Pal; Aniruddha

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pal; Aniruddha.The latest application filed is for "method and apparatus for substrate transfer and radical confinement".

Company Profile

9.15.20

Pal; Aniruddha - San Jose CA
Pal; Aniruddha - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multinode multi-use O-ring and method for forming a seal Grant 11,359,722 - Maheshwari , et al. June 14, 2	2022-06-14
Abatement and strip process chamber in a dual loadlock configuration Grant 11,177,136 - Lee , et al. November 16, 2	2021-11-16
Abatement and strip process chamber in a dual load lock configuration Grant 11,171,008 - Lee , et al. November 9, 2	2021-11-09
Method of reclaiming a seal Grant 11,090,893 - Maheshwari , et al. August 17, 2	2021-08-17
Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation Grant 10,991,552 - Pal , et al. April 27, 2	2021-04-27
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200411350 - LEE; Jared Ahmad ; et al.	2020-12-31
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200126802 - LEE; Jared Ahmad ; et al.	2020-04-23
Method Of Reclaiming A Seal App 20200079044 - MAHESHWARI; Shagun P. ; et al.	2020-03-12
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200066563 - LEE; Jared Ahmad ; et al.	2020-02-27
Multinode Multi-use O-ring And Method For Forming A Seal App 20200025292 - MAHESHWARI; Shagun P. ; et al.	2020-01-23
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200027742 - LEE; Jared Ahmad ; et al.	2020-01-23
Method and apparatus for substrate transfer and radical confinement Grant 10,468,282 - Lee , et al. No	2019-11-05
Abatement and strip process chamber in a dual loadlock configuration Grant 10,453,694 - Lee , et al. Oc	2019-10-22
Cooling Mechanism Utlized In A Plasma Reactor With Enhanced Temperature Regulation App 20190198295 - PAL; Aniruddha ; et al.	2019-06-27
Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation Grant 10,249,475 - Pal , et al.	2019-04-02
Thin heated substrate support Grant 10,204,805 - Yousif , et al. Feb	2019-02-12
Method and apparatus for substrate transfer and radical confinement Grant 10,090,181 - Lee , et al. October 2, 2	2018-10-02
Method And Apparatus For Substrate Transfer And Radical Confinement App 20180247850 - LEE; Jared Ahmad ; et al.	2018-08-30
Thermal management of edge ring in semiconductor processing Grant 9,947,559 - Pal , et al. April 17, 2	2018-04-17
Thin Heated Substrate Support App 20170040192 - YOUSIF; Imad ; et al.	2017-02-09
Cooling Mechanism Utlized In A Plasma Reactor With Enhanced Temperature Regulation App 20150279634 - PAL; Aniruddha ; et al.	2015-10-01
Method And Apparatus For Substrate Transfer And Radical Confinement App 20140087561 - Lee; Jared Ahmad ; et al.	2014-03-27
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20130337655 - Lee; Jared Ahmad ; et al.	2013-12-19
Thin Heated Substrate Support App 20130334199 - Yousif; Imad ; et al.	2013-12-19
Apparatus for radial delivery of gas to a chamber and methods of use thereof Grant 8,562,742 - Lee , et al. October 22, 2	2013-10-22
Thermal Management Of Edge Ring In Semiconductor Processing App 20130105088 - PAL; Aniruddha ; et al.	2013-05-02
Vacuum Chambers With Shared Pump App 20120222813 - Pal; Aniruddha ; et al.	2012-09-06
Apparatus For Radial Delivery Of Gas To A Chamber And Methods Of Use Thereof App 20110265887 - LEE; JARED AHMAD ; et al.	2011-11-03
Methods And Apparatus For Improving Flow Uniformity In A Process Chamber App 20100081284 - BALAKRISHNA; AJIT ; et al.	2010-04-01

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