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Patent applications and USPTO patent grants for Pao, Elaine.The latest application filed is for "chemical vapor deposition of ruthenium films for metal electrode applications".
Patent | Date |
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Chemical vapor deposition of ruthenium films for metal electrode applications App 20030129306 - Wade, Christopher P. ;   et al. | 2003-07-10 |
CVD ruthenium seed for CVD ruthenium deposition Grant 6,479,100 - Jin , et al. November 12, 2 | 2002-11-12 |
Cvd Ruthenium Seed For Cvd Ruthenium Deposition App 20020146513 - Jin, Xiaoliang ;   et al. | 2002-10-10 |
Chemical vapor deposition of ruthenium films for metal electrode applications Grant 6,440,495 - Wade , et al. August 27, 2 | 2002-08-27 |
System and method for depositing high dielectric constant materials and compatible conductive materials App 20020015855 - Sajoto, Talex ;   et al. | 2002-02-07 |
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