| Patent | Date |
|---|
Process control metrology
Grant 11,313,809 - Pandev , et al. April 26, 2 | 2022-04-26 |
Dynamic Control Of Machine Learning Based Measurement Recipe Optimization
App 20220114438 - Pandev; Stilian Ivanov ; et al. | 2022-04-14 |
Methods And Systems For Determining Quality Of Semiconductor Measurements
App 20220090912 - Sanko; Dzmitry ; et al. | 2022-03-24 |
Model-based metrology using images
Grant 11,200,658 - Pandev December 14, 2 | 2021-12-14 |
Tomography Based Semiconductor Measurements Using Simplified Models
App 20210166375 - Pandev; Stilian Ivanov | 2021-06-03 |
Measurement Recipe Optimization Based On Probabilistic Domain Knowledge And Physical Realization
App 20210165398 - Pandev; Stilian Ivanov ; et al. | 2021-06-03 |
Differential methods and apparatus for metrology of semiconductor targets
Grant 10,935,893 - Pandev , et al. March 2, 2 | 2021-03-02 |
Semiconductor metrology based on hyperspectral imaging
Grant 10,801,953 - Wang , et al. October 13, 2 | 2020-10-13 |
Integrated use of model-based metrology and a process model
Grant 10,769,320 - Kuznetsov , et al. Sep | 2020-09-08 |
Process robust overlay metrology based on optical scatterometry
Grant 10,732,516 - Pandev , et al. | 2020-08-04 |
Semiconductor Metrology Based On Hyperspectral Imaging
App 20200225151 - Wang; David Y. ; et al. | 2020-07-16 |
Measurement of multiple patterning parameters
Grant 10,612,916 - Shchegrov , et al. | 2020-04-07 |
System, Method And Computer Program Product For Fast Automatic Determination Of Signals For Efficient Metrology
App 20200025554 - Gellineau; Antonio A. ; et al. | 2020-01-23 |
Model-based single parameter measurement
Grant 10,502,549 - Pandev Dec | 2019-12-10 |
Methods and apparatus for patterned wafer characterization
Grant 10,502,694 - Dziura , et al. Dec | 2019-12-10 |
Metrology systems and methods for process control
Grant 10,490,462 - Pandev , et al. Nov | 2019-11-26 |
Model-Based Metrology Using Images
App 20190325571 - Pandev; Stilian Ivanov | 2019-10-24 |
Dynamic removal of correlation of highly correlated parameters for optical metrology
Grant 10,386,729 - Lee , et al. A | 2019-08-20 |
Model-based metrology using images
Grant 10,380,728 - Pandev A | 2019-08-13 |
Multi-location metrology
Grant 10,365,225 - Pandev , et al. July 30, 2 | 2019-07-30 |
Signal response metrology for scatterometry based overlay measurements
Grant 10,352,876 - Shchegrov , et al. July 16, 2 | 2019-07-16 |
Measurement recipe optimization based on spectral sensitivity and process variation
Grant 10,354,929 - Pandev July 16, 2 | 2019-07-16 |
Model based measurement systems with improved electromagnetic solver performance
Grant 10,345,095 - Pandev , et al. July 9, 2 | 2019-07-09 |
System, method and computer program product for calibration of metrology tools
Grant 10,295,342 - Pandev , et al. | 2019-05-21 |
Model optimization approach based on spectral sensitivity
Grant 10,255,385 - Pandev , et al. | 2019-04-09 |
Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector
Grant 10,234,271 - Fu , et al. | 2019-03-19 |
Metrology of multiple patterning processes
Grant 10,215,559 - Pandev , et al. Feb | 2019-02-26 |
Signal response metrology for image based and scatterometry overlay measurements
Grant 10,210,606 - Pandev , et al. Feb | 2019-02-19 |
Signal response metrology for image based overlay measurements
Grant 10,152,654 - Pandev Dec | 2018-12-11 |
System, method and computer program product for combining raw data from multiple metrology tools
Grant 10,152,678 - Pandev , et al. Dec | 2018-12-11 |
Signal response metrology based on measurements of proxy structures
Grant 10,151,986 - Shchegrov , et al. Dec | 2018-12-11 |
Methods And Systems For Spectroscopic Beam Profile Metrology
App 20180347961 - Fu; Jiyou ; et al. | 2018-12-06 |
Measurement of small box size targets
Grant 10,139,352 - Pandev , et al. Nov | 2018-11-27 |
Apparatus, techniques, and target designs for measuring semiconductor parameters
Grant 10,107,765 - Sapiens , et al. October 23, 2 | 2018-10-23 |
Spectroscopic beam profile overlay metrology
Grant 10,101,676 - Fu , et al. October 16, 2 | 2018-10-16 |
Methods and apparatus for determining focus
Grant 10,101,674 - Pandev October 16, 2 | 2018-10-16 |
Statistical model-based metrology
Grant 10,101,670 - Pandev , et al. October 16, 2 | 2018-10-16 |
Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element
Grant 10,072,921 - Fu , et al. September 11, 2 | 2018-09-11 |
Process Robust Overlay Metrology Based On Optical Scatterometry
App 20180252514 - Pandev; Stilian Ivanov ; et al. | 2018-09-06 |
Compressive sensing for metrology
Grant 10,062,157 - Pandev , et al. August 28, 2 | 2018-08-28 |
Model-based hot spot monitoring
Grant 10,030,965 - Pandev , et al. July 24, 2 | 2018-07-24 |
Metrology Systems And Methods For Process Control
App 20180108578 - Pandev; Stilian Ivanov ; et al. | 2018-04-19 |
Measurement Of Multiple Patterning Parameters
App 20180051984 - Shchegrov; Andrei V. ; et al. | 2018-02-22 |
On-device metrology
Grant 9,875,946 - Shchegrov , et al. January 23, 2 | 2018-01-23 |
Apparatus, Techniques, And Target Designs For Measuring Semiconductor Parameters
App 20170356853 - Sapiens; Noam ; et al. | 2017-12-14 |
Measurement of multiple patterning parameters
Grant 9,816,810 - Shchegrov , et al. November 14, 2 | 2017-11-14 |
Apparatus, techniques, and target designs for measuring semiconductor parameters
Grant 9,784,690 - Sapiens , et al. October 10, 2 | 2017-10-10 |
Measurement model optimization based on parameter variations across a wafer
Grant 9,721,055 - Pandev August 1, 2 | 2017-08-01 |
Image based signal response metrology
Grant 9,710,728 - Pandev , et al. July 18, 2 | 2017-07-18 |
Spectroscopic Beam Profile Overlay Metrology
App 20170082932 - Fu; Jiyou ; et al. | 2017-03-23 |
Compressive Sensing For Metrology
App 20170076440 - Pandev; Stilian Ivanov ; et al. | 2017-03-16 |
Model-Based Metrology Using Images
App 20170061604 - Pandev; Stilian Ivanov | 2017-03-02 |
System, Method And Computer Program Product For Calibration Of Metrology Tools
App 20170045356 - Pandev; Stilian Ivanov ; et al. | 2017-02-16 |
Measurement Of Multiple Patterning Parameters
App 20170003123 - Shchegrov; Andrei V. ; et al. | 2017-01-05 |
Compressive sensing for metrology
Grant 9,518,916 - Pandev , et al. December 13, 2 | 2016-12-13 |
Model-Based Hot Spot Monitoring
App 20160327605 - Pandev; Stilian Ivanov ; et al. | 2016-11-10 |
Measurement of multiple patterning parameters
Grant 9,490,182 - Shchegrov , et al. November 8, 2 | 2016-11-08 |
Methods And Apparatus For Determining Focus
App 20160282731 - Pandev; Stilian Ivanov | 2016-09-29 |
Model-Based Single Parameter Measurement
App 20160282105 - Pandev; Stilian Ivanov | 2016-09-29 |
Methods and apparatus for determining focus
Grant 9,383,661 - Pandev July 5, 2 | 2016-07-05 |
Spectroscopic Beam Profile Metrology
App 20160161245 - Fu; Jiyou ; et al. | 2016-06-09 |
System, Method And Computer Program Product For Combining Raw Data From Multiple Metrology Tools
App 20160141193 - Pandev; Stilian Ivanov ; et al. | 2016-05-19 |
Signal Response Metrology For Image Based And Scatterometry Overlay Measurements
App 20160117847 - Pandev; Stilian Ivanov ; et al. | 2016-04-28 |
Image Based Signal Response Metrology
App 20160117812 - Pandev; Stilian Ivanov ; et al. | 2016-04-28 |
Measurement Of Small Box Size Targets
App 20160109375 - Pandev; Stilian Ivanov ; et al. | 2016-04-21 |
Metrology Of Multiple Patterning Processes
App 20160109230 - Pandev; Stilian Ivanov ; et al. | 2016-04-21 |
Metrology system optimization for parameter tracking
Grant 9,255,877 - Veldman , et al. February 9, 2 | 2016-02-09 |
Signal Response Metrology Based On Measurements Of Proxy Structures
App 20160003609 - Shchegrov; Andrei V. ; et al. | 2016-01-07 |
Signal Response Metrology For Scatterometry Based Overlay Measurements
App 20150323316 - Shchegrov; Andrei V. ; et al. | 2015-11-12 |
Apparatus, Techniques, And Target Designs For Measuring Semiconductor Parameters
App 20150323471 - Sapiens; Noam ; et al. | 2015-11-12 |
Signal Response Metrology For Image Based Overlay Measurements
App 20150235108 - Pandev; Stilian Ivanov | 2015-08-20 |
Measurement Of Multiple Patterning Parameters
App 20150176985 - Shchegrov; Andrei V. ; et al. | 2015-06-25 |
Methods And Apparatus For Determining Focus
App 20150042984 - Pandev; Stilian Ivanov | 2015-02-12 |
Methods And Apparatus For Patterned Wafer Characterization
App 20150046121 - Dziura; Thaddeus Gerard ; et al. | 2015-02-12 |
Differential Methods And Apparatus For Metrology Of Semiconductor Targets
App 20150046118 - Pandev; Stilian Ivanov ; et al. | 2015-02-12 |
Measurement Model Optimization Based On Parameter Variations Across A Wafer
App 20140379281 - Pandev; Stilian Ivanov | 2014-12-25 |
Dynamic Removal Of Correlation Of Highly Correlated Parameters For Optical Metrology
App 20140358488 - Lee; Lie-Quan ; et al. | 2014-12-04 |
Metrology System Optimization For Parameter Tracking
App 20140347666 - Veldman; Andrei ; et al. | 2014-11-27 |
On-device Metrology
App 20140316730 - Shchegrov; Andrei V. ; et al. | 2014-10-23 |
Statistical Model-based Metrology
App 20140297211 - Pandev; Stilian Ivanov ; et al. | 2014-10-02 |
Measurement model optimization based on parameter variations across a wafer
Grant 8,843,875 - Pandev September 23, 2 | 2014-09-23 |
Integrated Use Of Model-based Metrology And A Process Model
App 20140172394 - Kuznetsov; Alexander ; et al. | 2014-06-19 |
Measurement Recipe Optimization Based On Spectral Sensitivity And Process Variation
App 20130304408 - Pandev; Stilian Ivanov | 2013-11-14 |
Measurement Model Optimization Based On Parameter Variations Across A Wafer
App 20130305206 - Pandev; Stilian Ivanov | 2013-11-14 |
Model Optimization Approach Based On Spectral Sensitivity
App 20130262044 - Pandev; Stilian Ivanov ; et al. | 2013-10-03 |
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