| Patent | Date |
|---|
Display Device
App 20220149080 - LEE; Seung Chan ; et al. | 2022-05-12 |
Display Device
App 20220077263 - LEE; Seung Chan ; et al. | 2022-03-10 |
Light source member and display device having the same
Grant 11,169,320 - Oh , et al. November 9, 2 | 2021-11-09 |
Display Device And Manufacturing Method Thereof
App 20210327862 - BAE; Kwang Soo ; et al. | 2021-10-21 |
Temperature Sensor For End Point Detection During Plasma Enhanced Chemical Vapor Deposition Chamber Clean
App 20210292894 - PENG; Fei ; et al. | 2021-09-23 |
Backlight unit, display device including the same, and manufacturing method thereof
Grant 10,989,959 - Bae , et al. April 27, 2 | 2021-04-27 |
Display Device And Method Of Manufacturing The Same
App 20210104651 - Bae; Kwang Soo ; et al. | 2021-04-08 |
Display Device
App 20210091272 - BAE; Kwang Soo ; et al. | 2021-03-25 |
Plasma Treatment On Metal-oxide Tft
App 20210043757 - CHOI; Soo Young ; et al. | 2021-02-11 |
Light Source Member And Display Device Having The Same
App 20200400874 - OH; Min Jeong ; et al. | 2020-12-24 |
Backlight Unit, Display Device Including The Same, And Manufacturing Method Thereof
App 20200387029 - BAE; Kwang Soo ; et al. | 2020-12-10 |
Plasma treatment on metal-oxide TFT
Grant 10,854,737 - Choi , et al. December 1, 2 | 2020-12-01 |
Corner spoiler for improving profile uniformity
Grant 10,697,063 - Zhao , et al. | 2020-06-30 |
Flip edge shadow frame
Grant 10,676,817 - Wang , et al. | 2020-06-09 |
Heat Conductive Spacer For Plasma Processing Chamber
App 20200098549 - PARK; Beom Soo ; et al. | 2020-03-26 |
Chamber Cleaning Process
App 20200020512 - CHEN; Weiting ; et al. | 2020-01-16 |
Roughened substrate support
Grant 10,434,629 - Lee , et al. O | 2019-10-08 |
Plasma uniformity control by gas diffuser hole design
Grant 10,312,058 - Choi , et al. | 2019-06-04 |
Plasma uniformity control by gas diffuser hole design
Grant 10,262,837 - Choi , et al. | 2019-04-16 |
Substrate support with quadrants
Grant 10,123,379 - Tiner , et al. November 6, 2 | 2018-11-06 |
Applying Equalized Plasma Coupling Design For Mura Free Susceptor
App 20180218905 - PARK; Beom Soo ; et al. | 2018-08-02 |
Low temperature multilayer dielectric film for passivation and capacitor
Grant 10,002,711 - Wang , et al. June 19, 2 | 2018-06-19 |
Plasma Treatment On Metal-oxide Tft
App 20180145157 - CHOI; Soo Young ; et al. | 2018-05-24 |
Diffuser With Corner HCG
App 20180090300 - ZHAO; Lai ; et al. | 2018-03-29 |
Endpoint Detection For A Chamber Cleaning Process
App 20180057935 - BUDIARTO; Edward ; et al. | 2018-03-01 |
Plasma treatment on metal-oxide TFT
Grant 9,887,277 - Choi , et al. February 6, 2 | 2018-02-06 |
Plasma Uniformity Control By Gas Diffuser Hole Design
App 20180025890 - CHOI; Soo Young ; et al. | 2018-01-25 |
Rf Return Strap Shielding Cover
App 20170365449 - CUI; Yi ; et al. | 2017-12-21 |
Display Device
App 20170357115 - JEON; Young Jae ; et al. | 2017-12-14 |
Non-shadow Frame Plasma Processing Chamber
App 20170335459 - CHOI; Young-jin ; et al. | 2017-11-23 |
Anodized showerhead
Grant 9,758,869 - Choi , et al. September 12, 2 | 2017-09-12 |
Substrate Support With Quadrants
App 20170231033 - TINER; Robin L. ; et al. | 2017-08-10 |
Substrate support with quadrants
Grant 9,677,177 - Tiner , et al. June 13, 2 | 2017-06-13 |
Image sensor and method of processing image data with multiple differential ramping up/down signals, and image processing device including the image sensor
Grant 9,521,344 - Lee , et al. December 13, 2 | 2016-12-13 |
Interface adhesion improvement method
Grant 9,449,809 - Choi , et al. September 20, 2 | 2016-09-20 |
Low Temperature Multilayer Dielectric Film For Passivation And Capacitor
App 20160240312 - WANG; Dapeng ; et al. | 2016-08-18 |
Plasma Treatment On Metal-oxide Tft
App 20160218000 - CHOI; Soo Young ; et al. | 2016-07-28 |
Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor
App 20160208380 - WHITE; John M. ; et al. | 2016-07-21 |
Gas diffuser assembly
Grant D756,502 - Lee , et al. May 17, 2 | 2016-05-17 |
Methods for depositing a silicon containing layer with argon gas dilution
Grant 9,287,137 - Wang , et al. March 15, 2 | 2016-03-15 |
Plasma Uniformity Control By Gas Diffuser Hole Design
App 20160056019 - CHOI; Soo Young ; et al. | 2016-02-25 |
Barrier films for thin film encapsulation
Grant 9,269,923 - Choi , et al. February 23, 2 | 2016-02-23 |
A-Si seasoning effect to improve SiN run-to-run uniformity
Grant 9,230,796 - Furuta , et al. January 5, 2 | 2016-01-05 |
Metal Oxide Tft Stability Improvement
App 20150380561 - WON; Tae K. ; et al. | 2015-12-31 |
Plasma uniformity control by gas diffuser hole design
Grant 9,200,368 - Choi , et al. December 1, 2 | 2015-12-01 |
Gas Confiner Assembly For Eliminating Shadow Frame
App 20150211121 - ZHAO; Lai ; et al. | 2015-07-30 |
Corner Spoiler For Improving Profile Uniformity
App 20150211120 - ZHAO; Lai ; et al. | 2015-07-30 |
Roughened Substrate Support
App 20150202739 - LEE; Dongsuh ; et al. | 2015-07-23 |
A-si Seasoning Effect To Improve Sin Run-to-run Uniformity
App 20150179426 - FURUTA; Gaku ; et al. | 2015-06-25 |
Off-center ground return for RF-powered showerhead
Grant 9,039,864 - Baek , et al. May 26, 2 | 2015-05-26 |
Substrate Support With Quadrants
App 20150114948 - TINER; Robin L. ; et al. | 2015-04-30 |
a-Si seasoning effect to improve SiN run-to-run uniformity
Grant 8,999,847 - Furuta , et al. April 7, 2 | 2015-04-07 |
20987
App 20150042859 - LEE; Jung Ho ; et al. | 2015-02-12 |
SiO.sub.x process chemistry development using microwave plasma CVD
Grant 8,906,813 - Won , et al. December 9, 2 | 2014-12-09 |
Method for depositing an inorganic encapsulating film
Grant 8,901,015 - Chen , et al. December 2, 2 | 2014-12-02 |
Thin film deposition using microwave plasma
Grant 8,883,269 - Won , et al. November 11, 2 | 2014-11-11 |
Balancing RF bridge assembly
Grant 8,875,657 - Baek , et al. November 4, 2 | 2014-11-04 |
Substrate support with gas introduction openings
Grant 8,853,098 - Kim , et al. October 7, 2 | 2014-10-07 |
Barrier Film Performance With N2o Dilution Process For Thin Film Encapsulation
App 20140264296 - CHOI; Young Jin ; et al. | 2014-09-18 |
Adhesion Improvement Between Cvd Dielectric Film And Cu Substrate
App 20140272187 - WON; Tae Kyung ; et al. | 2014-09-18 |
Flip Edge Shadow Frame
App 20140251216 - WANG; Qunhua ; et al. | 2014-09-11 |
Heated Backing Plate
App 20140174361 - CHEN; Jrjyan Jerry ; et al. | 2014-06-26 |
Detecting plasma chamber malfunction
Grant 8,674,844 - Park , et al. March 18, 2 | 2014-03-18 |
Flexible process condition monitoring
Grant 8,670,857 - Kim , et al. March 11, 2 | 2014-03-11 |
Process Gas Flow Guides For Large Area Plasma Enhanced Chemical Vapor Deposition Systems And Methods
App 20140030056 - Lee; Dongsuh ; et al. | 2014-01-30 |
Roughened Substrate Support
App 20140027289 - LEE; Dongsuh ; et al. | 2014-01-30 |
Interface Adhesion Improvement Method
App 20140024180 - CHOI; Young Jin ; et al. | 2014-01-23 |
Siox Process Chemistry Development Using Microwave Plasma Cvd
App 20130302999 - WON; Tae Kyung ; et al. | 2013-11-14 |
Flip Edge Shadow Frame
App 20130263782 - WANG; QUNHUA ; et al. | 2013-10-10 |
Method For Depositing An Encapsulating Film
App 20130210199 - CHEN; Jrjyan Jerry ; et al. | 2013-08-15 |
Robust Outlet Plumbing For High Power Flow Remote Plasma Source
App 20130140009 - White; John M. ; et al. | 2013-06-06 |
Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber
Grant 8,430,961 - Park , et al. April 30, 2 | 2013-04-30 |
Methods For Depositing A Silicon Containing Layer With Argon Gas Dilution
App 20130087783 - Wang; Qunhua ; et al. | 2013-04-11 |
Plasma Monitoring And Minimizing Stray Capacitance
App 20130071581 - Baek; Jonghoon ; et al. | 2013-03-21 |
Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor
App 20130068161 - White; John M. ; et al. | 2013-03-21 |
Prevention of film deposition on PECVD process chamber wall
Grant 8,381,677 - Park , et al. February 26, 2 | 2013-02-26 |
Reducing electrostatic charge by roughening the susceptor
Grant 8,372,205 - Choi , et al. February 12, 2 | 2013-02-12 |
Power loading substrates to reduce particle contamination
Grant 8,361,549 - Yim , et al. January 29, 2 | 2013-01-29 |
Processing Chamber With Cooled Gas Delivery Line
App 20120279943 - Nominanda; Helinda ; et al. | 2012-11-08 |
Thin Film Deposition Using Microwave Plasma
App 20120171391 - WON; Tae Kyung ; et al. | 2012-07-05 |
Substrate Support with Gas Introduction Openings
App 20120149194 - KIM; SAM H. ; et al. | 2012-06-14 |
Particle reduction on surfaces of chemical vapor deposition processing apparatus
Grant 8,173,228 - Choi , et al. May 8, 2 | 2012-05-08 |
Frequency monitoring to detect plasma process abnormality
Grant 8,174,400 - Park , et al. May 8, 2 | 2012-05-08 |
Power Loading Substrates To Reduce Particle Contamination
App 20120082802 - YIM; Dong-Kil ; et al. | 2012-04-05 |
Multi-gas flow diffuser
Grant 8,147,614 - White , et al. April 3, 2 | 2012-04-03 |
Apparatus for depositing a uniform silicon film and methods for manufacturing the same
Grant 8,142,606 - Choi , et al. March 27, 2 | 2012-03-27 |
A-si Seasoning Effect To Improve Sin Run-to-run Uniformity
App 20120040536 - Furuta; Gaku ; et al. | 2012-02-16 |
Low temperature thin film transistor process, device property, and device stability improvement
Grant 8,110,453 - Yang , et al. February 7, 2 | 2012-02-07 |
Precise Temperature Control For Teos Application By Heat Transfer Fluid
App 20120009347 - Lee; Dongsuh ; et al. | 2012-01-12 |
Plasma uniformity control by gas diffuser hole design
Grant 8,083,853 - Choi , et al. December 27, 2 | 2011-12-27 |
Power loading substrates to reduce particle contamination
Grant 8,075,952 - Yim , et al. December 13, 2 | 2011-12-13 |
Microcrystalline silicon thin film transistor
Grant 8,076,222 - Won , et al. December 13, 2 | 2011-12-13 |
Diffuser gravity support
Grant 8,075,690 - Keller , et al. December 13, 2 | 2011-12-13 |
Plasma uniformity control by gas diffuser curvature
Grant 8,074,599 - Choi , et al. December 13, 2 | 2011-12-13 |
Plasma Uniformity Control By Gas Diffuser Hole Design
App 20110290183 - Choi; Soo Young ; et al. | 2011-12-01 |
Frequency Monitoring to Detect Plasma Process Abnormality
App 20110241892 - Park; Beom Soo ; et al. | 2011-10-06 |
Multistage amplifying circuit
Grant 8,026,759 - Choi , et al. September 27, 2 | 2011-09-27 |
Flexible Process Condition Monitoring
App 20110190921 - Kim; Hong Soon ; et al. | 2011-08-04 |
Balancing Rf Bridge Assembly
App 20110185972 - Baek; Jonghoon ; et al. | 2011-08-04 |
Off-Center Ground Return for RF-Powered Showerhead
App 20110126405 - Baek; Jonghoon ; et al. | 2011-06-02 |
Gate dielectric film with controlled structural and physical properties over a large surface area substrate
App 20110095402 - Park; Beom Soo ; et al. | 2011-04-28 |
Frequency monitoring to detect plasma process abnormality
Grant 7,902,991 - Park , et al. March 8, 2 | 2011-03-08 |
Multistage Amplifying Circuit
App 20110037520 - CHOI; MICHAEL ; et al. | 2011-02-17 |
Method of controlling film uniformity and composition of a PECVD-deposited A-SiN.sub.x : H gate dielectric film deposited over a large substrate surface
Grant 7,884,035 - Park , et al. February 8, 2 | 2011-02-08 |
Multi-gas Flow Diffuser
App 20100311249 - WHITE; JOHN M. ; et al. | 2010-12-09 |
Anodized Showerhead
App 20100288197 - Choi; Soo Young ; et al. | 2010-11-18 |
Microcrystalline silicon thin film transistor
Grant 7,833,885 - Won , et al. November 16, 2 | 2010-11-16 |
Detecting plasma chamber malfunction
App 20100245084 - Park; Beom Soo ; et al. | 2010-09-30 |
Method of controlling the film properties of PECVD-deposited thin films
Grant 7,785,672 - Choi , et al. August 31, 2 | 2010-08-31 |
Substrate Support With Gas Introduction Openings
App 20100184290 - Kim; Sam H. ; et al. | 2010-07-22 |
Method To Prevent Thin Spot In Large Size System
App 20100151688 - Choi; Young Jin ; et al. | 2010-06-17 |
Method for supporting a glass substrate to improve uniform deposition thickness
Grant 7,732,010 - Choi , et al. June 8, 2 | 2010-06-08 |
Robust Outlet Plumbing For High Power Flow Remote Plasma Source
App 20090283039 - WHITE; JOHN M. ; et al. | 2009-11-19 |
Low Temperature Thin Film Transistor Process, Device Property, And Device Stability Improvement
App 20090261331 - Yang; Ya-Tang ; et al. | 2009-10-22 |
Method To Prevent Parasitic Plasma Generation In Gas Feedthru Of Large Size Pecvd Chamber
App 20090255798 - Furuta; Gaku ; et al. | 2009-10-15 |
Plasma Processing Apparatus And Method
App 20090258162 - FURUTA; GAKU ; et al. | 2009-10-15 |
Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films
Grant 7,589,031 - Anwar , et al. September 15, 2 | 2009-09-15 |
Microcrystalline Silicon Thin Film Transistor
App 20090200552 - Won; Tae Kyung ; et al. | 2009-08-13 |
High Temperature Thin Film Transistor On Soda Lime Glass
App 20090200553 - Yang; Ya-Tang ; et al. | 2009-08-13 |
Rf Grounding Of Cathode In Process Chamber
App 20090178617 - White; John M. ; et al. | 2009-07-16 |
Thin Film Transistor On Soda Lime Glass With Barrier Layer
App 20090146264 - YANG; YA-TANG ; et al. | 2009-06-11 |
RF grounding of cathode in process chamber
Grant 7,534,301 - White , et al. May 19, 2 | 2009-05-19 |
Offset Liner For Chamber Evacuation
App 20090107955 - TINER; ROBIN L. ; et al. | 2009-04-30 |
Clamp Mechanism For A Backing Plate Disposed In A Pecvd Chamber
App 20090083953 - KIM; Sam H. ; et al. | 2009-04-02 |
Source Gas Flow Path Control In Pecvd System To Control A By-product Film Deposition On Inside Chamber
App 20090064934 - PARK; BEOM SOO ; et al. | 2009-03-12 |
Method Of Cleaning Plasma Enhanced Chemical Vapor Deposition Chamber
App 20090056743 - Choi; Soo Young ; et al. | 2009-03-05 |
Diffuser Gravity Support
App 20090007846 - KELLER; ERNST ; et al. | 2009-01-08 |
Apparatus For Depositing A Uniform Silicon Film And Methods For Manufacturing The Same
App 20080305246 - Choi; Soo Young ; et al. | 2008-12-11 |
Method of controlling film uniformity of a cvd-deposited silicon nitride film during deposition over a large substrate surface
App 20080268175 - Park; Beom Soo ; et al. | 2008-10-30 |
Diffuser gravity support
Grant 7,429,410 - Keller , et al. September 30, 2 | 2008-09-30 |
Prevention Of Film Deposition On Pecvd Process Chamber Wall
App 20080187682 - Park; Beom Soo ; et al. | 2008-08-07 |
Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films
App 20080132080 - Anwar; Suhail ; et al. | 2008-06-05 |
Frequency Monitoring to Detect Plasma Process Abnormality
App 20080074255 - Park; Beom Soo ; et al. | 2008-03-27 |
Power loading substrates to reduce particle contamination
App 20080003358 - Yim; Dong-Kil ; et al. | 2008-01-03 |
Particle reduction on surfaces of chemical vapor deposition processing apparatus
App 20070178810 - Choi; Soo Young ; et al. | 2007-08-02 |
Pecvd silicon oxide thin film deposition
Grant 7,199,061 - Choi , et al. April 3, 2 | 2007-04-03 |
Plasma uniformity control by gas diffuser hole design
App 20060236934 - Choi; Soo Young ; et al. | 2006-10-26 |
Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors
Grant 7,125,758 - Choi , et al. October 24, 2 | 2006-10-24 |
Plasma uniformity control by gas diffuser curvature
App 20060228496 - Choi; Soo Young ; et al. | 2006-10-12 |
Anodized substrate support
App 20060185795 - Choi; Soo Young ; et al. | 2006-08-24 |
RF grounding of cathode in process chamber
App 20060060302 - White; John M. ; et al. | 2006-03-23 |
Diffuser gravity support
App 20060060138 - Keller; Ernst ; et al. | 2006-03-23 |
Reducing electrostatic charge by roughening the susceptor
App 20060032586 - Choi; Soo Young ; et al. | 2006-02-16 |
Method of controlling the film properties of a CVD-deposited silicon nitride film
App 20060019502 - Park; Beom Soo ; et al. | 2006-01-26 |
Method of controlling the film properties of PECVD-deposited thin films
App 20050255257 - Choi, Soo Young ; et al. | 2005-11-17 |
Plasma uniformity control by gas diffuser hole design
App 20050251990 - Choi, Soo Young ; et al. | 2005-11-17 |
Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors
App 20050233595 - Choi, Soo Young ; et al. | 2005-10-20 |
Growth of carbon nanotubes at low temperature
App 20050233263 - Park, Beom Soo ; et al. | 2005-10-20 |
Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow
Grant 6,825,134 - Law , et al. November 30, 2 | 2004-11-30 |
Anodized substrate support
App 20040221959 - Choi, Soo Young ; et al. | 2004-11-11 |
Pecvd silicon oxide thin film deposition
App 20040209487 - Choi, Soo Young ; et al. | 2004-10-21 |
System and method for metal induced crystallization of polycrystalline thin film transistors
App 20030203123 - Shang, Quanyaun ; et al. | 2003-10-30 |
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