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Flexible Temperature Sensor And Sensor Array App 20140328373 - PANDA; SIDDHARTHA ;   et al. | 2014-11-06 |
Flexible temperature sensor and sensor array Grant 8,783,948 - Panda , et al. July 22, 2 | 2014-07-22 |
Field effect device with reduced thickness gate Grant 8,492,803 - Amos , et al. July 23, 2 | 2013-07-23 |
Flexible Temperature Sensor And Sensor Array App 20120263209 - Panda; Siddhartha ;   et al. | 2012-10-18 |
Method and apparatus for multilayer photoresist dry development Grant 8,048,325 - Balasubramaniam , et al. November 1, 2 | 2011-11-01 |
Method and apparatus for post silicide spacer removal Grant 7,977,185 - Greene , et al. July 12, 2 | 2011-07-12 |
Method of forming a cross-section hourglass shaped channel region for charge carrier mobility modification Grant 7,863,197 - Chen , et al. January 4, 2 | 2011-01-04 |
Semiconductor device structure having low and high performance devices of same conductive type on same substrate Grant 7,776,695 - Arnold , et al. August 17, 2 | 2010-08-17 |
Method To Increase Strain Enhancement With Spacerless Fet And Dual Liner Process App 20100187636 - Yang; Haining S. ;   et al. | 2010-07-29 |
Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current Grant 7,754,615 - Panda , et al. July 13, 2 | 2010-07-13 |
Method to increase strain enhancement with spacerless FET and dual liner process Grant 7,709,317 - Yang , et al. May 4, 2 | 2010-05-04 |
Stressed field effect transistors on hybrid orientation substrate Grant 7,687,829 - Chidambarrao , et al. March 30, 2 | 2010-03-30 |
Method of processing wafers with resonant heating Grant 7,645,356 - Panda , et al. January 12, 2 | 2010-01-12 |
Structure and method for making strained channel field effect transistor using sacrificial spacer Grant 7,645,656 - Chen , et al. January 12, 2 | 2010-01-12 |
Field Effect Device With Reduced Thickness Gate App 20090159934 - Amos; Ricky S. ;   et al. | 2009-06-25 |
Strained MOS devices using source/drain epitaxy Grant 7,525,161 - Ieong , et al. April 28, 2 | 2009-04-28 |
Methods For Forming Nested And Isolated Lines In Semiconductor Devices App 20090104776 - Dobuzinsky; David M. ;   et al. | 2009-04-23 |
Field effect device with reduced thickness gate Grant 7,459,382 - Amos , et al. December 2, 2 | 2008-12-02 |
Method to engineer etch profiles in Si substrate for advanced semiconductor devices Grant 7,442,618 - Chong , et al. October 28, 2 | 2008-10-28 |
Cross-section Hourglass Shaped Channel Region For Charge Carrier Mobility Modification App 20080258180 - Chen; Huajie ;   et al. | 2008-10-23 |
Apparatus and method for shielding a wafer from charged particles during plasma etching Grant 7,438,822 - Yan , et al. October 21, 2 | 2008-10-21 |
Stressed Field Effect Transistors On Hybrid Orientation Substrate App 20080251817 - Chidambarrao; Dureseti ;   et al. | 2008-10-16 |
Strained MOS devices using source/drain epitaxy App 20080179627 - Ieong; Meikei ;   et al. | 2008-07-31 |
Stressed field effect transistors on hybrid orientation substrate Grant 7,405,436 - Chidambarrao , et al. July 29, 2 | 2008-07-29 |
STRUCTURE AND METHOD OF MANUFACTURING A STRAINED FinFET WITH STRESSED SILICIDE App 20080173942 - Zhu; Huilong ;   et al. | 2008-07-24 |
Post-silicide spacer removal Grant 7,393,746 - Dyer , et al. July 1, 2 | 2008-07-01 |
Method and apparatus for multilayer photoresist dry development App 20080128388 - BALASUBRAMANIAM; Vaidyanathan ;   et al. | 2008-06-05 |
Method For Precise Temperature Cycling In Chemical / Biochemical Processes App 20080118955 - Panda; Siddhartha ;   et al. | 2008-05-22 |
Post-silicide spacer removal App 20080090370 - Dyer; Thomas W. ;   et al. | 2008-04-17 |
Elevated Temperature Chemical Oxide Removal Module And Process App 20080078743 - Munoz; Andres F. ;   et al. | 2008-04-03 |
Method and apparatus for multilayer photoresist dry development Grant 7,344,991 - Balasubramaniam , et al. March 18, 2 | 2008-03-18 |
Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current App 20080026488 - Panda; Siddhartha ;   et al. | 2008-01-31 |
Semiconductor Structure Including Isolation Region With Variable Linewidth And Method For Fabrication Therof App 20070293016 - Luo; Zhijiong ;   et al. | 2007-12-20 |
Silicon nitride etching methods Grant 7,288,482 - Panda , et al. October 30, 2 | 2007-10-30 |
Endpoint detection for the patterning of layered materials Grant 7,285,775 - Sievers , et al. October 23, 2 | 2007-10-23 |
Gas filled reactive atomic force microscope probe Grant 7,278,300 - Sievers , et al. October 9, 2 | 2007-10-09 |
Field Effect Device With Reduced Thickness Gate App 20070221964 - Amos; Ricky S. ;   et al. | 2007-09-27 |
Non-destructive in-situ elemental profiling Grant 7,256,399 - Panda , et al. August 14, 2 | 2007-08-14 |
Method And Apparatus For Post Silicide Spacer Removal App 20070161244 - Greene; Brian J. ;   et al. | 2007-07-12 |
Semiconductor Device Structure Having Low And High Performance Devices Of Same Conductive Type On Same Substrate App 20070158753 - Arnold; John C. ;   et al. | 2007-07-12 |
Structure And Method To Increase Strain Enhancement With Spacerless Fet And Dual Liner Process App 20070108525 - Yang; Haining S. ;   et al. | 2007-05-17 |
Gas Filled Reactive Atomic Force Microscope Probe App 20070068234 - Sievers; Michael R. ;   et al. | 2007-03-29 |
Polysilicon Etching Methods App 20070056930 - Iseda; Seiji ;   et al. | 2007-03-15 |
Silicon precursors for deep trench silicon etch processes Grant 7,186,660 - Panda , et al. March 6, 2 | 2007-03-06 |
Method For Post-rie Passivation Of Semiconductor Surfaces For Epitaxial Growth App 20070048980 - Holt; Judson R. ;   et al. | 2007-03-01 |
In situ doped embedded sige extension and source/drain for enhanced PFET performance Grant 7,176,481 - Chen , et al. February 13, 2 | 2007-02-13 |
Method to engineer etch profiles in Si substrate for advanced semiconductor devices App 20070020861 - Chong; Yung Fu ;   et al. | 2007-01-25 |
Structure And Method For Making Strained Channel Field Effect Transistor Using Sacrificial Spacer App 20060292779 - Chen; Huajie ;   et al. | 2006-12-28 |
Structure and method for making strained channel field effect transistor using sacrificial spacer Grant 7,135,724 - Chen , et al. November 14, 2 | 2006-11-14 |
Silicon Nitride Etching Methods App 20060252269 - Panda; Siddhartha ;   et al. | 2006-11-09 |
Non-destructive In-situ Elemental Profiling App 20060227321 - Panda; Siddhartha ;   et al. | 2006-10-12 |
Formation of controlled sublithographic structures Grant 7,087,532 - Dobuzinsky , et al. August 8, 2 | 2006-08-08 |
In Situ Doped Embedded Sige Extension And Source/drain For Enhanced Pfet Performance App 20060151837 - Chen; Huajie ;   et al. | 2006-07-13 |
Method And Apparatus For Precise Temperature Cycling In Chemical/biochemical Processes App 20060154280 - Panda; Siddhartha ;   et al. | 2006-07-13 |
Stressed field effect transistors on hybrid orientation substrate App 20060145264 - Chidambarrao; Dureseti ;   et al. | 2006-07-06 |
Endpoint Detection For The Patterning Of Layered Materials App 20060118718 - Sievers; Michael R. ;   et al. | 2006-06-08 |
Formation of Controlled Sublithographic Structures App 20060068596 - Dobuzinsky; David M. ;   et al. | 2006-03-30 |
Structure And Method For Making Strained Channel Field Effect Transistor Using Sacrificial Spacer App 20060065914 - Chen; Huajie ;   et al. | 2006-03-30 |
Apparatus and method for shielding a wafer from charged particles during plasma etching App 20060037940 - Yan; Hongwen ;   et al. | 2006-02-23 |
Method And Apparatus For Precise Temperature Cycling In Chemical/biochemical Processes App 20050244933 - Panda, Siddhartha ;   et al. | 2005-11-03 |
Method and apparatus for etching an organic layer App 20050136666 - Balasubramaniam, Vaidyanathan ;   et al. | 2005-06-23 |
Method of processing wafers with resonant heating App 20050112900 - Panda, Siddhartha ;   et al. | 2005-05-26 |
Method and system for deep trench silicon etch App 20040256353 - Panda, Siddhartha ;   et al. | 2004-12-23 |
Method of improving etch uniformity in deep silicon etching Grant 6,806,200 - Dobuzinsky , et al. October 19, 2 | 2004-10-19 |
Method and apparatus for multilayer photoresist dry development App 20040180269 - Balasubramaniam, Vaidyanathan ;   et al. | 2004-09-16 |
Pre-loaded plasma reactor apparatus and application thereof App 20040129385 - Wise, Richard ;   et al. | 2004-07-08 |
Silicon precursors for deep trench silicon etch processes App 20040132312 - Panda, Siddhartha ;   et al. | 2004-07-08 |
Method of enhancing surface reactions by local resonant heating App 20040112863 - Chen, Bomy A. ;   et al. | 2004-06-17 |
Apparatus and method for shielding a wafer from charged particles during plasma etching App 20040110388 - Yan, Hongwen ;   et al. | 2004-06-10 |
Method of etching high aspect ratio openings Grant 6,743,727 - Mathad , et al. June 1, 2 | 2004-06-01 |
Method of improving etch uniformity in deep silicon etching App 20040092122 - Dobuzinsky, David ;   et al. | 2004-05-13 |
Method to increase the etch rate and depth in high aspect ratio structure Grant 6,709,917 - Panda , et al. March 23, 2 | 2004-03-23 |
Method of trench sidewall enhancement Grant 6,706,586 - Collins , et al. March 16, 2 | 2004-03-16 |
Method To Increase The Etch Rate And Depth In High Aspect Ratio Structure App 20030211686 - Panda, Siddhartha ;   et al. | 2003-11-13 |
Method of etching high aspect ratio openings App 20020179570 - Mathad, Gangadhara S. ;   et al. | 2002-12-05 |
Process for aluminum nitride powder production Grant 5,525,320 - Pratsinis , et al. June 11, 1 | 1996-06-11 |