Patent | Date |
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X-ray Imaging Apparatus App 20150279497 - Den; Toru ;   et al. | 2015-10-01 |
X-ray imaging apparatus and wavefront measuring apparatus Grant 9,107,637 - Ouchi , et al. August 18, 2 | 2015-08-18 |
X-ray imaging apparatus Grant 9,066,704 - Den , et al. June 30, 2 | 2015-06-30 |
X-ray imaging apparatus Grant 9,063,055 - Ouchi June 23, 2 | 2015-06-23 |
X-ray imaging apparatus Grant 9,046,466 - Ouchi June 2, 2 | 2015-06-02 |
Absolute position measurement apparatus and method Grant 9,043,182 - Seo , et al. May 26, 2 | 2015-05-26 |
X-ray imaging apparatus Grant 8,995,613 - Ouchi March 31, 2 | 2015-03-31 |
X-ray Talbot Interferometer And X-ray Talbot Imaging System App 20140270060 - Date; Takashi ;   et al. | 2014-09-18 |
Imaging apparatus and imaging method Grant 8,559,594 - Ouchi , et al. October 15, 2 | 2013-10-15 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Grant 8,537,966 - Ouchi , et al. September 17, 2 | 2013-09-17 |
Talbot interferometer, its adjustment method, and measurement method Grant 8,520,217 - Naoi , et al. August 27, 2 | 2013-08-27 |
X-ray Imaging Apparatus, X-ray Imaging Method, And X-ray Imaging Program App 20130070893 - Ouchi; Chidane ;   et al. | 2013-03-21 |
X-ray Imaging Apparatus App 20130070895 - Ouchi; Chidane | 2013-03-21 |
X-ray Imaging Apparatus App 20130034209 - Ouchi; Chidane | 2013-02-07 |
Wavefront-aberration-measuring device and exposure apparatus Grant 8,351,050 - Ouchi January 8, 2 | 2013-01-08 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Grant 8,340,243 - Ouchi , et al. December 25, 2 | 2012-12-25 |
X-ray Imaging Apparatus And Wavefront Measuring Apparatus App 20120281217 - Ouchi; Chidane ;   et al. | 2012-11-08 |
X-ray Imaging Apparatus App 20120263274 - Ouchi; Chidane | 2012-10-18 |
X-ray Imaging Apparatus App 20120236988 - Den; Toru ;   et al. | 2012-09-20 |
Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method Grant 8,077,391 - Ouchi , et al. December 13, 2 | 2011-12-13 |
X-ray Imaging Apparatus, X-ray Imaging Method, And X-ray Imaging Program App 20110280368 - Ouchi; Chidane ;   et al. | 2011-11-17 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Grant 8,009,797 - Ouchi , et al. August 30, 2 | 2011-08-30 |
Measuring apparatus, exposure apparatus and method, and device manufacturing method Grant 8,004,691 - Ouchi , et al. August 23, 2 | 2011-08-23 |
Imaging Apparatus And Imaging Method App 20110200168 - Ouchi; Chidane ;   et al. | 2011-08-18 |
Measurement apparatus, exposure apparatus having the same, and device manufacturing method Grant 7,952,726 - Kato , et al. May 31, 2 | 2011-05-31 |
X-ray Imaging Apparatus, X-ray Imaging Method, And X-ray Imaging Program App 20100290590 - Ouchi; Chidane ;   et al. | 2010-11-18 |
Talbot Interferometer, Its Adjustment Method, And Measurement Method App 20100271636 - Naoi; Toshiyuki ;   et al. | 2010-10-28 |
Absolute Position Measurement Apparatus And Method App 20100235137 - Seo; Yuzo ;   et al. | 2010-09-16 |
Measurement Apparatus, Exposure Apparatus Having The Same, And Device Manufacturing Method App 20100190115 - Kato; Seima ;   et al. | 2010-07-29 |
Wavefront-aberration-measuring Device And Exposure Apparatus App 20100177323 - Ouchi; Chidane | 2010-07-15 |
Measuring Apparatus, Exposure Apparatus And Method, And Device Manufacturing Method App 20090290136 - Ouchi; Chidane ;   et al. | 2009-11-26 |
Exposure Apparatus And Device Manufacturing Method App 20090268188 - Kato; Seima ;   et al. | 2009-10-29 |
Wavefront Aberration Measuring Method, Mask, Wavefront Aberration Measuring Device, Exposure Apparatus, And Device Manufacturing Method App 20090213389 - Ouchi; Chidane ;   et al. | 2009-08-27 |
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method Grant 7,253,907 - Ouchi August 7, 2 | 2007-08-07 |
Measuring device and measuring method Grant 7,106,452 - Ouchi September 12, 2 | 2006-09-12 |
Interference system and semiconductor exposure apparatus having the same Grant 6,961,132 - Ouchi November 1, 2 | 2005-11-01 |
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method App 20050117168 - Ouchi, Chidane | 2005-06-02 |
Projection exposure apparatus and device manufacturing method that change a resonator length of a continuous emission excimer laser Grant 6,853,442 - Ouchi February 8, 2 | 2005-02-08 |
Exposure apparatus and device manufacturing method using the same Grant 6,774,982 - Ouchi August 10, 2 | 2004-08-10 |
Interference system and semiconductor exposure apparatus having the same App 20040085548 - Ouchi, Chidane | 2004-05-06 |
Surface shape measuring apparatus and method Grant 6,721,056 - Nakauchi , et al. April 13, 2 | 2004-04-13 |
Interference system and semiconductor exposure apparatus having the same Grant 6,661,522 - Ouchi December 9, 2 | 2003-12-09 |
Projection exposure apparatus and device manufacturing method using the same App 20020131030 - Ouchi, Chidane | 2002-09-19 |
Exposure apparatus and device manufacturing method using the same App 20020101892 - Ouchi, Chidane | 2002-08-01 |
Measuring device and measuring method App 20020024673 - Ouchi, Chidane | 2002-02-28 |
Interference system and semiconductor exposure apparatus having the same App 20020024005 - Ouchi, Chidane | 2002-02-28 |
Exposure Apparatus And Device Manufacturing Method Using The Same App 20010046088 - SANO, NAOTO ;   et al. | 2001-11-29 |