Parekh; Bipin S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Parekh; Bipin S..The latest application filed is for "apparatus and method for conditioning an immersion fluid".

Company Profile

0.4.7

Parekh; Bipin S. - Chelmsford MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic projection apparatus, purge gas supply system and gas purging method Grant 7,879,137 - Parekh , et al. February 1, 2	2011-02-01
Hollow fiber membrane contact apparatus and process Grant 7,717,405 - Parekh , et al. May 18, 2	2010-05-18
Apparatus and method for conditioning an immersion fluid App 20090316119 - Parekh; Bipin S. ; et al.	2009-12-24
Hollow Fiber Membrane Contact Apparatus And Process App 20080156191 - PAREKH; BIPIN S. ; et al.	2008-07-03
Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system App 20070030463 - Parekh; Bipin S. ; et al.	2007-02-08
Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application App 20060285091 - Parekh; Bipin S. ; et al.	2006-12-21
Hollow fiber membrane contact apparatus and process App 20050230856 - Parekh, Bipin S. ; et al.	2005-10-20
Filtration and purification method for aqueous acids Grant 6,649,064 - Parekh , et al. November 18, 2	2003-11-18
Filtration and purification system for aqueous acids App 20020125189 - Parekh, Bipin S. ; et al.	2002-09-12
Filtration and purification system for pH neutral solutions Grant 6,447,684 - Parekh , et al. September 10, 2	2002-09-10
Filtration and purification system for pH neutral solutions App 20010042715 - Parekh, Bipin S. ; et al.	2001-11-22

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