Patent | Date |
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Method For Removing Resist Layer, Method Of Forming A Pattern And Method Of Manufacturing A Package App 20220229369 - Ouyang; Christine Y. | 2022-07-21 |
Ultraviolet Radiation Activated Atomic Layer Deposition App 20220199403 - OUYANG; Christine Y. ;   et al. | 2022-06-23 |
Method for removing photoresistor layer, method of forming a pattern and method of manufacturing a package Grant 11,307,500 - Ouyang April 19, 2 | 2022-04-19 |
Ultraviolet radiation activated atomic layer deposition Grant 11,211,244 - Ouyang , et al. December 28, 2 | 2021-12-28 |
Structure and formation method of semiconductor device with metal gate stack Grant 11,201,060 - Ouyang , et al. December 14, 2 | 2021-12-14 |
Selective deposition by laser heating for forming a semiconductor structure Grant 11,087,984 - Ouyang August 10, 2 | 2021-08-10 |
Ultraviolet Radiation Activated Atomic Layer Deposition App 20210225644 - OUYANG; Christine Y. ;   et al. | 2021-07-22 |
Extreme Ultraviolet Photolithography Method with Infiltration for Enhanced Sensitivity and Etch Resistance App 20210080832 - Ouyang; Christine Y | 2021-03-18 |
Etch selectivity improved by laser beam Grant 10,861,706 - Ouyang , et al. December 8, 2 | 2020-12-08 |
Extreme ultraviolet photolithography method with infiltration for enhanced sensitivity and etch resistance Grant 10,845,704 - Ouyang November 24, 2 | 2020-11-24 |
Structure And Formation Method Of Semiconductor Device With Metal Gate Stack App 20200335346 - OUYANG; Christine Y ;   et al. | 2020-10-22 |
Extreme Ultraviolet Photolithography Method with Infiltration for Enhanced Sensitivity and Etch Resistance App 20200133131 - Ouyang; Christine Y. | 2020-04-30 |
Etch Selectivity Improved By Laser Beam App 20200135483 - OUYANG; Christine Y. ;   et al. | 2020-04-30 |
Method For Forming Pattern And Manufacturing Method Of Package App 20200135496 - Ouyang; Christine Y | 2020-04-30 |
Method For Removing Photoresistor Layer, Method Of Forming A Pattern And Method Of Manufacturing A Package App 20200133132 - Ouyang; Christine Y | 2020-04-30 |
Selective Deposition By Laser Heating App 20200135465 - OUYANG; Christine Y | 2020-04-30 |
Apparatus for field guided acid profile control in a photoresist layer Grant 10,615,058 - Godet , et al. | 2020-04-07 |
Selective Deposition Process Utilizing Polymer Structure Deactivation Process App 20180366318 - OUYANG; Christine Y. ;   et al. | 2018-12-20 |
Selective deposition process utilizing polymer structure deactivation process Grant 10,157,740 - Ouyang , et al. Dec | 2018-12-18 |
Field guided post exposure bake application for photoresist microbridge defects Grant 10,048,589 - Godet , et al. August 14, 2 | 2018-08-14 |
Apparatus For Field Guided Acid Profile Control In A Photoresist Layer App 20180190518 - GODET; Ludovic ;   et al. | 2018-07-05 |
Methods And Apparatus For Selective Removal Of Self-assembled Monolayers Using Laser Annealing App 20180171476 - GODET; Ludovic ;   et al. | 2018-06-21 |
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake Grant 9,996,006 - Ouyang , et al. June 12, 2 | 2018-06-12 |
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake App 20180107117 - OUYANG; Christine Y. ;   et al. | 2018-04-19 |
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake Grant 9,927,709 - Ouyang , et al. March 27, 2 | 2018-03-27 |
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects App 20180046085 - GODET; Ludovic ;   et al. | 2018-02-15 |
Laser annealing and electric field Grant 9,864,276 - Ouyang , et al. January 9, 2 | 2018-01-09 |
Immersion field guided exposure and post-exposure bake process Grant 9,829,790 - Buchberger, Jr. , et al. November 28, 2 | 2017-11-28 |
Field guided post exposure bake application for photoresist microbridge defects Grant 9,823,570 - Godet , et al. November 21, 2 | 2017-11-21 |
Rtp Process For Directed Self-aligned Patterns App 20170221701 - HUNTER; Aaron Muir ;   et al. | 2017-08-03 |
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake App 20170184976 - OUYANG; Christine Y. ;   et al. | 2017-06-29 |
Immersion Field Guided Exposure And Post-exposure Bake Process App 20160357107 - BUCHBERGER, JR.; Douglas A. ;   et al. | 2016-12-08 |
Laser Annealing And Electric Field App 20160299435 - OUYANG; Christine Y. ;   et al. | 2016-10-13 |
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects App 20160291476 - GODET; Ludovic ;   et al. | 2016-10-06 |