Oude Nijhuis; Marco Hendrikus Hermanus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Oude Nijhuis; Marco Hendrikus Hermanus.The latest application filed is for "vibration isolation system and lithographic apparatus".
- Oude Nijhuis; Marco Hendrikus Hermanus - Eindhoven NL
| Patent | Date |
|---|---|
| Vibration isolation system and lithographic apparatus Grant 10,545,414 - Van Lankvelt , et al. Ja | 2020-01-28 |
| Vibration Isolation System And Lithographic Apparatus App 20180299783 - VAN LANKVELT; Alexander Petrus Josephus ; et al. | 2018-10-18 |
| Lithographic apparatus and device manufacturing method Grant 9,696,630 - Van Der Wijst , et al. July 4, 2 | 2017-07-04 |
| Lithographic apparatus with actuator to compensate acoustic vibration Grant 9,378,722 - Butler , et al. June 28, 2 | 2016-06-28 |
| Lithographic Apparatus and Device Manufacturing Method App 20160004170 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2016-01-07 |
| Lithographic apparatus and device manufacturing method Grant 9,134,632 - Van Der Wijst , et al. September 15, 2 | 2015-09-15 |
| Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method Grant 8,730,451 - Butler , et al. May 20, 2 | 2014-05-20 |
| Lithographic apparatus and device manufacturing method Grant 8,553,199 - Butler , et al. October 8, 2 | 2013-10-08 |
| Lithographic apparatus having acoustic resonator Grant 8,243,258 - Butler , et al. August 14, 2 | 2012-08-14 |
| Lithographic Apparatus and Device Manufacturing Method App 20120154774 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2012-06-21 |
| Lithographic Apparatus For Transferring Pattern From Patterning Device Onto Substrate, And Damping Method App 20120105819 - BUTLER; Hans ; et al. | 2012-05-03 |
| Lithographic Apparatus App 20090195763 - Butler; Hans ; et al. | 2009-08-06 |
| Lithographic Apparatus and Device Manufacturing Method App 20090147230 - Butler; Hans ; et al. | 2009-06-11 |
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