PAPKE; Kevin A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for PAPKE; Kevin A..The latest application filed is for "protective multilayer coating for processing chamber components".

Company Profile

7.9.18

PAPKE; Kevin A. - Portland OR
Papke; Kevin A. - San Jose CA
Papke; Kevin A. - US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Protective Multilayer Coating For Processing Chamber Components App 20220277936 - BAJAJ; Geetika ; et al.	2022-09-01
Protective layers for processing chamber components Grant 11,239,058 - Balaraman , et al. February 1, 2	2022-02-01
Method for forming a protective coating film for halide plasma resistance Grant 11,118,263 - Pareek , et al. September 14, 2	2021-09-14
Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components Grant 10,941,303 - Larsson , et al. March 9, 2	2021-03-09
Chamber component part wear indicator and a system for detecting part wear Grant 10,921,251 - Larsson , et al. February 16, 2	2021-02-16
Coating tester using gas sensors Grant 10,883,972 - Tabassum , et al. January 5, 2	2021-01-05
Coating For Halide Plasma Resistance App 20200354833 - PAREEK; Yogita ; et al.	2020-11-12
Method For Fabricating Chamber Parts App 20200270747 - LARSSON; Mats ; et al.	2020-08-27
30 nm in-line LPC testing and cleaning of semiconductor processing equipment Grant 10,583,465 - Wang , et al.	2020-03-10
Protective Layers For Processing Chamber Components App 20200020511 - BALARAMAN; Karthikeyan ; et al.	2020-01-16
Protection Of Aluminum Process Chamber Components App 20200013589 - BALARAMAN; Karthikeyan ; et al.	2020-01-09
Method for forming yttrium oxide on semiconductor processing equipment Grant 10,253,406 - Kalita , et al.	2019-04-09
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment Grant 10,233,554 - Pareek , et al.	2019-03-19
Automatic Cleaning Machine For Cleaning Process Kits App 20190070639 - NANGOY; Roy C. ; et al.	2019-03-07
In-situ Removal Of Accumulated Process Byproducts From Components Of A Semiconductor Processing Chamber App 20180330929 - ARNEPALLI; Ranga Rao ; et al.	2018-11-15
Coating Tester Using Gas Sensors App 20180224412 - TABASSUM; Tasnuva ; et al.	2018-08-09
Chemical Conversion Of Yttria Into Yttrium Fluoride And Yttrium Oxyfluoride To Develop Pre-seasoned Corossion Resistive Coating For Plasma Components App 20180105701 - LARSSON; Mats ; et al.	2018-04-19
Oxidized showerhead and process kit parts and methods of using same Grant 9,914,999 - Rasheed , et al. March 13, 2	2018-03-13
Method To Deposit Aluminum Oxy-fluoride Layer For Fast Recovery Of Etch Amount In Etch Chamber App 20180061617 - WANG; Jianqi ; et al.	2018-03-01
Chamber Component Part Wear Indicator And A System For Detecting Part Wear App 20180052104 - LARSSON; Mats ; et al.	2018-02-22
30 Nm In-line Lpc Testing And Cleaning Of Semiconductor Processing Equipment App 20170299487 - WANG; Jianqi ; et al.	2017-10-19
Aluminum Electroplating And Oxide Formation As Barrier Layer For Aluminum Semiconductor Process Equipment App 20170260639 - PAREEK; Yogita ; et al.	2017-09-14
Method For Electrochemically Grown Yttria Or Yttrium Oxide On Semiconductor Processing Equipment App 20170260618 - KALITA; Laksheswar ; et al.	2017-09-14
Method For Removing Aluminum Fluoride Contamination From Semiconductor Processing Equipment App 20170056935 - GOPALAN; Ramesh ; et al.	2017-03-02
Oxidized Showerhead And Process Kit Parts And Methods Of Using Same App 20160319428 - RASHEED; Muhammad M. ; et al.	2016-11-03
Real Time Liquid Particle Counter (lpc) End Point Detection System App 20160056061 - Wang; Jiansheng ; et al.	2016-02-25
Real Time Liquid Particle Counter (lpc) End Point Detection System App 20120216833 - Wang; Jiansheng ; et al.	2012-08-30

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