OUTKA; Duane

Patent Applications and Registrations

Patent applications and USPTO patent grants for OUTKA; Duane.The latest application filed is for "chamber component cleanliness measurement system".

Company Profile

2.36.37

OUTKA; Duane - Fremont CA
Outka; Duane - Freemont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber Component Cleanliness Measurement System App 20220252548 - YASSERI; Amir A. ; et al.	2022-08-11
Method for conditioning a ceramic coating Grant 11,384,430 - Shih , et al. July 12, 2	2022-07-12
Method And Apparatus For Measuring Particles App 20210341377 - YASSERI; Amir A. ; et al.	2021-11-04
Method to selectively pattern a surface for plasma resistant coat applications Grant 11,124,659 - Yasseri , et al. September 21, 2	2021-09-21
Method For Conditioning A Ceramic Coating App 20210280393 - SHIH; Hong ; et al.	2021-09-09
Conditioning Chamber Component App 20210205858 - YASSERI; Amir A. ; et al.	2021-07-08
Conditioning chamber component Grant 10,967,407 - Yasseri , et al. April 6, 2	2021-04-06
Method To Selectively Pattern A Surface For Plasma Resistant Coat Applications App 20190233658 - YASSERI; Amir A. ; et al.	2019-08-01
Conditioning Chamber Component App 20180318890 - YASSERI; Amir A. ; et al.	2018-11-08
Method for treating a nonhomogenous surface Grant 9,766,063 - Yasseri , et al. September 19, 2	2017-09-19
Coating method for gas delivery system Grant 9,689,533 - Kenworthy , et al. June 27, 2	2017-06-27
Method For Treating A Nonhomogenous Surface App 20170074646 - Yasseri; Amir ; et al.	2017-03-16
Method of wet cleaning aluminum chamber parts Grant 9,387,521 - Shih , et al. July 12, 2	2016-07-12
Corrosion resistant aluminum coating on plasma chamber components Grant 9,337,002 - Daugherty , et al. May 10, 2	2016-05-10
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 9,120,201 - Avoyan , et al. September 1, 2	2015-09-01
Adapter Plate For Polishing And Cleaning Electrodes App 20150179416 - Zhou; Catherine ; et al.	2015-06-25
Coating Method For Gas Delivery System App 20140366968 - Kenworthy; Ian ; et al.	2014-12-18
Bare aluminum baffles for resist stripping chambers Grant 8,859,432 - Egley , et al. October 14, 2	2014-10-14
Coating method for gas delivery system Grant 8,852,685 - Kenworthy , et al. October 7, 2	2014-10-07
Corrosion Resistant Aluminum Coating On Plasma Chamber Components App 20140272459 - Daugherty; John ; et al.	2014-09-18
Method Of Wet Cleaning Aluminum Chamber Parts App 20140150819 - Shih; Hong ; et al.	2014-06-05
Tungsten Carbide Coated Metal Component Of A Plasma Reactor Chamber And Method Of Coating App 20140113453 - Shih; Hong ; et al.	2014-04-24
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20140030966 - Avoyan; Armen ; et al.	2014-01-30
Extending lifetime of yttrium oxide as a plasma chamber material Grant 8,585,844 - Shih , et al. November 19, 2	2013-11-19
Electrode carrier assemblies Grant 8,580,079 - La Croix , et al. November 12, 2	2013-11-12
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 8,550,880 - Avoyan , et al. October 8, 2	2013-10-08
Method of cleaning aluminum plasma chamber parts Grant 8,545,639 - Shih , et al. October 1, 2	2013-10-01
Electrode securing platens and electrode polishing assemblies incorporating the same Grant 8,444,456 - La Croix , et al. May 21, 2	2013-05-21
Method Of Cleaning Aluminum Plasma Chamber Parts App 20130104930 - Shih; Hong ; et al.	2013-05-02
Bare Aluminum Baffles For Resist Stripping Chambers App 20130056022 - Egley; Fred D. ; et al.	2013-03-07
Bare aluminum baffles for resist stripping chambers Grant 8,313,635 - Egley , et al. November 20, 2	2012-11-20
Peripherally engaging electrode carriers and assemblies incorporating the same Grant 8,276,604 - Augustino , et al. October 2, 2	2012-10-02
Electrode transporter and fixture sets incorporating the same Grant 8,276,898 - Avoyan , et al. October 2, 2	2012-10-02
Cleaning of bonded silicon electrodes Grant 8,221,552 - Outka , et al. July 17, 2	2012-07-17
Extending storage time of removed plasma chamber components prior to cleaning thereof Grant 8,216,388 - Shih , et al. July 10, 2	2012-07-10
Extending Lifetime Of Yttrium Oxide As A Plasma Chamber Material App 20120144640 - Shih; Hong ; et al.	2012-06-14
Backside mounted electrode carriers and assemblies incorporating the same Grant 8,171,877 - Augustino , et al. May 8, 2	2012-05-08
Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same App 20120108152 - La Croix; Cliff ; et al.	2012-05-03
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20120013242 - Augustino; Jason ; et al.	2012-01-19
Extending lifetime of yttrium oxide as a plasma chamber material Grant 8,097,105 - Shih , et al. January 17, 2	2012-01-17
Electrode Carrier Assemblies App 20110308732 - La Croix; Cliff ; et al.	2011-12-22
Processes for reconditioning multi-component electrodes Grant 8,075,701 - Avoyan , et al. December 13, 2	2011-12-13
Immersive oxidation and etching process for cleaning silicon electrodes Grant 8,075,703 - Avoyan , et al. December 13, 2	2011-12-13
Coating Method For Gas Delivery System App 20110259519 - Kenworthy; Ian ; et al.	2011-10-27
Extending Storage Time Of Removed Plasma Chamber Components Prior To Cleaning Thereof App 20110232678 - Shih; Hong ; et al.	2011-09-29
Extending storage time of removed plasma chamber components prior to cleaning thereof Grant 7,976,641 - Shih , et al. July 12, 2	2011-07-12
Methods For Wet Cleaning Quartz Surfaces Of Components For Plasma Processing Chambers App 20110146909 - Shih; Hong ; et al.	2011-06-23
Bare Aluminum Baffles For Resist Stripping Chambers App 20100319813 - Egley; Fred D. ; et al.	2010-12-23
Bare aluminum baffles for resist stripping chambers Grant 7,811,409 - Egley , et al. October 12, 2	2010-10-12
Cleaning fixtures and methods of cleaning electrode assembly plenums Grant 7,736,441 - Outka , et al. June 15, 2	2010-06-15
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20100144246 - Avoyan; Armen ; et al.	2010-06-10
Immersive Oxidation And Etching Process For Cleaning Silicon Electrodes App 20100139692 - Avoyan; Armen ; et al.	2010-06-10
Processes For Reconditioning Multi-component Electrodes App 20090325320 - Avoyan; Armen ; et al.	2009-12-31
Peripherally Engaging Electrode Carriers And Assemblies Incorporating The Same App 20090321018 - Augustino; Jason ; et al.	2009-12-31
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20090322199 - Augustino; Jason ; et al.	2009-12-31
Method for cleaning microwave applicator tube Grant 7,638,004 - Shih , et al. December 29, 2	2009-12-29
Electrode Transporter And Fixture Sets Incorporating The Same App 20090311079 - Avoyan; Armen ; et al.	2009-12-17
Cleaning Fixtures And Methods Of Cleaning Electrode Assembly Plenums App 20090090393 - Outka; Duane ; et al.	2009-04-09
Cleaning of bonded silicon electrodes App 20080236618 - Outka; Duane ; et al.	2008-10-02
Bare aluminum baffles for resist stripping chambers App 20080178906 - Egley; Fred D. ; et al.	2008-07-31
Extending lifetime of yttrium oxide as a plasma chamber material App 20080169588 - Shih; Hong ; et al.	2008-07-17
Bare aluminum baffles for resist stripping chambers App 20050284573 - Egley, Fred D. ; et al.	2005-12-29
Methods for wet cleaning quartz surfaces of components for plasma processing chambers App 20050274396 - Shih, Hong ; et al.	2005-12-15
Method of reducing aluminum fluoride deposits in plasma etch reactor Grant 6,770,214 - Outka , et al. August 3, 2	2004-08-03
Method of reducing aluminum fluoride deposits in plasma etch reactor App 20020179569 - Outka, Duane ; et al.	2002-12-05
Method of cleaning and conditioning plasma reaction chamber Grant 6,350,697 - Richardson , et al. February 26, 2	2002-02-26