loadpatents
name:-0.016717195510864
name:-0.0034019947052002
name:-0.0053920745849609
Pakulski; Ryan M. Patent Filings

Pakulski; Ryan M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pakulski; Ryan M..The latest application filed is for "plasma strip tool with multiple gas injection".

Company Profile
5.3.15
  • Pakulski; Ryan M. - Brentwood CA
  • Pakulski; Ryan M. - Discovery Bay CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Plasma processing apparatus having a focus ring adjustment assembly
Grant 11,348,767 - Zucker , et al. May 31, 2
2022-05-31
Plasma Strip Tool with Multiple Gas Injection
App 20210398775 - Ma; Shawming ;   et al.
2021-12-23
Plasma Processing Apparatus and Methods
App 20210257196 - Ma; Shawming ;   et al.
2021-08-19
Focus Ring Adjustment Assembly Of A System For Processing Workpieces Under Vacuum
App 20200365405 - Zucker; Martin L. ;   et al.
2020-11-19
End Effectors For Moving Workpieces And Replaceable Parts Within A System For Processing Workpieces Under Vacuum
App 20200361094 - Zucker; Martin L. ;   et al.
2020-11-19
Plasma Processing Apparatus Having A Focus Ring Adjustment Assembly
App 20200365377 - Zucker; Martin L. ;   et al.
2020-11-19
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
App 20200365381 - Zucker; Martin L. ;   et al.
2020-11-19
Gas Supply With Angled Injectors In Plasma Processing Apparatus
App 20200258718 - A1
2020-08-13
Post Plasma Gas Injection In A Separation Grid
App 20200243305 - Zeng; Weimin ;   et al.
2020-07-30
Systems And Methods For Workpiece Processing
App 20200161162 - Yang; Michael X. ;   et al.
2020-05-21
Plasma Processing Apparatus and Methods
App 20190198301 - Ma; Shawming ;   et al.
2019-06-27
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
App 20190131112 - Ma; Shawming ;   et al.
2019-05-02
Plasma Strip Tool With Multiple Gas Injection Zones
App 20180358204 - Ma; Shawming ;   et al.
2018-12-13
Separation Grid for Plasma Chamber
App 20180053628 - Vaniapura; Vijay M. ;   et al.
2018-02-22
Variable Pattern Separation Grid for Plasma Chamber
App 20170207077 - Nagorny; Vladimir ;   et al.
2017-07-20
Advanced multi-workpiece processing chamber
Grant 9,184,072 - Devine , et al. November 10, 2
2015-11-10
Advanced Multi-workpiece Processing Chamber
App 20090028761 - Devine; Daniel J. ;   et al.
2009-01-29

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