Panagopoulos; Theo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Panagopoulos; Theo.The latest application filed is for "thermal atomic layer etch with rapid temperature cycling".

Company Profile

4.9.9

Panagopoulos; Theo - Los Gatos CA
Panagopoulos; Theo - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Thermal Atomic Layer Etch With Rapid Temperature Cycling App 20210104414 - Panagopoulos; Theo ; et al.	2021-04-08
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,665,435 - Brown , et al.	2020-05-26
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20190371579 - Brown; Daniel Arthur ; et al.	2019-12-05
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,395,902 - Brown , et al. A	2019-08-27
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20180323044 - Brown; Daniel Arthur ; et al.	2018-11-08
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,049,862 - Brown , et al. August 14, 2	2018-08-14
Chamber For Patterning Non-volatile Metals App 20180204738 - Shen; Meihua ; et al.	2018-07-19
Chamber for patterning non-volatile metals Grant 9,953,843 - Shen , et al. April 24, 2	2018-04-24
Chamber For Patterning Non-volatile Metals App 20170229317 - Shen; Meihua ; et al.	2017-08-10
Chamber filler kit for plasma etch chamber useful for fast gas switching Grant 9,679,751 - McChesney , et al. June 13, 2	2017-06-13
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20160307743 - Brown; Daniel Arthur ; et al.	2016-10-20
Rapid and uniform gas switching for a plasma etch process Grant 9,011,631 - Panagopoulos April 21, 2	2015-04-21
Chamber Filler Kit For Plasma Etch Chamber Useful For Fast Gas Switching App 20130244440 - McChesney; Jon ; et al.	2013-09-19
Rapid And Uniform Gas Switching For A Plasma Etch Process App 20120156880 - Panagopoulos; Theo	2012-06-21
Rapid and uniform gas switching for a plasma etch process Grant 8,133,349 - Panagopoulos March 13, 2	2012-03-13

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