Patent | Date |
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Electronic device with stud bumps Grant 11,444,015 - Pahl September 13, 2 | 2022-09-13 |
Sensor Arrangement and Method for Producing a Sensor Arrangement App 20220127137 - Pahl; Wolfgang | 2022-04-28 |
Electric component with sensitive component structures and method for producing an electric component with sensitive component structures Grant 11,245,977 - Bauer , et al. February 8, 2 | 2022-02-08 |
Carrier substrate for stress sensitive device and method of manufacture Grant 11,234,082 - Pahl January 25, 2 | 2022-01-25 |
MEMS device stress-reducing structure Grant 11,142,453 - Mayer , et al. October 12, 2 | 2021-10-12 |
Method for measuring a behavior of a MEMS device Grant 11,137,253 - Barbul , et al. October 5, 2 | 2021-10-05 |
Electronic Device and Method for Manufacturing an Electronic Device App 20210139317 - Pahl; Wolfgang | 2021-05-13 |
Mems Device With Particle Filter And Method Of Manufacture App 20210114866 - Pahl; Wolfgang | 2021-04-22 |
Electronic Device with Stud Bumps App 20210104456 - Pahl; Wolfgang | 2021-04-08 |
Electronic device with stud bumps Grant 10,903,156 - Pahl January 26, 2 | 2021-01-26 |
Resiliently mounted sensor system with damping Grant 10,683,201 - Rombach , et al. | 2020-06-16 |
Method for Measuring a Behavior of a MEMS Device App 20200124419 - Barbul; Andreas ;   et al. | 2020-04-23 |
Carrier Substrate for Stress Sensitive Device and Method of Manufacture App 20200053484 - Pahl; Wolfgang | 2020-02-13 |
Sensor component having two sensor functions Grant 10,544,035 - Pahl Ja | 2020-01-28 |
Housing for an electric component, and method for producing a housing for an electric component Grant 10,542,630 - Pahl Ja | 2020-01-21 |
MEMS Device App 20190375630 - Mayer; Klaus ;   et al. | 2019-12-12 |
Housing used for electric component and method for manufacturing same Grant 10,448,530 - Pahl , et al. Oc | 2019-10-15 |
Electronic Device App 20190267318 - Pahl; Wolfgang | 2019-08-29 |
Top port microphone and method for the production of same Grant 10,194,227 - Pahl Ja | 2019-01-29 |
Housing Used for Electric Component and Method for Manufacturing Same App 20190008063 - Pahl; Wolfgang ;   et al. | 2019-01-03 |
MEMS component and method for encapsulating MEMS components Grant 10,164,166 - Kruger , et al. Dec | 2018-12-25 |
Method for producing a cased electrical component Grant 10,154,582 - Pahl , et al. Dec | 2018-12-11 |
Top-port MEMS microphone and method of manufacturing the same Grant 10,136,226 - Ravnkilde , et al. November 20, 2 | 2018-11-20 |
Microphone and method for producing a microphone Grant 10,117,027 - Pahl October 30, 2 | 2018-10-30 |
Resiliently Mounted Sensor System With Damping App 20180244515 - Rombach; Pirmin Hermann Otto ;   et al. | 2018-08-30 |
Top Port Microphone And Method For The Production Of Same App 20180213311 - Pahl; Wolfgang | 2018-07-26 |
Multi-MEMS module Grant 10,015,600 - Pahl , et al. July 3, 2 | 2018-07-03 |
Mems Component And Method For Encapsulating Mems Components App 20180097172 - KRUGER; Hans ;   et al. | 2018-04-05 |
Cased Electrical Component App 20180054886 - PAHL; Wolfgang ;   et al. | 2018-02-22 |
MEMS component and method for encapsulating MEMS components Grant 9,853,204 - Kruger , et al. December 26, 2 | 2017-12-26 |
Microphone having increased rear volume, and method for production thereof Grant 9,854,350 - Pahl December 26, 2 | 2017-12-26 |
Cased electrical component Grant 9,844,128 - Pahl , et al. December 12, 2 | 2017-12-12 |
Simple To Produce Electric Component And Method For Producing An Electric Component App 20170272855 - BAUER; Christian ;   et al. | 2017-09-21 |
Component which can be produced at wafer level and method of production Grant 9,718,673 - Pahl August 1, 2 | 2017-08-01 |
Housing for an Electric Component, and Method for Producing a Housing for an Electric Component App 20170135240 - Pahl; Wolfgang | 2017-05-11 |
Wafer-level package and method for production thereof Grant 9,647,196 - Bauer , et al. May 9, 2 | 2017-05-09 |
Sensor Component Having Two Sensor Functions App 20170113924 - Pahl; Wolfgang | 2017-04-27 |
Microphone Having Increased Rear Volume, And Method For Production Thereof App 20170094402 - Pahl; Wolfgang | 2017-03-30 |
Microphone and Method for Producing a Microphone App 20170070825 - Pahl; Wolfgang | 2017-03-09 |
Method for applying a structured coating to a component Grant 9,556,022 - Pahl January 31, 2 | 2017-01-31 |
Multi-mems Module App 20160345106 - Pahl; Wolfgang ;   et al. | 2016-11-24 |
Encapsulated component comprising a MEMS component and method for the production thereof Grant 9,481,565 - Pahl November 1, 2 | 2016-11-01 |
Method For Applying A Structured Coating To A Component App 20160297676 - Pahl; Wolfgang | 2016-10-13 |
MEMS Sensor Component App 20160297671 - Pahl; Wolfgang | 2016-10-13 |
System support for electronic components and method for production thereof Grant 9,331,010 - Pahl , et al. May 3, 2 | 2016-05-03 |
Component Which Can be Produced at Wafer Level and Method of Production App 20160075552 - Pahl; Wolfgang | 2016-03-17 |
Method for producing a sensor Grant 9,278,854 - Pahl , et al. March 8, 2 | 2016-03-08 |
Encapsulated Component Comprising A Mems Component And Method For The Production Thereof App 20150344296 - Pahl; Wolfgang | 2015-12-03 |
MEMS Component and Method for Encapsulating MEMS Components App 20150325780 - Kruger; Hans ;   et al. | 2015-11-12 |
Top-Port MEMS Microphone and Method of Manufacturing the Same App 20150326979 - Ravnkilde; Jan Tue ;   et al. | 2015-11-12 |
Electric component having a shallow physical shape, and method of manufacture Grant 9,084,366 - Pahl July 14, 2 | 2015-07-14 |
Sensor module and method for producing sensor modules Grant 9,061,888 - Pahl , et al. June 23, 2 | 2015-06-23 |
Miniaturized electrical component comprising an MEMS and an ASIC and production method Grant 9,056,760 - Feiertag , et al. June 16, 2 | 2015-06-16 |
Method for encapsulating an MEMS component Grant 9,051,174 - Pahl , et al. June 9, 2 | 2015-06-09 |
Circuit board with flexible region and method for production thereof Grant 9,035,189 - Pahl , et al. May 19, 2 | 2015-05-19 |
Method For Producing A Sensor App 20150056725 - Pahl; Wolfgang ;   et al. | 2015-02-26 |
MEMS microphone and method for producing the MEMS microphone Grant 8,865,499 - Pahl , et al. October 21, 2 | 2014-10-21 |
Method of manufacturing a microphone Grant 8,713,789 - Leidl , et al. May 6, 2 | 2014-05-06 |
Wafer-Level Package and Method for Production Thereof App 20140111062 - Bauer; Christian ;   et al. | 2014-04-24 |
MEMS component, method for producing a MEMS component, and method for handling a MEMS component Grant 8,674,464 - Pahl , et al. March 18, 2 | 2014-03-18 |
Cased Electrical Component App 20140036466 - Pahl; Wolfgang ;   et al. | 2014-02-06 |
MEMS-microphone Grant 8,611,566 - Pahl , et al. December 17, 2 | 2013-12-17 |
Piezo Actuator With Protection Against Environmental Influences App 20130328448 - Gabl; Reinhard ;   et al. | 2013-12-12 |
MEMS microphone Grant 8,582,788 - Leidl , et al. November 12, 2 | 2013-11-12 |
MEMS microphone Grant 8,571,239 - Feiertag , et al. October 29, 2 | 2013-10-29 |
Component comprising a chip in a cavity and a stress-reduced attachment Grant 8,531,018 - Pahl September 10, 2 | 2013-09-10 |
MEMS Microphone And Method For Producing The MEMS Microphone App 20130140656 - Pahl; Wolfgang ;   et al. | 2013-06-06 |
Miniaturized Electrical Component Comprising an MEMS and an ASIC and Production Method App 20130119492 - Feiertag; Gregor ;   et al. | 2013-05-16 |
Electric Component Having A Shallow Physical Shape, And Method Of Manufacture App 20130121523 - Pahl; Wolfgang | 2013-05-16 |
MEMS package and method for the production thereof Grant 8,432,007 - Leidl , et al. April 30, 2 | 2013-04-30 |
Mems Microphone App 20120275634 - Leidl; Anton ;   et al. | 2012-11-01 |
Electrical component and production method Grant 8,294,535 - Feiertag , et al. October 23, 2 | 2012-10-23 |
Mems-microphone App 20120224726 - Pahl; Wolfgang ;   et al. | 2012-09-06 |
MEMS microphone, production method and method for installing Grant 8,229,139 - Pahl July 24, 2 | 2012-07-24 |
Component comprising a MEMS microphone and method for the production of said component Grant 8,218,794 - Pahl July 10, 2 | 2012-07-10 |
Electrical module comprising a MEMS microphone Grant 8,184,845 - Leidl , et al. May 22, 2 | 2012-05-22 |
MEMS package and method for the production thereof Grant 8,169,041 - Pahl , et al. May 1, 2 | 2012-05-01 |
Mems Microphone App 20120093346 - Feiertag; Gregor ;   et al. | 2012-04-19 |
Component with reduced temperature response, and method for production Grant 8,098,001 - Pahl , et al. January 17, 2 | 2012-01-17 |
Sensor Module And Method For Producing Sensor Modules App 20110298064 - Pahl; Wolfgang ;   et al. | 2011-12-08 |
Component Comprising A Chip In A Cavity And A Stress-reduced Attachment App 20110230068 - Pahl; Wolfgang | 2011-09-22 |
Circuit Board with Flexible Region and Method for Production Thereof App 20110214905 - Pahl; Wolfgang ;   et al. | 2011-09-08 |
MEMS Package and Method for the Production Thereof App 20110186943 - Pahl; Wolfgang ;   et al. | 2011-08-04 |
Method For Encapsulating An Mems Component App 20110180885 - Pahl; Wolfgang ;   et al. | 2011-07-28 |
System Support For Electronic Components And Method For Production Thereof App 20110133315 - Pahl; Wolfgang ;   et al. | 2011-06-09 |
MEMS Component, Method for Producing a MEMS Component, and Method for Handling a MEMS Component App 20110018076 - Pahl; Wolfgang ;   et al. | 2011-01-27 |
Component with Reduced Temperature Response, and Method for Production App 20100187949 - Pahl; Wolfgang ;   et al. | 2010-07-29 |
Component Comprising a MEMS Microphone and Method for the Production of Said Component App 20090232336 - Pahl; Wolfgang | 2009-09-17 |
Electrical component and production method App 20090224851 - Feiertag; Gregor ;   et al. | 2009-09-10 |
Microphone Membrane And Microphone Comprising The Same App 20090129611 - Leidl; Anton ;   et al. | 2009-05-21 |
Housing with a Cavity for a Mechanically-Sensitive Electronic Component and Method for Production App 20090127697 - Pahl; Wolfgang | 2009-05-21 |
Mems Package and Method for the Production Thereof App 20090001553 - Pahl; Wolfgang ;   et al. | 2009-01-01 |
Mems Microphone, Production Method and Method for Installing App 20080279407 - Pahl; Wolfgang | 2008-11-13 |
Mems Microphone App 20080267431 - Leidl; Anton ;   et al. | 2008-10-30 |
Electrical Module Comprising a Mems Microphone App 20080247585 - Leidl; Anton ;   et al. | 2008-10-09 |
SAW component with adhesive location and use thereof Grant 7,218,189 - Pahl May 15, 2 | 2007-05-15 |
SAW component with adhesive location and use thereof App 20060202781 - Pahl; Wolfgang | 2006-09-14 |
Encapsulated component and method for the production thereof Grant 7,102,224 - Pahl September 5, 2 | 2006-09-05 |
Hermetically encapsulated component and waferscale method for the production thereof App 20060043601 - Pahl; Wolfgang | 2006-03-02 |
Encapsulation for an electrical component and method for producing the same Grant 6,984,421 - Pahl , et al. January 10, 2 | 2006-01-10 |
Method of producing a surface wave component with a drain for pyroelectric voltage Grant 6,931,699 - Pahl , et al. August 23, 2 | 2005-08-23 |
Electronic component, in particular a component operating with surface acoustic waves Grant 6,528,924 - Stelzl , et al. March 4, 2 | 2003-03-04 |
Encapsulation for an electrical component and method for producing the same App 20030012884 - Pahl, Wolfgang ;   et al. | 2003-01-16 |
Component with drain for pyroelectrical voltages and a method for production thereof App 20020190605 - Pahl, Wolfgang ;   et al. | 2002-12-19 |
Method of producing a surface acoustic wave component Grant 6,449,828 - Pahl , et al. September 17, 2 | 2002-09-17 |
Method of producing a surface acoustic wave component App 20010010444 - Pahl, Wolfgang ;   et al. | 2001-08-02 |
Electrical component, in particular saw component operating with surface acoustic waves, and a method for its production Grant 6,242,842 - Pahl , et al. June 5, 2 | 2001-06-05 |
Method of producing an electronic component, in particular a surface acoustic wave component Grant 6,136,175 - Stelzl , et al. October 24, 2 | 2000-10-24 |
Method for the production of flip-chip mounting-ready contacts of electrical components Grant 6,057,222 - Pahl , et al. May 2, 2 | 2000-05-02 |
Encapsulation for electronic components and method for producing the encapsulation Grant 5,831,369 - Furbacher , et al. November 3, 1 | 1998-11-03 |