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Patent applications and USPTO patent grants for Oyama; Yasunao.The latest application filed is for "crystallization method and crystallization apparatus".
Patent | Date |
---|---|
Crystallization method and crystallization apparatus Grant 7,875,118 - Oyama , et al. January 25, 2 | 2011-01-25 |
Crystallization Method And Crystallization Apparatus App 20080134962 - OYAMA; Yasunao ;   et al. | 2008-06-12 |
Crystallization method and crystallization apparatus App 20050241569 - Oyama, Yasunao ;   et al. | 2005-11-03 |
Optical member for vacuum ultraviolet, and aligner and device manufacture method using same Grant 6,813,070 - Oyama November 2, 2 | 2004-11-02 |
Optical member for vacuum ultraviolet, and aligner and device manufacture method using same App 20010053017 - Oyama, Yasunao | 2001-12-20 |
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