Patent | Date |
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Method And System For Mixed Mode Wafer Inspection App 20220230293 - Lin; Jason Z. ;   et al. | 2022-07-21 |
Method and system for mixed mode wafer inspection Grant 11,295,438 - Lin , et al. April 5, 2 | 2022-04-05 |
Blasting method and system Grant 11,060,832 - Park July 13, 2 | 2021-07-13 |
Measurement of Overlay Error Using Device Inspection System App 20210159128 - Hoo; Choon Hoong ;   et al. | 2021-05-27 |
Measurement of overlay error using device inspection system Grant 10,943,838 - Hoo , et al. March 9, 2 | 2021-03-09 |
Computer Assisted Weak Pattern Detection and Quantification System App 20200372630 - Haque; Naoshin ;   et al. | 2020-11-26 |
Using stochastic failure metrics in semiconductor manufacturing Grant 10,818,001 - Leung , et al. October 27, 2 | 2020-10-27 |
Hybrid design layout to identify optical proximity correction-related systematic defects Grant 10,796,065 - Park , et al. October 6, 2 | 2020-10-06 |
Computer assisted weak pattern detection and quantification system Grant 10,740,888 - Haque , et al. A | 2020-08-11 |
Using Stochastic Failure Metrics In Semiconductor Manufacturing App 20200082523 - Leung; Wing-Shan Ribi ;   et al. | 2020-03-12 |
Blasting Method And System App 20200033107 - Park; Allen | 2020-01-30 |
Hybrid Design Layout To Identify Optical Proximity Correction-related Systematic Defects App 20190392111 - Park; Allen ;   et al. | 2019-12-26 |
Self directed metrology and pattern classification Grant 10,483,081 - Park , et al. Nov | 2019-11-19 |
Measurement of Overlay Error Using Device Inspection System App 20190252270 - Hoo; Choon Hoong ;   et al. | 2019-08-15 |
Determining one or more characteristics of a pattern of interest on a specimen Grant 10,359,371 - Duffy , et al. | 2019-07-23 |
System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor wafer Grant 10,262,408 - Park , et al. | 2019-04-16 |
Method and system for weak pattern quantification Grant 10,262,831 - Cross , et al. | 2019-04-16 |
Method and System for Mixed Mode Wafer Inspection App 20190108630 - Lin; Jason Z. ;   et al. | 2019-04-11 |
Based device risk assessment Grant 10,223,492 - Park , et al. | 2019-03-05 |
Method and system for mixed mode wafer inspection Grant 10,192,303 - Lin , et al. Ja | 2019-01-29 |
Image based specimen process control Grant 10,181,185 - Park , et al. Ja | 2019-01-15 |
System, Method And Computer Program Product For Systematic And Stochastic Characterization Of Pattern Defects Identified From A Semiconductor Wafer App 20180300870 - Park; Allen ;   et al. | 2018-10-18 |
Finding patterns in a design based on the patterns and their surroundings Grant 10,062,012 - Park , et al. August 28, 2 | 2018-08-28 |
Blasting systems and methods Grant 10,030,959 - Park July 24, 2 | 2018-07-24 |
Method and System for Weak Pattern Quantification App 20180174797 - Cross; Andrew ;   et al. | 2018-06-21 |
System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components Grant 9,940,705 - Park , et al. April 10, 2 | 2018-04-10 |
System, Method And Computer Program Product For Detecting Defects In A Fabricated Target Component Using Consistent Modulation For The Target And Reference Components App 20170323434 - Park; Allen ;   et al. | 2017-11-09 |
Computer Assisted Weak Pattern Detection and Quantification System App 20170309009 - Haque; Naoshin ;   et al. | 2017-10-26 |
Image Based Specimen Process Control App 20170200264 - Park; Allen ;   et al. | 2017-07-13 |
Using Three-dimensional Representations For Defect-related Applications App 20170161418 - Park; Allen ;   et al. | 2017-06-08 |
Determining One or More Characteristics of a Pattern of Interest on a Specimen App 20170059491 - Duffy; Brian ;   et al. | 2017-03-02 |
Method and system for universal target based inspection and metrology Grant 9,576,861 - Park , et al. February 21, 2 | 2017-02-21 |
Pattern failure discovery by leveraging nominal characteristics of alternating failure modes Grant 9,536,299 - Park January 3, 2 | 2017-01-03 |
Self Directed Metrology and Pattern Classification App 20160372303 - Park; Allen ;   et al. | 2016-12-22 |
Metrology optimized inspection Grant 9,518,932 - Park , et al. December 13, 2 | 2016-12-13 |
Methods and systems for utilizing design data in combination with inspection data Grant 9,401,014 - Zafar , et al. July 26, 2 | 2016-07-26 |
Blasting Systems And Methods App 20160138899 - Park; Allen | 2016-05-19 |
Inspection guided overlay metrology Grant 9,170,209 - Chang , et al. October 27, 2 | 2015-10-27 |
Determining design coordinates for wafer defects Grant 9,087,367 - Chang , et al. July 21, 2 | 2015-07-21 |
Pattern Failure Discovery by Leveraging Nominal Characteristics of Alternating Failure Modes App 20150199803 - Park; Allen | 2015-07-16 |
Methods and Systems for Utilizing Design Data in Combination with Inspection Data App 20150154746 - Zafar; Khurram ;   et al. | 2015-06-04 |
Metrology Optimized Inspection App 20150124247 - Park; Allen ;   et al. | 2015-05-07 |
Detecting IC Reliability Defects App 20150120220 - Wu; Joanne ;   et al. | 2015-04-30 |
Region based virtual fourier filter Grant 8,989,479 - Gao , et al. March 24, 2 | 2015-03-24 |
Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer Grant 8,948,495 - Marcuccilli , et al. February 3, 2 | 2015-02-03 |
Methods and systems for utilizing design data in combination with inspection data Grant 8,923,600 - Zafar , et al. December 30, 2 | 2014-12-30 |
Methods and systems for utilizing design data in combination with inspection data Grant 08923600 - | 2014-12-30 |
Alteration for wafer inspection Grant 8,826,200 - Park , et al. September 2, 2 | 2014-09-02 |
Method and System for Universal Target Based Inspection and Metrology App 20140199791 - Park; Allen ;   et al. | 2014-07-17 |
Method and System for Mixed Mode Wafer Inspection App 20140153814 - Lin; Jason Z. ;   et al. | 2014-06-05 |
Based device risk assessment Grant 8,656,323 - Park , et al. February 18, 2 | 2014-02-18 |
Inspecting a Wafer and/or Predicting One or More Characteristics of a Device Being Formed on a Wafer App 20140037187 - Marcuccilli; Gino ;   et al. | 2014-02-06 |
Design Alteration for Wafer Inspection App 20130318485 - Park; Allen ;   et al. | 2013-11-28 |
Scanner performance comparison and matching using design and defect data Grant 8,594,823 - Park , et al. November 26, 2 | 2013-11-26 |
Inspection guided overlay metrology Grant 8,559,001 - Chang , et al. October 15, 2 | 2013-10-15 |
Determining Design Coordinates for Wafer Defects App 20130064442 - Chang; Ellis ;   et al. | 2013-03-14 |
Using Three-Dimensional Representations for Defect-Related Applications App 20120316855 - Park; Allen ;   et al. | 2012-12-13 |
Design Based Device Risk Assessment App 20120216169 - Park; Allen ;   et al. | 2012-08-23 |
Region Based Virtual Fourier Filter App 20120141013 - Gao; Lisheng ;   et al. | 2012-06-07 |
Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions Grant 8,194,968 - Park , et al. June 5, 2 | 2012-06-05 |
Inspection Guided Overlay Metrology App 20110170091 - Chang; Ellis ;   et al. | 2011-07-14 |
Scanner Performance Comparison And Matching Using Design And Defect Data App 20110172804 - Park; Allen ;   et al. | 2011-07-14 |
Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects Grant 7,975,245 - Florence , et al. July 5, 2 | 2011-07-05 |
Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan Grant 7,711,514 - Park , et al. May 4, 2 | 2010-05-04 |
Methods And Systems For Utilizing Design Data In Combination With Inspection Data App 20090297019 - Zafar; Khurram ;   et al. | 2009-12-03 |
Methods and systems for utilizing design data in combination with inspection data Grant 7,570,796 - Zafar , et al. August 4, 2 | 2009-08-04 |
Computer-implemented Methods For Determining If Actual Defects Are Potentially Systematic Defects Or Potentially Random Defects App 20090055783 - Florence; Glenn ;   et al. | 2009-02-26 |
Computer-implemented Methods, Carrier Media, And Systems For Generating A Metrology Sampling Plan App 20090043527 - Park; Allen ;   et al. | 2009-02-12 |
Methods And Systems For Using Electrical Information For A Device Being Fabricated On A Wafer To Perform One Or More Defect-related Functions App 20080167829 - Park; Allen ;   et al. | 2008-07-10 |
Methods And Systems For Utilizing Design Data In Combination With Inspection Data App 20070288219 - Zafar; Khurram ;   et al. | 2007-12-13 |