Parimi; Venkata Sharat Chandra
Patent Applications and Registrations
Patent applications and USPTO patent grants for Parimi; Venkata Sharat Chandra.The latest application filed is for "methods to eliminate of deposition on wafer bevel and backside".
- Parimi; Venkata Sharat Chandra - Sunnyvale CA
- PARIMI; Venkata Sharat Chandra - Santa Clara CA
| Patent | Date |
|---|---|
| Methods To Eliminate Of Deposition On Wafer Bevel And Backside App 20220199373 - Parimi; Venkata Sharat Chandra ; et al. | 2022-06-23 |
| Processing Chamber Deposition Confinement App 20220130650 - Bobek; Sarah Michelle ; et al. | 2022-04-28 |
| Cover Wafer For Semiconductor Processing Chamber App 20220122822 - Parimi; Venkata Sharat Chandra ; et al. | 2022-04-21 |
| Gas Mixer To Enable Rps Purging App 20220122851 - Ruan; Fang ; et al. | 2022-04-21 |
| Backside Gas Leakby For Bevel Deposition Reduction App 20220122870 - Parimi; Venkata Sharat Chandra ; et al. | 2022-04-21 |
| Modular Zone Control For A Processing Chamber App 20220108891 - Huang; Zubin ; et al. | 2022-04-07 |
| Systems And Methods For Faceplate Temperature Control App 20220020612 - Parimi; Venkata Sharat Chandra ; et al. | 2022-01-20 |
| Semiconductor Substrate Support With Wafer Backside Damage Control App 20210287924 - Li; Jian ; et al. | 2021-09-16 |
| Targeted Heat Control Systems App 20210202218 - Parimi; Venkata Sharat Chandra ; et al. | 2021-07-01 |
| Radiation Shield Modification For Improving Substrate Temperature Uniformity App 20210166921 - Neville; Elizabeth ; et al. | 2021-06-03 |
| Dual Rf For Controllable Film Deposition App 20210159048 - Parimi; Venkata Sharat Chandra ; et al. | 2021-05-27 |
| Reduced Hydrogen Deposition Processes App 20210143010 - Min; Xiaoquan ; et al. | 2021-05-13 |
| Chamber Components For Gas Delivery Modulation App 20210142984 - Ruan; Fang ; et al. | 2021-05-13 |
| Reduced Defect Deposition Processes App 20210130949 - Min; Xiaoquan ; et al. | 2021-05-06 |
| Selective deposition of hardmask Grant 10,923,334 - Thokachichu , et al. February 16, 2 | 2021-02-16 |
| Substrate Pedestal For Improved Substrate Processing App 20200373132 - KALSEKAR; Viren ; et al. | 2020-11-26 |
| Electrostatic Chucking Process App 20200328063 - BOBEK; Sarah Michelle ; et al. | 2020-10-15 |
| Method And Tool For Electrostatic Chucking App 20200249263 - Kind Code | 2020-08-06 |
| Heated Pedestal Design For Improved Heat Transfer And Temperature Uniformity App 20200234932 - PARIMI; Venkata Sharat Chandra ; et al. | 2020-07-23 |
| Pedestal For Substrate Processing Chambers App 20200224310 - BOBEK; Sarah Michelle ; et al. | 2020-07-16 |
| Electrostatic Chuck Design With Improved Chucking And Arcing Performance App 20200176296 - KHAJA; Abdul Aziz ; et al. | 2020-06-04 |
| Technique To Enable High Temperature Clean For Rapid Processing Of Wafers App 20190382889 - PARIMI; Venkata Sharat Chandra ; et al. | 2019-12-19 |
| Selective Deposition Of Hardmask App 20190341227 - THOKACHICHU; Satya ; et al. | 2019-11-07 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 