Patent | Date |
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Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device Grant 11,437,264 - Sung , et al. September 6, 2 | 2022-09-06 |
Battery Case For Vehicle App 20220063390 - Park; Chan Hoon ;   et al. | 2022-03-03 |
Method and system for subject-based ranking considering writer-reader interaction Grant 11,157,535 - Kim , et al. October 26, 2 | 2021-10-26 |
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20210202276 - SONG; Seung-Yoon ;   et al. | 2021-07-01 |
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus Grant 11,037,806 - Song , et al. June 15, 2 | 2021-06-15 |
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20210175110 - SUNG; Jung Mo ;   et al. | 2021-06-10 |
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device Grant 10,964,578 - Sung , et al. March 30, 2 | 2021-03-30 |
Method of fabricating semiconductor devices Grant 10,720,491 - Yoon , et al. | 2020-07-21 |
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20200227289 - Song; Seung-Yoon ;   et al. | 2020-07-16 |
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20200135527 - SUNG; Jung Mo ;   et al. | 2020-04-30 |
Plasma Processing Apparatus Including Gas Distribution Plate App 20190304751 - Park; Chan Hoon ;   et al. | 2019-10-03 |
Method Of Fabricating Semiconductor Devices App 20190273130 - YOON; Jun Ho ;   et al. | 2019-09-05 |
Method of fabricating semiconductor devices Grant 10,319,805 - Yoon , et al. | 2019-06-11 |
Plasma Processing Apparatus And Method For Manufacturing Semiconductor Device Using The Same App 20190043694 - PARK; CHAN HOON | 2019-02-07 |
Method And System For Subject-based Ranking Considering Writer-reader Interaction App 20180285366 - Kim; Jinhong ;   et al. | 2018-10-04 |
Method Of Fabricating Semiconductor Devices App 20180108728 - YOON; Jun Ho ;   et al. | 2018-04-19 |
Method for fabricating a semiconductor device Grant 9,799,561 - Park , et al. October 24, 2 | 2017-10-24 |
Method For Fabricating A Semiconductor Device App 20170053828 - PARK; Chan-Hoon ;   et al. | 2017-02-23 |
System and method for providing document based on personal network Grant 8,671,094 - Kang , et al. March 11, 2 | 2014-03-11 |
System and method for providing search result based on personal network Grant 8,612,433 - Kang , et al. December 17, 2 | 2013-12-17 |
Field Effect Transistor And Method Of Fabricating The Same App 20130285019 - KIM; Dongwon ;   et al. | 2013-10-31 |
System And Method For Providing Document Based On Personal Network App 20120084318 - KANG; In Ho ;   et al. | 2012-04-05 |
System And Method For Providing Search Result Based On Personal Network App 20120084284 - KANG; In Ho ;   et al. | 2012-04-05 |
Measurement system for correcting overlay measurement error Grant 8,117,001 - Lee , et al. February 14, 2 | 2012-02-14 |
Measurement System For Correcting Overlay Measurement Error App 20110125440 - Lee; Moon-Sang ;   et al. | 2011-05-26 |
Measurement system for correcting overlay measurement error Grant 7,908,105 - Lee , et al. March 15, 2 | 2011-03-15 |
Device for controlling dispensing error in photo spinner equipment Grant 7,594,969 - Lee , et al. September 29, 2 | 2009-09-29 |
Overlay Mark Of Semiconductor Device And Semiconductor Device Including The Overlay Mark App 20080230929 - Shin; Jang-ho ;   et al. | 2008-09-25 |
Measurement System For Correcting Overlay Measurement Error App 20080228435 - LEE; Moon-Sang ;   et al. | 2008-09-18 |
Front panel operating apparatus and method Grant 7,419,123 - Park , et al. September 2, 2 | 2008-09-02 |
Information input system for terminal and multifunctional button assembly for use in the same Grant 7,253,367 - Park , et al. August 7, 2 | 2007-08-07 |
Information input system for terminal and multifunctional button assembly for use in the same App 20070114114 - Park; Chan Hoon ;   et al. | 2007-05-24 |
Information input system for terminal and multifunctional button assembly for use in the same Grant 7,183,513 - Park , et al. February 27, 2 | 2007-02-27 |
Device for controlling dispensing error in photo spinner equipment App 20070017635 - Lee; Jong-Hwa ;   et al. | 2007-01-25 |
Information input system for terminal and multifunctional button assembly for use in the same App 20060090993 - Park; Chan Hoon ;   et al. | 2006-05-04 |
Method and apparatus for adjusting a photo-exposure time Grant 7,012,670 - Park March 14, 2 | 2006-03-14 |
System and method of detecting misaligned wafer App 20060010710 - Park; Chan-Hoon ;   et al. | 2006-01-19 |
Front panel operating apparatus and method App 20050139731 - Park, Chan Hoon ;   et al. | 2005-06-30 |
Front panel operating apparatus and method Grant 6,883,759 - Park , et al. April 26, 2 | 2005-04-26 |
System for adjusting a photo-exposure time App 20050078285 - Park, Chan-Hoon | 2005-04-14 |
Method for automatically correcting overlay alignment of a semiconductor wafer Grant 6,826,743 - Park , et al. November 30, 2 | 2004-11-30 |
System for adjusting a photo-exposure time Grant 6,825,912 - Park November 30, 2 | 2004-11-30 |
Method for controlling a processing apparatus Grant 6,700,648 - Jun , et al. March 2, 2 | 2004-03-02 |
Front panel operating apparatus and method App 20030160135 - Park, Chan Hoon ;   et al. | 2003-08-28 |
Method for automatically correcting overlay alignment of a semiconductor wafer App 20030074639 - Park, Chan-Hoon ;   et al. | 2003-04-17 |
Method for controlling a processing apparatus App 20030058428 - Jun, Kyoung Shik ;   et al. | 2003-03-27 |
Method and apparatus for heating a wafer, and method and apparatus for baking a photoresist film on a wafer App 20020088608 - Park, Chan-Hoon | 2002-07-11 |
System for adjusting a photo-exposure time App 20020001070 - Park, Chan-Hoon | 2002-01-03 |