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Patent applications and USPTO patent grants for Pakulski; Ryan M..The latest application filed is for "plasma strip tool with multiple gas injection".
Patent | Date |
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Plasma processing apparatus having a focus ring adjustment assembly Grant 11,348,767 - Zucker , et al. May 31, 2 | 2022-05-31 |
Plasma Strip Tool with Multiple Gas Injection App 20210398775 - Ma; Shawming ;   et al. | 2021-12-23 |
Plasma Processing Apparatus and Methods App 20210257196 - Ma; Shawming ;   et al. | 2021-08-19 |
Focus Ring Adjustment Assembly Of A System For Processing Workpieces Under Vacuum App 20200365405 - Zucker; Martin L. ;   et al. | 2020-11-19 |
End Effectors For Moving Workpieces And Replaceable Parts Within A System For Processing Workpieces Under Vacuum App 20200361094 - Zucker; Martin L. ;   et al. | 2020-11-19 |
Plasma Processing Apparatus Having A Focus Ring Adjustment Assembly App 20200365377 - Zucker; Martin L. ;   et al. | 2020-11-19 |
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus App 20200365381 - Zucker; Martin L. ;   et al. | 2020-11-19 |
Gas Supply With Angled Injectors In Plasma Processing Apparatus App 20200258718 - A1 | 2020-08-13 |
Post Plasma Gas Injection In A Separation Grid App 20200243305 - Zeng; Weimin ;   et al. | 2020-07-30 |
Systems And Methods For Workpiece Processing App 20200161162 - Yang; Michael X. ;   et al. | 2020-05-21 |
Plasma Processing Apparatus and Methods App 20190198301 - Ma; Shawming ;   et al. | 2019-06-27 |
Inductively Coupled Plasma Wafer Bevel Strip Apparatus App 20190131112 - Ma; Shawming ;   et al. | 2019-05-02 |
Plasma Strip Tool With Multiple Gas Injection Zones App 20180358204 - Ma; Shawming ;   et al. | 2018-12-13 |
Separation Grid for Plasma Chamber App 20180053628 - Vaniapura; Vijay M. ;   et al. | 2018-02-22 |
Variable Pattern Separation Grid for Plasma Chamber App 20170207077 - Nagorny; Vladimir ;   et al. | 2017-07-20 |
Advanced multi-workpiece processing chamber Grant 9,184,072 - Devine , et al. November 10, 2 | 2015-11-10 |
Advanced Multi-workpiece Processing Chamber App 20090028761 - Devine; Daniel J. ;   et al. | 2009-01-29 |
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