Specimen Inspection Method App 20210310943 - KIM; Hak Sung ;   et al. | 2021-10-07 |
Device For Measuring Thickness Of Specimen And Method For Measuring Thickness Of Specimen App 20210180946 - KIM; Hak Sung ;   et al. | 2021-06-17 |
Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same Grant 10,643,888 - Kim , et al. | 2020-05-05 |
Thickness Measurement Apparatus, Thickness Measurement Method, And Thickness Measurement Program App 20200116473 - KIM; Hak-Sung ;   et al. | 2020-04-16 |
Semiconductor device and method for fabricating the same Grant 10,553,438 - Jang , et al. Fe | 2020-02-04 |
Semiconductor Device And Method For Fabricating The Same App 20170372906 - JANG; Yun Kyeong ;   et al. | 2017-12-28 |
Overlay Marks, Methods Of Forming The Same, And Methods Of Fabricating Semiconductor Devices Using The Same App 20170278745 - Kim; Jong-Su ;   et al. | 2017-09-28 |
Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same Grant 9,711,395 - Kim , et al. July 18, 2 | 2017-07-18 |
Arrow Grant 9,631,908 - Park April 25, 2 | 2017-04-25 |
Arrow App 20160245627 - PARK; Dong Woon | 2016-08-25 |
Overlay Marks, Methods Of Forming The Same, And Methods Of Fabricating Semiconductor Devices Using The Same App 20160035617 - Kim; Jong-Su ;   et al. | 2016-02-04 |
Method of forming pattern, reticle, and computer readable medium for storing program for forming pattern Grant 8,871,104 - Park , et al. October 28, 2 | 2014-10-28 |
Methods of manufacturing semiconductor device Grant 8,691,693 - Kim , et al. April 8, 2 | 2014-04-08 |
Methods of arranging mask patterns and associated apparatus Grant 8,341,561 - Park , et al. December 25, 2 | 2012-12-25 |
Methods Of Manufacturing Semiconductor Device App 20120122286 - Kim; Sang-Jin ;   et al. | 2012-05-17 |
Method Of Forming Pattern, Reticle, And Computer Readable Medium For Storing Program For Forming Pattern App 20120094492 - Park; Dong-woon ;   et al. | 2012-04-19 |
Methods of arranging mask patterns responsive to assist feature contribution to image intensity and associated apparatus Grant 7,954,073 - Park May 31, 2 | 2011-05-31 |
Methods Of Arranging Mask Patterns And Associated Apparatus App 20110119644 - Park; Dong-woon ;   et al. | 2011-05-19 |
Method of arranging mask patterns and apparatus using the method Grant 7,937,676 - Park May 3, 2 | 2011-05-03 |
Method of arranging mask patterns and apparatus using the method Grant 7,877,723 - Park January 25, 2 | 2011-01-25 |
Methods Of Arranging Mask Patterns Responsive To Assist Feature Contribution To Image Intensity And Associated Apparatus App 20090013302 - Park; Dong-woon | 2009-01-08 |
Auto focus system, auto focus method, and exposure apparatus using the same Grant 7,460,210 - Park December 2, 2 | 2008-12-02 |
Interferometer systems for measuring displacement and exposure systems using the same Grant 7,433,048 - Park October 7, 2 | 2008-10-07 |
Method Of Arranging Mask Patterns And Apparatus Using The Method App 20080138719 - Park; Dong-Woon | 2008-06-12 |
Method Of Arranging Mask Patterns And Apparatus Using The Method App 20080138720 - PARK; Dong-Woon | 2008-06-12 |
Method measuring distortion using exposure equipment App 20070002293 - Park; Dong-woon ;   et al. | 2007-01-04 |
Auto focus system, auto focus method, and exposure apparatus using the same App 20060103824 - Park; Dong-Woon | 2006-05-18 |
Interferometer systems for measuring displacement and exposure systems using the same App 20060077396 - Park; Dong-Woon | 2006-04-13 |