Patent | Date |
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Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride Grant 11,075,086 - Ozgur , et al. July 27, 2 | 2021-07-27 |
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride Grant 11,049,725 - Ozgur , et al. June 29, 2 | 2021-06-29 |
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices Grant 10,910,185 - Ozgur , et al. February 2, 2 | 2021-02-02 |
Method For The Fabrication Of Electron Field Emission Devices Including Carbon Nanotube Electron Field Emission Devices App 20190355538 - OZGUR; Mehmet ;   et al. | 2019-11-21 |
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices Grant 10,403,463 - Ozgur , et al. Sep | 2019-09-03 |
Method For The Fabrication Of Electron Field Emission Devices Including Carbon Nanotube Electron Field Emission Devices App 20180197711 - Ozgur; Mehmet ;   et al. | 2018-07-12 |
Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices Grant 9,852,870 - Ozgur , et al. December 26, 2 | 2017-12-26 |
Variable capacitor tuned using laser micromachining Grant 9,099,248 - Huff , et al. August 4, 2 | 2015-08-04 |
Variable capacitor tuned using laser micromachining Grant 9,019,686 - Huff , et al. April 28, 2 | 2015-04-28 |
Versatile communication system and method of implementation using heterogeneous integration Grant 8,983,414 - Ozgur , et al. March 17, 2 | 2015-03-17 |
Versatile Communication System And Method Of Implementation Using Heterogeneous Integration App 20130344819 - Ozgur; Mehmet ;   et al. | 2013-12-26 |
Variable Capacitor Tuned Using Laser Micromachining App 20130008875 - HUFF; Michael A. ;   et al. | 2013-01-10 |
Method For The Fabrication Of Electron Field Emission Devices Including Carbon Nanotube Field Electron Emisson Devices App 20120301981 - OZGUR; Mehmet ;   et al. | 2012-11-29 |
Variable capacitor tuned using laser micromachining App 20090002914 - Huff; Michael A. ;   et al. | 2009-01-01 |
Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure Grant 7,188,530 - Pedersen , et al. March 13, 2 | 2007-03-13 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 7,045,440 - Huff , et al. May 16, 2 | 2006-05-16 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure Grant 7,024,936 - Pedersen , et al. April 11, 2 | 2006-04-11 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure Grant 7,017,419 - Pedersen , et al. March 28, 2 | 2006-03-28 |
Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 7,012,327 - Huff , et al. March 14, 2 | 2006-03-14 |
Method of making an integrated electromechanical switch and tunable capacitor Grant 6,969,630 - Ozgur November 29, 2 | 2005-11-29 |
Method Of Fabricating Radio Frequency Microelectromechanical Systems (mems) Devices On Low-temperature Co-fired Ceramic (ltcc) Substrates App 20050167047 - Huff, Michael A. ;   et al. | 2005-08-04 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20050161753 - Huff, Michael A. ;   et al. | 2005-07-28 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20050103112 - Pedersen, Michael ;   et al. | 2005-05-19 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20050028601 - Pedersen, Michael ;   et al. | 2005-02-10 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20040262645 - Huff, Michael A. ;   et al. | 2004-12-30 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 6,815,739 - Huff , et al. November 9, 2 | 2004-11-09 |
Integrated electromechanical switch and tunable capacitor and method of making the same Grant 6,800,912 - Ozgur October 5, 2 | 2004-10-05 |
Method of making an integrated electromechanical switch and tunable capacitor App 20040097066 - Ozgur, Mehmet | 2004-05-20 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20040057589 - Pedersen, Michael ;   et al. | 2004-03-25 |
Closed cell metal composites Grant 6,709,739 - Mullen , et al. March 23, 2 | 2004-03-23 |
Method for making CMOS-based monolithic micro electromechanical system (MEMS) integrated circuits and integrated circuits made thereby App 20030104649 - Ozgur, Mehmet ;   et al. | 2003-06-05 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20030020173 - Huff, Michael A. ;   et al. | 2003-01-30 |
Integrated electromechanical switch and tunable capacitor and method of making the same App 20020171121 - Ozgur, Mehmet | 2002-11-21 |