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Patent applications and USPTO patent grants for Ozasa; Susumu.The latest application filed is for "scanning electron microscope and image forming method therewith".
Patent | Date |
---|---|
Scanning electron microscope and image forming method therewith Grant 5,523,567 - Kawamata , et al. June 4, 1 | 1996-06-04 |
Charged particle accelerator using quadrupole electrodes Grant 4,801,847 - Sakudo , et al. January 31, 1 | 1989-01-31 |
Electron beam lithography apparatus Grant 4,692,579 - Saitou , et al. September 8, 1 | 1987-09-08 |
Ion source Grant 4,658,143 - Tokiguchi , et al. April 14, 1 | 1987-04-14 |
Field emission type electron microscope using a multi-stage acceleration tube Grant 4,642,461 - Endo , et al. February 10, 1 | 1987-02-10 |
Position detecting system Grant 4,589,773 - Ido , et al. May 20, 1 | 1986-05-20 |
Apparatus for electron beam lithography Grant 4,577,111 - Saitou , et al. March 18, 1 | 1986-03-18 |
Method and apparatus of deflection calibration for a charged particle beam exposure apparatus Grant 4,443,703 - Shimazu , et al. April 17, 1 | 1984-04-17 |
Electron beam control system Grant 4,437,008 - Matsuda , et al. March 13, 1 | 1984-03-13 |
Electron lens equipment Grant 4,400,622 - Takeuchi , et al. August 23, 1 | 1983-08-23 |
Compound Electron Lens For Electron Microscope And The Like Grant 3,851,172 - Ozasa , et al. November 26, 1 | 1974-11-26 |
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