Patent | Date |
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Bandwidth-limited and long pulse master oscillator power oscillator laser systems Grant 8,265,117 - Govorkov , et al. September 11, 2 | 2012-09-11 |
Bandwidth-limited And Long Pulse Master Oscillator Power Oscillator Laser Systems App 20100309945 - GOVORKOV; Sergei V. ;   et al. | 2010-12-09 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems Grant 7,760,788 - Govorkov , et al. July 20, 2 | 2010-07-20 |
Bandwidth-limited And Long Pulse Master Oscillator Power Oscillator Laser Systems App 20080291962 - Govorkov; Sergei V. ;   et al. | 2008-11-27 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems Grant 7,418,022 - Govorkov , et al. August 26, 2 | 2008-08-26 |
Compact sealed-off excimer laser App 20080019411 - Niemoeller; Norbert ;   et al. | 2008-01-24 |
Excimer or molecular fluorine laser system with precision timing Grant 7,308,013 - Basting , et al. December 11, 2 | 2007-12-11 |
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime Grant 7,245,420 - Govorkov , et al. July 17, 2 | 2007-07-17 |
Master oscillator--power amplifier excimer laser system Grant 7,227,881 - Govorkov , et al. June 5, 2 | 2007-06-05 |
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime App 20070115535 - Govorkov; Sergei V. ;   et al. | 2007-05-24 |
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime Grant 7,184,204 - Govorkov , et al. February 27, 2 | 2007-02-27 |
Temperature control systems for excimer lasers Grant 7,164,703 - Paetzel January 16, 2 | 2007-01-16 |
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control Grant 7,158,553 - Govorkov , et al. January 2, 2 | 2007-01-02 |
Master oscillator - power amplifier excimer laser system App 20060171439 - Govorkov; Sergei V. ;   et al. | 2006-08-03 |
Excimer or molecular fluorine laser with several discharge chambers Grant 6,987,790 - Govorkov , et al. January 17, 2 | 2006-01-17 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems App 20060007978 - Govorkov; Sergei V. ;   et al. | 2006-01-12 |
Excimer laser system with stable beam output App 20050271110 - Paetzel, Rainer ;   et al. | 2005-12-08 |
Laser system sealing App 20050083984 - Bragin, Igor ;   et al. | 2005-04-21 |
System and method for segmented electrode with temporal voltage shifting App 20050058172 - Paetzel, Rainer ;   et al. | 2005-03-17 |
Excimer or molecular fluorine laser system with precision timing App 20050031004 - Basting, Dirk ;   et al. | 2005-02-10 |
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime App 20050002425 - Govorkov, Sergei V. ;   et al. | 2005-01-06 |
Master oscillator-power amplifier excimer laser system App 20040202220 - Hua, Gongxue ;   et al. | 2004-10-14 |
Excimer or molecular fluorine laser with several discharge chambers App 20040202219 - Govorkov, Sergei V. ;   et al. | 2004-10-14 |
Temperature control systems for excimer lasers App 20040202211 - Paetzel, Rainer | 2004-10-14 |
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control App 20040179571 - Govorkov, Sergei V. ;   et al. | 2004-09-16 |
Line narrowing of molecular fluorine laser emission Grant 6,763,048 - Govorkov , et al. July 13, 2 | 2004-07-13 |
Beam delivery system for lithographic exposure radiation source App 20030095580 - Govorkov, Sergei V. ;   et al. | 2003-05-22 |
Line narrowing of molecular fluorine laser emission App 20020006148 - Govorkov, Sergei ;   et al. | 2002-01-17 |