Patent | Date |
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Capacitive sensor housing for chamber condition monitoring Grant 11,415,538 - Pan , et al. August 16, 2 | 2022-08-16 |
Capacitive Sensor For Monitoring Gas Concentration App 20220244205 - Li; Xiaopu ;   et al. | 2022-08-04 |
Integrated packaging devices and methods with backside interconnections Grant 11,282,760 - Pan , et al. March 22, 2 | 2022-03-22 |
Capacitive Sensors And Capacitive Sensing Locations For Plasma Chamber Condition Monitoring App 20210280399 - Pan; Yaoling ;   et al. | 2021-09-09 |
Capacitive Sensing Data Integration For Plasma Chamber Condition Monitoring App 20210280400 - Pan; Yaoling ;   et al. | 2021-09-09 |
Capacitive Sensor Housing For Chamber Condition Monitoring App 20210278360 - Pan; Yaoling ;   et al. | 2021-09-09 |
Capacitive Sensor For Chamber Condition Monitoring App 20210280443 - Pan; Yaoling ;   et al. | 2021-09-09 |
Differential Capacitive Sensors For In-situ Film Thickness And Dielectric Constant Measurement App 20210033557 - TAE; PATRICK ;   et al. | 2021-02-04 |
Capping Plate For Panel Scale Packaging Of Mems Products App 20210002130 - HONG; John ;   et al. | 2021-01-07 |
Mems And Nems Structures App 20200407219 - HONG; John ;   et al. | 2020-12-31 |
Sensors And System For In-situ Edge Ring Erosion Monitor App 20200335368 - PAN; Yaoling ;   et al. | 2020-10-22 |
Integrated Packaging Devices And Methods With Backside Interconnections App 20200294878 - PAN; Yaoling ;   et al. | 2020-09-17 |
Integrated packaging devices and methods with backside interconnections Grant 10,453,766 - Pan , et al. Oc | 2019-10-22 |
Resonant Process Monitor App 20190287758 - PAN; Yaoling ;   et al. | 2019-09-19 |
Wafer Level Integrated Optics In Packaging For Imaging Sensor Application App 20180364439 - PAN; Yaoling ;   et al. | 2018-12-20 |
Panel level packaging for MEMS application Grant 10,150,667 - Pan , et al. Dec | 2018-12-11 |
Stacked vias for vertical integration Grant 10,131,534 - Pan , et al. November 20, 2 | 2018-11-20 |
Panel Level Packaging For Mems Application App 20180230004 - PAN; Yaoling ;   et al. | 2018-08-16 |
Nucleotide Sensing Device Having A Nanopore Formed In An Inorganic Material App 20180163266 - CHANG; Tallis Young ;   et al. | 2018-06-14 |
Integrated Packaging Devices And Methods With Backside Interconnections App 20180138102 - Pan; Yaoling ;   et al. | 2018-05-17 |
Interferometric modulator mirror design without metal layer in the hinge Grant 9,715,156 - Chang , et al. July 25, 2 | 2017-07-25 |
Wireless Charging Receiver Using Piezoelectric Material App 20170085096 - Hong; John Hyunchul ;   et al. | 2017-03-23 |
EMS device having flexible support posts Grant 9,477,076 - Hong , et al. October 25, 2 | 2016-10-25 |
Pre-release Encapsulation Of Electromechanical System Devices App 20160299332 - Chang; Tallis Young ;   et al. | 2016-10-13 |
Interferometric Modulator Mirror Design Without Metal Layer In The Hinge App 20160274436 - Chang; Tallis Young ;   et al. | 2016-09-22 |
Creep Resistant Reflective Structure In Mems Display App 20160232858 - Pan; Yaoling ;   et al. | 2016-08-11 |
Integrated Diffuser With Variable-index Microlens Layer App 20160231471 - Ma; Jian Jim ;   et al. | 2016-08-11 |
Launch Control Of Movable Layer In Electromechanical Devices App 20160149516 - Hong; John Hyunchul ;   et al. | 2016-05-26 |
Absorber Stack For Multi-state Interferometric Modulators App 20150355454 - Ma; Jian Jim ;   et al. | 2015-12-10 |
Flexible Ems Device Using Organic Materials App 20150277097 - Hong; John Hyunchul ;   et al. | 2015-10-01 |
Ems Device Having Flexible Support Posts App 20150277099 - Hong; John Hyunchul ;   et al. | 2015-10-01 |
Ems Device Having A Non-electrically Active Absorber App 20150277098 - Hong; John Hyunchul ;   et al. | 2015-10-01 |
Stacked Via Structures And Methods Of Fabrication App 20150048514 - Tang; Hairong ;   et al. | 2015-02-19 |
Thin film stack with surface-conditioning buffer layers and related methods Grant 8,817,358 - Hong , et al. August 26, 2 | 2014-08-26 |
Amorphous oxide semiconductor thin film transistor fabrication method Grant 8,797,303 - Kim , et al. August 5, 2 | 2014-08-05 |
Thin Film Stack With Surface-conditioning Buffer Layers And Related Methods App 20140036340 - Hong; John Hyunchul ;   et al. | 2014-02-06 |
Method And Apparatus For Wafer-level Solder Hermetic Seal Encapsulation Of Mems Devices App 20130119489 - Chang; Tallis Y. ;   et al. | 2013-05-16 |
Stacked Vias For Vertical Integration App 20130100143 - PAN; Yaoling ;   et al. | 2013-04-25 |
Amorphous Oxide Semiconductor Thin Film Transistor Fabrication Method App 20130037793 - PAN; Yaoling ;   et al. | 2013-02-14 |
Amorphous Oxide Semiconductor Thin Film Transistor Fabrication Method App 20120242627 - Kim; Cheonhong ;   et al. | 2012-09-27 |
Methods for oriented growth of nanowires on patterned substrates Grant 7,951,422 - Pan , et al. May 31, 2 | 2011-05-31 |
Method of fabricating gate configurations for an improved contacts in nanowire based electronic devices Grant 7,871,870 - Mostarshed , et al. January 18, 2 | 2011-01-18 |
System and Process for Producing Nanowire Composites and Electronic Substrates Therefrom App 20100323500 - Buretea; Mihai ;   et al. | 2010-12-23 |
System and process for producing nanowire composites and electronic substrates therefrom Grant 7,795,125 - Buretea , et al. September 14, 2 | 2010-09-14 |
Selective processing of semiconductor nanowires by polarized visible radiation Grant 7,786,024 - Stumbo , et al. August 31, 2 | 2010-08-31 |
Methods for Nanostructure Doping App 20100167512 - Pan; Yaoling ;   et al. | 2010-07-01 |
Systems and methods for harvesting and reducing contamination in nanowires Grant 7,741,197 - Duan , et al. June 22, 2 | 2010-06-22 |
Method, System and Apparatus for Gating Configurations and Improved Contacts in Nanowire-Based Electronic Devices App 20100144103 - Mostarshed; Shahriar ;   et al. | 2010-06-10 |
Gating configurations and improved contacts in nanowire-based electronic devices Grant 7,701,014 - Mostarshed , et al. April 20, 2 | 2010-04-20 |
Nanowire capacitor and methods of making same Grant 7,667,296 - Stumbo , et al. February 23, 2 | 2010-02-23 |
Contact doping and annealing systems and processes for nanowire thin films Grant 7,569,503 - Pan , et al. August 4, 2 | 2009-08-04 |
System and Process for Producing Nanowire Composites and Electronic Substrates Therefrom App 20090075468 - Buretea; Mihai ;   et al. | 2009-03-19 |
Method, System and Apparatus for Gating Configurations and Improved Contacts in Nanowire-Based Electronic Devices App 20090050974 - Mostarshed; Shahriar ;   et al. | 2009-02-26 |
Gate configuration for nanowire electronic devices Grant 7,473,943 - Mostarshed , et al. January 6, 2 | 2009-01-06 |
System and process for producing nanowire composites and electronic substrates therefrom Grant 7,468,315 - Buretea , et al. December 23, 2 | 2008-12-23 |
Selective Processing Of Semiconductor Nanowires By Polarized Visible Radiation App 20080150165 - Stumbo; David P. ;   et al. | 2008-06-26 |
Fully Integrated Organic Layered Processes for Making Plastic Electronics Based on Conductive Polymers and Semiconductor Nanowires App 20080128688 - Pan; Yaoling ;   et al. | 2008-06-05 |
Fully integrated organic layered processes for making plastic electronics based on conductive polymers and semiconductor nanowires Grant 7,345,307 - Pan , et al. March 18, 2 | 2008-03-18 |
Systems and methods for harvesting and integrating nanowires Grant 7,339,184 - Romano , et al. March 4, 2 | 2008-03-04 |
Systems and Methods for Harvesting and Integrating Nanowires App 20080041814 - Romano; Linda T. ;   et al. | 2008-02-21 |
Methods for oriented growth of nanowires on patterned substrates App 20080038520 - Pan; Yaoling ;   et al. | 2008-02-14 |
System and process for producing nanowire composites and electronic substrates therefrom App 20070238314 - Buretea; Mihai A. ;   et al. | 2007-10-11 |
Systems and methods for nanowire growth and harvesting Grant 7,273,732 - Pan , et al. September 25, 2 | 2007-09-25 |
Nanowire capacitor and methods of making same App 20070012985 - Stumbo; David ;   et al. | 2007-01-18 |
Systems and methods for nanowire growth and harvesting App 20060255481 - Pan; Yaoling ;   et al. | 2006-11-16 |
Contact doping and annealing systems and processes for nanowire thin films App 20060234519 - Pan; Yaoling ;   et al. | 2006-10-19 |
Nanowire varactor diode and methods of making same Grant 7,115,971 - Stumbo , et al. October 3, 2 | 2006-10-03 |
Fully integrated organic layered processes for making plastic electronics based on conductive polymers and semiconductor nanowires App 20060214156 - Pan; Yaoling ;   et al. | 2006-09-28 |
Systems and methods for nanowire growth and harvesting Grant 7,105,428 - Pan , et al. September 12, 2 | 2006-09-12 |
System and process for producing nanowire composites and electronic substrates therefrom Grant 7,091,120 - Buretea , et al. August 15, 2 | 2006-08-15 |
Method, system and apparatus for gating configurations and improved contacts in nanowire-based electronic devices App 20060081886 - Mostarshed; Shahriar ;   et al. | 2006-04-20 |
Systems and methods for nanowire growth and harvesting App 20060019472 - Pan; Yaoling ;   et al. | 2006-01-26 |
Systems and methods for harvesting and integrating nanowires App 20060008942 - Romano; Linda T. ;   et al. | 2006-01-12 |
Nanowire varactor diode and methods of making same App 20050212079 - Stumbo, David ;   et al. | 2005-09-29 |
System and process for producing nanowire composites and electronic substrates therefrom App 20050064185 - Buretea, Mihai ;   et al. | 2005-03-24 |
Planar nanowire based sensor elements, devices, systems and methods for using and making same App 20040136866 - Pontis, George ;   et al. | 2004-07-15 |
Efficient thermal activation optical switch and method of making the same Grant 6,678,435 - Pan , et al. January 13, 2 | 2004-01-13 |
Efficient thermal activation optical switch and method of making the same App 20020172449 - Pan, Yaoling ;   et al. | 2002-11-21 |