Patent | Date |
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Micro-LED transfer methods using light-based debonding Grant 10,985,046 - Paranjpe , et al. April 20, 2 | 2021-04-20 |
Micro-LED Transfer Methods Using Light-Based Debonding App 20190393069 - Paranjpe; Ajit P. ;   et al. | 2019-12-26 |
Multi-wafer rotating disc reactor with inertial planetary drive Grant 9,230,846 - Celaru , et al. January 5, 2 | 2016-01-05 |
Multi-wafer Rotating Disc Reactor With Inertial Planetary Drive App 20110300297 - Celaru; Adrian ;   et al. | 2011-12-08 |
Method and apparatus for layer by layer deposition of thin films Grant 7,393,561 - Paranjpe July 1, 2 | 2008-07-01 |
Atomic layer deposition for fabricating thin films Grant 7,037,574 - Paranjpe , et al. May 2, 2 | 2006-05-02 |
Low temperature sin deposition methods App 20060084283 - Paranjpe; Ajit P. ;   et al. | 2006-04-20 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure Grant 6,905,578 - Moslehi , et al. June 14, 2 | 2005-06-14 |
Method for fabricating a semiconductor chip interconnect Grant 6,812,126 - Paranjpe , et al. November 2, 2 | 2004-11-02 |
Retrofittable vehicle collision warning apparatus Grant 6,696,931 - Paranjpe February 24, 2 | 2004-02-24 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,645,847 - Paranjpe , et al. November 11, 2 | 2003-11-11 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,627,995 - Paranjpe , et al. September 30, 2 | 2003-09-30 |
Method and system for physically-assisted chemical-vapor deposition Grant 6,596,133 - Moslehi , et al. July 22, 2 | 2003-07-22 |
Method and apparatus for layer by layer deposition of thin films App 20030134038 - Paranjpe, Ajit P. | 2003-07-17 |
Atomic layer deposition for fabricating thin films App 20030003635 - Paranjpe, Ajit P. ;   et al. | 2003-01-02 |
Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system Grant 6,471,830 - Moslehi , et al. October 29, 2 | 2002-10-29 |
Method for forming a copper film on a substrate Grant 6,461,675 - Paranjpe , et al. October 8, 2 | 2002-10-08 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method App 20020137332 - Paranjpe, Ajit P. ;   et al. | 2002-09-26 |
Method of chemical-vapor deposition of a material Grant 6,444,263 - Paranjpe , et al. September 3, 2 | 2002-09-03 |
Method and apparatus for thin film deposition using an active shutter Grant 6,444,103 - Moslehi , et al. September 3, 2 | 2002-09-03 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method App 20020102838 - Paranjpe, Ajit P. ;   et al. | 2002-08-01 |
Method of making an integrated circuit interconnect Grant 6,391,754 - Paranjpe May 21, 2 | 2002-05-21 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,365,502 - Paranjpe , et al. April 2, 2 | 2002-04-02 |
Retrofittable vehicle collision warning apparatus App 20020030591 - Paranjpe, Ajit P. | 2002-03-14 |
Method For Forming A Copper Film On A Substrate App 20020006468 - PARANJPE, AJIT P. ;   et al. | 2002-01-17 |
Retrofittable vehicle collision warning apparatus Grant 6,339,369 - Paranjpe January 15, 2 | 2002-01-15 |
Semiconductor chip interconnect barrier material and fabrication method Grant 6,294,836 - Paranjpe , et al. September 25, 2 | 2001-09-25 |
Self-guided, self-propelled, convertible cleaning apparatus Grant 5,634,237 - Paranjpe June 3, 1 | 1997-06-03 |
Method for temperature measurement in rapid thermal process systems Grant 5,601,366 - Paranjpe February 11, 1 | 1997-02-11 |
Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines Grant 5,593,924 - Apte , et al. January 14, 1 | 1997-01-14 |
Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber Grant 5,580,385 - Paranjpe , et al. December 3, 1 | 1996-12-03 |
Temperature sensor and method Grant 5,501,637 - Duncan , et al. March 26, 1 | 1996-03-26 |
Method for cleaning semiconductor wafers using liquified gases Grant 5,494,526 - Paranjpe February 27, 1 | 1996-02-27 |
Plasma source employing spiral RF coil and method for using same Grant 5,436,528 - Paranjpe July 25, 1 | 1995-07-25 |
Method and apparatus for low-temperature semiconductor processing Grant 5,435,379 - Moslehi , et al. July 25, 1 | 1995-07-25 |
Method for planarization Grant 5,434,107 - Paranjpe July 18, 1 | 1995-07-18 |
RF induction plasma source for plasma processing Grant 5,430,355 - Paranjpe July 4, 1 | 1995-07-04 |
Plasma processing system using surface wave plasma generating apparatus and method Grant 5,389,153 - Paranjpe , et al. February 14, 1 | 1995-02-14 |
Interferometric temperature measurement system and method Grant 5,249,865 - Paranjpe , et al. October 5, 1 | 1993-10-05 |
Plasma source and method of manufacturing Grant 5,231,334 - Paranjpe July 27, 1 | 1993-07-27 |
Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing Grant 5,217,559 - Moslehi , et al. June 8, 1 | 1993-06-08 |