Panning; Eric
Patent Applications and Registrations
Patent applications and USPTO patent grants for Panning; Eric.The latest application filed is for "active hardmask for lithographic patterning".
- Panning; Eric - Pleasanton CA
- Panning; Eric - Hillsboro OR
| Patent | Date |
|---|---|
| Active hardmask for lithographic patterning Grant 7,527,920 - Goldstein , et al. May 5, 2 | 2009-05-05 |
| EUV energy detection Grant 7,154,101 - Panning December 26, 2 | 2006-12-26 |
| Extreme ultraviolet illumination source Grant 7,109,504 - Chandhok , et al. September 19, 2 | 2006-09-19 |
| Active hardmask for lithographic patterning App 20060093972 - Goldstein; Michael ; et al. | 2006-05-04 |
| Active hardmask for lithographic patterning Grant 7,033,739 - Goldstein , et al. April 25, 2 | 2006-04-25 |
| Extreme ultraviolet illumination source App 20060017024 - Chandhok; Manish ; et al. | 2006-01-26 |
| Active hardmask for lithographic patterning App 20040214113 - Goldstein, Michael ; et al. | 2004-10-28 |
| EUV energy detection App 20040188627 - Panning, Eric | 2004-09-30 |
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