Pang; Lily L

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pang; Lily L.The latest application filed is for "multiple complementary gas distribution assemblies".

Company Profile

0.11.12

Pang; Lily L - Fremont CA
Pang; Lily L. - Fremont CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multiple complementary gas distribution assemblies Grant 9,303,318 - Ng , et al. April 5, 2	2016-04-05
Multiple Complementary Gas Distribution Assemblies App 20130098455 - Ng; Tuoh-Bin ; et al.	2013-04-25
Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasma Grant 8,317,970 - Lai , et al. November 27, 2	2012-11-27
Substrate Transfer Mechanism With Preheating Features App 20110064545 - ISHIKAWA; TETSUYA ; et al.	2011-03-17
Plasma immersion ion implantation with highly uniform chamber seasoning process for a toroidal source reactor Grant 7,691,755 - Li , et al. April 6, 2	2010-04-06
Ceiling Electrode With Process Gas Dispersers Housing Plural Inductive Rf Power Applicators Extending Into The Plasma App 20090294065 - LAI; CANFENG ; et al.	2009-12-03
Integrated bevel clean chamber Grant 7,520,939 - Ho , et al. April 21, 2	2009-04-21
Plasma Immersion Ion Implantation With Highly Uniform Chamber Seasoning Process For A Toroidal Source Reactor App 20080286982 - Li; Shijian ; et al.	2008-11-20
Electric field reducing thrust plate Grant 7,285,195 - Herchen , et al. October 23, 2	2007-10-23
Multi-chemistry plating system Grant 7,223,323 - Yang , et al. May 29, 2	2007-05-29
Electric field reducing thrust plate App 20050284754 - Herchen, Harald ; et al.	2005-12-29
Semiconductor wafer support lift-pin assembly Grant 6,958,098 - Gujer , et al. October 25, 2	2005-10-25
Integrated bevel clean chamber App 20040206375 - Ho, Henry ; et al.	2004-10-21
Spin rinse dry cell App 20040206373 - Donoso, Bernardo ; et al.	2004-10-21
Multi-chemistry plating system App 20040016637 - Yang, Michael X. ; et al.	2004-01-29
Semiconductor wafer support lift-pin assembly App 20030205329 - Gujer, Rudolf ; et al.	2003-11-06
Chemical vapor deposition chamber lid assembly Grant 6,517,634 - Pang , et al. February 11, 2	2003-02-11
Directing a flow of gas in a substrate processing chamber Grant 6,450,117 - Murugesh , et al. September 17, 2	2002-09-17
Chemical vapor deposition chamber lid assembly App 20020117262 - Pang, Lily L. ; et al.	2002-08-29
Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges Grant 6,364,958 - Lai , et al. April 2, 2	2002-04-02
Apparatus for cleaning a semiconductor process chamber Grant 6,363,624 - Pang , et al. April 2, 2	2002-04-02
Semiconductor wafer support lift-pin assembly App 20020011204 - Gujer, Rudolf ; et al.	2002-01-31

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