Patent | Date |
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Method and apparatus for wafer electroless plating Grant 9,287,110 - Thie , et al. March 15, 2 | 2016-03-15 |
Controlled ambient system for interface engineering Grant 9,117,860 - Boyd , et al. August 25, 2 | 2015-08-25 |
Fluid handling system for wafer electroless plating and associated methods Grant 8,844,461 - Thie , et al. September 30, 2 | 2014-09-30 |
Method and Apparatus for Wafer Electroless Plating App 20130280917 - Thie; William ;   et al. | 2013-10-24 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids Grant 8,535,451 - de Larios , et al. September 17, 2 | 2013-09-17 |
Method and apparatus for wafer electroless plating Grant 8,485,120 - Thie , et al. July 16, 2 | 2013-07-16 |
Wafer electroless plating system and associated methods Grant 8,314,027 - Thie , et al. November 20, 2 | 2012-11-20 |
Wafer Electroless Plating System and Associated Methods App 20120045897 - Thie; William ;   et al. | 2012-02-23 |
Wafer electroless plating system and associated methods Grant 8,069,813 - Thie , et al. December 6, 2 | 2011-12-06 |
Apparatus for Applying a Plating Solution for Electroless Deposition App 20100239767 - Dordi; Yezdi ;   et al. | 2010-09-23 |
Substrate gripper with integrated electrical contacts Grant 7,780,825 - Owczarz , et al. August 24, 2 | 2010-08-24 |
Apparatus for applying a plating solution for electroless deposition Grant 7,752,996 - Dordi , et al. July 13, 2 | 2010-07-13 |
Apparatuses and methods for cleaning a substrate Grant 7,625,452 - de Larios , et al. December 1, 2 | 2009-12-01 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids Grant 7,568,490 - de Larios , et al. August 4, 2 | 2009-08-04 |
System, method and apparatus for in-situ substrate inspection Grant 7,542,134 - Owczarz , et al. June 2, 2 | 2009-06-02 |
Method and Apparatus for Cleaning Semiconductor Wafers Using Compressed and/or Pressurized Foams, Bubbles, and/or Liquids App 20090078282 - de Larios; John M. ;   et al. | 2009-03-26 |
Apparatuses And Methods For Cleaning A Substrate App 20090000044 - de Larios; John M. ;   et al. | 2009-01-01 |
Substrate Gripper With Integrated Electrical Contacts App 20080289967 - Owczarz; Aleksander ;   et al. | 2008-11-27 |
System, Method And Apparatus For In-situ Substrate Inspection App 20080273195 - Owczarz; Aleksander ;   et al. | 2008-11-06 |
Apparatuses and methods for cleaning a substrate Grant 7,441,299 - de Larios , et al. October 28, 2 | 2008-10-28 |
Method and Apparatus for Wafer Electroless Plating App 20080254225 - Thie; William ;   et al. | 2008-10-16 |
Fluid Handling System for Wafer Electroless Plating and Associated Methods App 20080251148 - Thie; William ;   et al. | 2008-10-16 |
Wafer Electroless Plating System and Associated Methods App 20080254621 - Thie; William ;   et al. | 2008-10-16 |
System, method and apparatus for in-situ substrate inspection Grant 7,397,555 - Owczarz , et al. July 8, 2 | 2008-07-08 |
Method and apparatus for real time metal film thickness measurement Grant 7,309,618 - Gotkis , et al. December 18, 2 | 2007-12-18 |
Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties Grant 7,205,166 - Gotkis , et al. April 17, 2 | 2007-04-17 |
Method and apparatus for cleaning a wafer bevel edge and notch using a pin and an abrasive film cassette Grant 7,179,154 - Boyd , et al. February 20, 2 | 2007-02-20 |
Semiconductor processing apparatus Grant 7,138,016 - Reardon , et al. November 21, 2 | 2006-11-21 |
Integration of sensor based metrology into semiconductor processing tools Grant 7,128,803 - Owczarz , et al. October 31, 2 | 2006-10-31 |
Process tape for cleaning or processing the edge of a semiconductor wafer Grant 7,115,023 - Owczarz October 3, 2 | 2006-10-03 |
Semiconductor processing apparatus Grant 7,094,291 - Reardon , et al. August 22, 2 | 2006-08-22 |
Enhancement of eddy current based measurement capabilities Grant 7,084,621 - Gotkis , et al. August 1, 2 | 2006-08-01 |
System, method and apparatus for in-situ substrate inspection App 20060139450 - Owczarz; Aleksander ;   et al. | 2006-06-29 |
Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system Grant 7,025,854 - Boyd , et al. April 11, 2 | 2006-04-11 |
Method and apparatus of arrayed sensors for metrological control Grant 6,951,624 - Gotkis , et al. October 4, 2 | 2005-10-04 |
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control Grant 6,937,915 - Kistler , et al. August 30, 2 | 2005-08-30 |
System and method for metal residue detection and mapping within a multi-step sequence Grant 6,929,531 - Gotkis , et al. August 16, 2 | 2005-08-16 |
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control Grant 6,925,348 - Kistler , et al. August 2, 2 | 2005-08-02 |
Complementary sensors metrological process and method and apparatus for implementing the same Grant 6,922,053 - Gotkis , et al. July 26, 2 | 2005-07-26 |
Apparatuses and methods for cleaning a substrate App 20050133061 - de Larios, John M. ;   et al. | 2005-06-23 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids App 20050133060 - Larios, John M. de ;   et al. | 2005-06-23 |
Method and apparatus for metrological process control implementing complementary sensors Grant 6,894,491 - Gotkis , et al. May 17, 2 | 2005-05-17 |
Integration of sensor based metrology into semiconductor processing tools App 20050072528 - Owczarz, Aleksander ;   et al. | 2005-04-07 |
Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring App 20050066739 - Gotkis, Yehiel ;   et al. | 2005-03-31 |
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control App 20050054268 - Kistler, Rodney ;   et al. | 2005-03-10 |
Complementary sensors metrological process and method and apparatus for implementing the same App 20050007107 - Gotkis, Yehiel ;   et al. | 2005-01-13 |
Method and apparatus of arrayed sensors for metrological control App 20050000653 - Gotkis, Yehiel ;   et al. | 2005-01-06 |
Method and apparatus of arrayed sensors for metrological control Grant 6,808,590 - Gotkis , et al. October 26, 2 | 2004-10-26 |
Apparatus for removal/remaining thickness profile manipulation Grant 6,808,442 - Wei , et al. October 26, 2 | 2004-10-26 |
Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties App 20040206455 - Gotkis, Yehiel ;   et al. | 2004-10-21 |
Chemical mechanical planarization (CMP) apparatus Grant 6,769,961 - Kistler , et al. August 3, 2 | 2004-08-03 |
Method And Apparatus For Metrological Process Control Implementing Complimentary Sensors App 20040119468 - Gotkis, Yehiel ;   et al. | 2004-06-24 |
Profiled retaining ring for chemical mechanical planarization Grant 6,716,299 - Gotkis , et al. April 6, 2 | 2004-04-06 |
System and method for metal residue detection and mapping within a multi-step sequence App 20040058620 - Gotkis, Yehiel ;   et al. | 2004-03-25 |
Enhancement of eddy current based measurement capabilities App 20040058545 - Gotkis, Yehiel ;   et al. | 2004-03-25 |
Method and apparatus for applying differential removal rates to a surface of a substrate App 20040011462 - Gotkis, Yehiel ;   et al. | 2004-01-22 |
Method and apparatus for real time metal film thickness measurement App 20040002171 - Gotkis, Yehiel ;   et al. | 2004-01-01 |
Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system App 20030201067 - Boyd, John M. ;   et al. | 2003-10-30 |
Motor drive assembly for a semiconductor wafer processing system App 20020195132 - Owczarz, Aleksander | 2002-12-26 |
Gas intake assembly for a wafer processing system Grant 6,105,592 - Thompson , et al. August 22, 2 | 2000-08-22 |
Semiconductor processor wafer holder Grant 5,431,421 - Thompson , et al. July 11, 1 | 1995-07-11 |
Semiconductor processor liquid spray system with additive blending Grant 5,409,310 - Owczarz April 25, 1 | 1995-04-25 |
Multi-station semiconductor processor with volatilization Grant 5,377,708 - Bergman , et al. January 3, 1 | 1995-01-03 |
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization Grant 5,235,995 - Bergman , et al. August 17, 1 | 1993-08-17 |
Robot loadable centrifugal semiconductor processor with extendible rotor Grant 5,232,328 - Owczarz , et al. August 3, 1 | 1993-08-03 |
Pneumatic bellows pump with supported bellows tube Grant 5,224,841 - Thompson , et al. July 6, 1 | 1993-07-06 |
Centrifugal wafer carrier cleaning apparatus Grant 5,224,503 - Thompson , et al. July 6, 1 | 1993-07-06 |
Single wafer processor with a frame Grant 5,222,310 - Thompson , et al. June 29, 1 | 1993-06-29 |
Semiconductor processor methods Grant 5,221,360 - Thompson , et al. June 22, 1 | 1993-06-22 |
Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers Grant 5,174,045 - Thompson , et al. December 29, 1 | 1992-12-29 |
Single wafer processor apparatus Grant 5,168,887 - Thompson , et al. December 8, 1 | 1992-12-08 |
Semiconductor processor draining Grant 5,154,199 - Thompson , et al. October 13, 1 | 1992-10-13 |
Semiconductor processor gas-liquid separation Grant 5,095,927 - Thompson , et al. March 17, 1 | 1992-03-17 |
Low contamination blending and metering systems for semiconductor processing Grant 5,085,560 - Thompson , et al. February 4, 1 | 1992-02-04 |
Rinser dryer system Grant 5,022,419 - Thompson , et al. June 11, 1 | 1991-06-11 |