Pai; Uday

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pai; Uday.The latest application filed is for "methods and apparatus for processing a substrate using improved shield configurations".

Company Profile

2.10.14

Pai; Uday - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Edge load ring Grant 11,440,159 - Pai , et al. September 13, 2	2022-09-13
Methods And Apparatus For Processing A Substrate Using Improved Shield Configurations App 20220213590 - PAI; Uday ; et al.	2022-07-07
Edge Load Ring App 20220097202 - PAI; Uday ; et al.	2022-03-31
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers App 20220071037 - Gunaji; Akshay ; et al.	2022-03-03
Fabrication Of Piezoelectric Device With Pmnpt Layer App 20210143320 - Sangle; Abhijeet Laxman ; et al.	2021-05-13
Target retaining apparatus Grant 10,199,204 - Yedla , et al. Fe	2019-02-05
Physical vapor deposition (PVD) target having low friction pads Grant 9,960,021 - Riker , et al. May 1, 2	2018-05-01
Process kit shield for plasma enhanced processing chamber Grant 9,343,274 - Rasheed , et al. May 17, 2	2016-05-17
Substrate processing system with mechanically floating target assembly Grant 9,303,311 - Young , et al. April 5, 2	2016-04-05
Target Retaining Apparatus App 20150203960 - YEDLA; SRINIVASA ; et al.	2015-07-23
Physical Vapor Deposition (pvd) Target Having Low Friction Pads App 20150170888 - RIKER; MARTIN LEE ; et al.	2015-06-18
Process Kit Shield For Plasma Enhanced Processing Chamber App 20140158049 - RASHEED; MUHAMMAD ; et al.	2014-06-12
Apparatus for enabling concentricity of plasma dark space Grant 8,702,918 - Ritchie , et al. April 22, 2	2014-04-22
Process kit shield for plasma enhanced processing chamber Grant 8,647,485 - Rasheed , et al. February 11, 2	2014-02-11
Process Kit Shield For Plasma Enhanced Processing Chamber App 20130255576 - RASHEED; MUHAMMAD ; et al.	2013-10-03
Substrate Processing System With Mechanically Floating Target Assembly App 20130256125 - YOUNG; DONNY ; et al.	2013-10-03
Apparatus For Enabling Concentricity Of Plasma Dark Space App 20130153412 - RITCHIE; ALAN ; et al.	2013-06-20
Processing Chamber With Translating Wear Plate For Lift Pin App 20110164955 - White; John M. ; et al.	2011-07-07

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