Pang; Lily
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pang; Lily.The latest application filed is for "cluster tool for leds".
- Pang; Lily - Fremont CA US
| Patent | Date |
|---|---|
| HVPE chamber hardware Grant 8,568,529 - Ishikawa , et al. October 29, 2 | 2013-10-29 |
| HVPE precursor source hardware Grant 8,491,720 - Ishikawa , et al. July 23, 2 | 2013-07-23 |
| Dome assembly for a deposition chamber Grant D664,172 - Ishikawa , et al. July 24, 2 | 2012-07-24 |
| Methods for fabricating group III nitride structures with a cluster tool Grant 8,183,132 - Nijhawan , et al. May 22, 2 | 2012-05-22 |
| Cluster Tool For Leds App 20100261340 - NIJHAWAN; SANDEEP ; et al. | 2010-10-14 |
| Hvpe Chamber Hardware App 20100258049 - Ishikawa; Tetsuya ; et al. | 2010-10-14 |
| Hvpe Precursor Source Hardware App 20100258052 - ISHIKAWA; TETSUYA ; et al. | 2010-10-14 |
| Method and system for detection of wafer centering in a track lithography tool Grant 7,497,026 - Herchen , et al. March 3, 2 | 2009-03-03 |
| Method And System For Detection Of Wafer Centering In A Track Lithography Tool App 20080168673 - Herchen; Harald ; et al. | 2008-07-17 |
| Current collimation for thin seed and direct plating App 20060102467 - Herchen; Harald ; et al. | 2006-05-18 |
| Spin coater App 20030079679 - Ikeda, Toru ; et al. | 2003-05-01 |
| Gas distribution system for a CVD processing chamber Grant 6,486,081 - Ishikawa , et al. November 26, 2 | 2002-11-26 |
| Gas distribution system for a CVD processing chamber Grant 6,143,078 - Ishikawa , et al. November 7, 2 | 2000-11-07 |
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