| Patent | Date |
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Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
Grant 11,454,887 - Pandey September 27, 2 | 2022-09-27 |
Metrology Method And Device For Determining A Complex-valued Field
App 20220299886 - PANDEY; Nitesh ; et al. | 2022-09-22 |
Metrology Method And Apparatus For Of Determining A Complex-valued Field
App 20220299888 - KONIJNENBERG; Alexander Prasetya ; et al. | 2022-09-22 |
Micromirror Arrays
App 20220283428 - HASPESLAGH; Luc Roger Simonne ; et al. | 2022-09-08 |
Illumination And Detection Apparatus For A Metrology Apparatus
App 20220276180 - PANDEY; Nitesh ; et al. | 2022-09-01 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 11,415,900 - Tinnemans , et al. August 16, 2 | 2022-08-16 |
Metrology method, patterning device, apparatus and computer program
Grant 11,385,553 - Zhou , et al. July 12, 2 | 2022-07-12 |
Detection Apparatus For Simultaneous Acquisition Of Multiple Diverse Images Of An Object
App 20220172347 - TUKKER; Teunis Willem ; et al. | 2022-06-02 |
Metrology Apparatus
App 20220121127 - PANDEY; Nitesh ; et al. | 2022-04-21 |
Metrology apparatus
Grant 11,262,661 - Pandey , et al. March 1, 2 | 2022-03-01 |
Apparatus and Methods for Determining the Position of a Target Structure on a Substrate
App 20210364936 - PANDEY; Nitesh ; et al. | 2021-11-25 |
Metrology Method, Patterning Device, Apparatus And Computer Program
App 20210255553 - ZHOU; Zili ; et al. | 2021-08-19 |
Metrology sensor, lithographic apparatus and method for manufacturing devices
Grant 11,086,240 - Goorden , et al. August 10, 2 | 2021-08-10 |
Metrology method, patterning device, apparatus and computer program
Grant 10,996,570 - Zhou , et al. May 4, 2 | 2021-05-04 |
Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
Grant 10,996,571 - Socha , et al. May 4, 2 | 2021-05-04 |
Metrology Apparatus
App 20210123724 - VAN DAM; Marinus Johannes Maria ; et al. | 2021-04-29 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques
Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Topography measurement system
Grant 10,935,373 - Pandey March 2, 2 | 2021-03-02 |
Scatterometer and Method of Scatterometry Using Acoustic Radiation
App 20210055215 - PISARENCO; Maxim ; et al. | 2021-02-25 |
Metrology apparatus, lithographic system, and method of measuring a structure
Grant 10,908,514 - Ravensbergen , et al. February 2, 2 | 2021-02-02 |
Metrology apparatus, lithographic system, and method of measuring a structure
Grant 10,895,812 - Pandey , et al. January 19, 2 | 2021-01-19 |
Metrology apparatus
Grant 10,895,452 - Van Dam , et al. January 19, 2 | 2021-01-19 |
Metrology System and Method For Determining a Characteristic of one or More Structures on a Substrate
App 20210003924 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-01-07 |
Metrology method and device
Grant 10,866,526 - Shmarev , et al. December 15, 2 | 2020-12-15 |
Scatterometer and method of scatterometry using acoustic radiation
Grant 10,845,304 - Pisarenco , et al. November 24, 2 | 2020-11-24 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 10,816,909 - Tinnemans , et al. October 27, 2 | 2020-10-27 |
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
Grant 10,795,269 - Zhou , et al. October 6, 2 | 2020-10-06 |
Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system
Grant 10,788,758 - Lian , et al. September 29, 2 | 2020-09-29 |
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
Grant 10,775,704 - Pandey , et al. Sept | 2020-09-15 |
Method of measuring a target, metrology apparatus, polarizer assembly
Grant 10,747,124 - Pandey , et al. A | 2020-08-18 |
Adjustment Of A Metrology Apparatus Or A Measurement Thereby Based On A Characteristic Of A Target Measured
App 20200249584 - Kind Code | 2020-08-06 |
Radiation receiving system
Grant 10,678,145 - Polo , et al. | 2020-06-09 |
Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
Grant 10,670,975 - Socha , et al. | 2020-06-02 |
Method of measuring, device manufacturing method, metrology apparatus, and lithographic system
Grant 10,656,534 - Pandey , et al. | 2020-05-19 |
Metrology method and apparatus
Grant 10,620,550 - Jak , et al. | 2020-04-14 |
Metrology Method, Patterning Device, Apparatus and Computer Program
App 20200110342 - ZHOU; Zili ; et al. | 2020-04-09 |
Metrology apparatus, lithographic system, and method of measuring a structure
Grant 10,599,047 - Ravensbergen , et al. | 2020-03-24 |
Metrology Sensor, Lithographic Apparatus And Method For Manufacturing Devices
App 20200089135 - GOORDEN; Sebastianus Adrianus ; et al. | 2020-03-19 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20200081340 - PANDEY; Nitesh | 2020-03-12 |
Metrology Apparatus
App 20200072599 - VAN DAM; Marinus Johannes Maria ; et al. | 2020-03-05 |
Metrology Apparatus and Photonic Crystal Fiber
App 20200057387 - PANDEY; Nitesh | 2020-02-20 |
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure
App 20200004165 - RAVENSBERGEN; Janneke ; et al. | 2020-01-02 |
Topography Measurement System
App 20190383602 - PANDEY; Nitesh | 2019-12-19 |
Metrology Apparatus
App 20190384184 - Pandey; Nitesh ; et al. | 2019-12-19 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective
App 20190346771 - PANDEY; Nitesh ; et al. | 2019-11-14 |
Method for parameter determination and apparatus thereof
Grant 10,444,638 - Pandey , et al. Oc | 2019-10-15 |
Metrology apparatus, lithographic system, and method of measuring a structure
Grant 10,444,640 - Ravensbergen , et al. Oc | 2019-10-15 |
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly
App 20190294054 - PANDEY; Nitesh ; et al. | 2019-09-26 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,423,077 - Pandey , et al. Sept | 2019-09-24 |
Method Of Measuring, Device Manufacturing Method, Metrology Apparatus, And Lithographic System
App 20190285993 - PANDEY; Nitesh ; et al. | 2019-09-19 |
Topography measurement system
Grant 10,393,514 - Pandey A | 2019-08-27 |
Topography measurement system
Grant 10,394,143 - Pandey , et al. A | 2019-08-27 |
Lithographic apparatus alignment sensor and method
Grant 10,386,735 - Mathijssen , et al. A | 2019-08-20 |
Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques
App 20190250094 - PANDEY; Nitesh ; et al. | 2019-08-15 |
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
Grant 10,365,565 - Pandey , et al. July 30, 2 | 2019-07-30 |
Method of measuring a target, metrology apparatus, polarizer assembly
Grant 10,353,298 - Pandey , et al. July 16, 2 | 2019-07-16 |
Method of measuring, device manufacturing method, metrology apparatus, and lithographic system
Grant 10,310,389 - Pandey , et al. | 2019-06-04 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20190146356 - Pandey; Nitesh ; et al. | 2019-05-16 |
Method Of Determining A Value Of A Parameter Of Interest, Method Of Cleaning A Signal Containing Information About A Parameter Of Interest, Device Manufacturing Method
App 20190129316 - ZHOU; Zili ; et al. | 2019-05-02 |
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure
App 20190113852 - RAVENSBERGEN; Janneke ; et al. | 2019-04-18 |
Scatterometer and Method of Scatterometry Using Acoustic Radiation
App 20190113452 - Pisarenco; Maxim ; et al. | 2019-04-18 |
Metrology System and Method For Determining a Characteristic of One or More Structures on a Substrate
App 20190107781 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-04-11 |
Metrology Method And Device
App 20190094702 - Shmarev; Yevgeniy Konstantinovich ; et al. | 2019-03-28 |
Device and method for processing a radiation beam with coherence
Grant 10,234,767 - Goorden , et al. | 2019-03-19 |
Metrology Method And Apparatus
App 20190072859 - JAK; Martin Jacobus Johan ; et al. | 2019-03-07 |
Method for Parameter Determination and Apparatus Thereof
App 20190033725 - PANDEY; Nitesh ; et al. | 2019-01-31 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,191,391 - Pandey , et al. Ja | 2019-01-29 |
Illumination system for a lithographic or inspection apparatus
Grant 10,180,630 - Tukker , et al. Ja | 2019-01-15 |
Adjustment Of A Metrology Apparatus Or A Measurement Thereby Based On A Characteristic Of A Target Measured
App 20180364591 - SOCHA; Robert John ; et al. | 2018-12-20 |
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure
App 20180348645 - Ravensbergen; Janneke ; et al. | 2018-12-06 |
Method of Measuring a Parameter of Interest, Device Manufacturing Method, Metrology Apparatus, and Lithographic System
App 20180321598 - LIAN; Jin ; et al. | 2018-11-08 |
Method Of Measuring, Device Manufacturing Method, Metrology Apparatus, And Lithographic System
App 20180299794 - PANDEY; Nitesh ; et al. | 2018-10-18 |
Radiation Receiving System
App 20180292757 - POLO; Alessandro ; et al. | 2018-10-11 |
Topography Measurement System
App 20180283853 - PANDEY; Nitesh | 2018-10-04 |
Topography Measurement System
App 20180267415 - PANDEY; Nitesh ; et al. | 2018-09-20 |
Metrology apparatus for measuring a structure formed on a substrate by a lithographic process, lithographic system, and method of measuring a structure formed on a substrate by a lithographic process
Grant 10,067,426 - Pandey September 4, 2 | 2018-09-04 |
Lithographic Apparatus Alignment Sensor and Method
App 20180246423 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-08-30 |
A Method And Apparatus For Determining At Least One Property Of Patterning Device Marker Features
App 20180246420 - PANDEY; Nitesh ; et al. | 2018-08-30 |
Metrology Apparatus, Lithographic System, and Method of Measuring a Structure
App 20180173111 - Pandey; Nitesh ; et al. | 2018-06-21 |
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly
App 20180157180 - Pandey; Nitesh ; et al. | 2018-06-07 |
Method for controlling a distance between two objects, inspection apparatus and method
Grant 9,982,991 - Pandey May 29, 2 | 2018-05-29 |
Method and apparatus for improving measurement accuracy
Grant 9,909,983 - Pandey March 6, 2 | 2018-03-06 |
Metrology Apparatus for Measuring a Structure Formed on a Substrate by a Lithographic Process, Lithographic System, and Method of Measuring a Structure Formed on a Substrate by a Lithographic Process
App 20180059552 - PANDEY; Nitesh | 2018-03-01 |
Device and Method for Processing a Radiation Beam with Coherence
App 20180031977 - GOORDEN; Sebastianus Adrianus ; et al. | 2018-02-01 |
Illumination System for a Lithographic or Inspection Apparatus
App 20180004095 - TUKKER; Teunis Willem ; et al. | 2018-01-04 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective Filter for Use therein
App 20170242343 - PANDEY; Nitesh ; et al. | 2017-08-24 |
Inspection apparatus, inspection method and manufacturing method
Grant 9,632,039 - Den Boef , et al. April 25, 2 | 2017-04-25 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20170097575 - PANDEY; Nitesh ; et al. | 2017-04-06 |
Method and Apparatus for Improving Measurement Accuracy
App 20160231241 - PANDEY; Nitesh | 2016-08-11 |
Inspection Apparatus, Inspection Method And Manufacturing Method
App 20160061750 - DEN BOEF; Arie Jeffrey ; et al. | 2016-03-03 |
Method For Controlling A Distance Between Two Objects, Inspection Apparatus And Method
App 20160061590 - PANDEY; Nitesh | 2016-03-03 |
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