| Patent | Date |
|---|
Titania-doped quartz glass and making method
Grant 10,114,280 - Maida , et al. October 30, 2 | 2018-10-30 |
Titania-doped quartz glass and making method
Grant 9,746,773 - Maida , et al. August 29, 2 | 2017-08-29 |
Titania-doped quartz glass and making method
Grant 9,612,525 - Maida , et al. April 4, 2 | 2017-04-04 |
Titania-doped Quartz Glass And Making Method
App 20170038672 - Maida; Shigeru ; et al. | 2017-02-09 |
Titania-doped Quartz Glass And Making Method
App 20160306271 - Maida; Shigeru ; et al. | 2016-10-20 |
Titania-doped quartz glass and making method
Grant 9,346,700 - Maida , et al. May 24, 2 | 2016-05-24 |
Titania doped quartz glass and making method
Grant 9,296,636 - Maida , et al. March 29, 2 | 2016-03-29 |
EUV lithography member, making method, and titania-doped quartz glass
Grant 9,278,881 - Maida , et al. March 8, 2 | 2016-03-08 |
Method of producing synthetic quartz glass for excimer laser
Grant 9,067,814 - Maida , et al. June 30, 2 | 2015-06-30 |
Nanoimprint mold-forming synthetic quartz glass and making method
Grant 9,056,785 - Maida , et al. June 16, 2 | 2015-06-16 |
Titania-doped quartz glass and making method
Grant 8,820,122 - Maida , et al. September 2, 2 | 2014-09-02 |
Euv Lithography Member, Making Method, And Titania-doped Quartz Glass
App 20140206524 - Maida; Shigeru ; et al. | 2014-07-24 |
Burner and method for the manufacture of synthetic quartz glass
Grant 8,650,912 - Otsuka , et al. February 18, 2 | 2014-02-18 |
Nanoimprint Mold-forming Synthetic Quartz Glass And Making Method
App 20140018229 - Maida; Shigeru ; et al. | 2014-01-16 |
Titania and sulfur co-doped quartz glass member and making method
Grant 8,629,071 - Maida , et al. January 14, 2 | 2014-01-14 |
Manufacture of synthetic quartz glass ingot and synthetic quartz glass member
Grant 8,596,095 - Otsuka , et al. December 3, 2 | 2013-12-03 |
Titania-doped Quartz Glass And Making Method
App 20130283858 - Maida; Shigeru ; et al. | 2013-10-31 |
Titania and sulfur co-doped quartz glass member and making method
Grant 8,539,797 - Maida , et al. September 24, 2 | 2013-09-24 |
Titania And Sulfur Co-doped Quartz Glass Member And Making Method
App 20130149637 - MAIDA; Shigeru ; et al. | 2013-06-13 |
Titania-doped Quartz Glass And Making Method
App 20130045439 - Maida; Shigeru ; et al. | 2013-02-21 |
Titania-doped quartz glass member and making method
Grant 8,377,612 - Maida , et al. February 19, 2 | 2013-02-19 |
Titania-doped Quartz Glass And Making Method
App 20120258389 - Maida; Shigeru ; et al. | 2012-10-11 |
Titania-doped Quartz Glass Member And Making Method
App 20120104336 - MAIDA; Shigeru ; et al. | 2012-05-03 |
Titania-doped Quartz Glass And Making Method
App 20120058419 - Maida; Shigeru ; et al. | 2012-03-08 |
Titania-doped quartz glass member and making method
Grant 8,105,734 - Maida , et al. January 31, 2 | 2012-01-31 |
Burner And Method For The Manufacture Of Synthetic Quartz Glass
App 20110203318 - Otsuka; Hisatoshi ; et al. | 2011-08-25 |
Titania-doped Quartz Glass And Making Method
App 20110159413 - Maida; Shigeru ; et al. | 2011-06-30 |
Synthetic quartz glass substrate for excimer lasers and making method
Grant 7,954,340 - Otsuka , et al. June 7, 2 | 2011-06-07 |
Titania And Sulfur Co-doped Quartz Glass Member And Making Method
App 20110117480 - Maida; Shigeru ; et al. | 2011-05-19 |
Titania-doped quartz glass for nanoimprint molds
Grant 7,935,648 - Maida , et al. May 3, 2 | 2011-05-03 |
Titania-doped quartz glass for nanoimprint molds
Grant 7,923,394 - Maida , et al. April 12, 2 | 2011-04-12 |
Synthetic quartz glass substrate for excimer lasers and making method
Grant 7,827,824 - Otsuka , et al. November 9, 2 | 2010-11-09 |
Method Of Producing Synthetic Quartz Glass For Excimer Laser
App 20100180634 - Maida; Shigeru ; et al. | 2010-07-22 |
Titania-doped Quartz Glass Member And Making Method
App 20100003609 - Maida; Shigeru ; et al. | 2010-01-07 |
Synthetic Quartz Glass Substrate For Excimer Lasers And Making Method
App 20090188281 - Otsuka; Hisatoshi ; et al. | 2009-07-30 |
Titania-doped Quartz Glass For Nanoimprint Molds
App 20080305941 - MAIDA; Shigeru ; et al. | 2008-12-11 |
Titania-doped Quartz Glass For Nanoimprint Molds
App 20080305940 - MAIDA; Shigeru ; et al. | 2008-12-11 |
Burner for the Manufacture of Synthetic Quartz Glass
App 20080141717 - SHIROTA; Kazuo ; et al. | 2008-06-19 |
Synthetic quartz glass substrate for excimer lasers and making method
App 20080119346 - Otsuka; Hisatoshi ; et al. | 2008-05-22 |
Manufacture of synthetic quartz glass ingot and synthetic quartz glass member
App 20080115533 - Otsuka; Hisatoshi ; et al. | 2008-05-22 |
Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof
Grant 7,232,778 - Otsuka , et al. June 19, 2 | 2007-06-19 |
Synthetic quartz glass substrate for excimer lasers and making method
App 20070049482 - Otsuka; Hisatoshi ; et al. | 2007-03-01 |
Method of producing synthetic quartz glass
Grant 7,159,418 - Matsuo , et al. January 9, 2 | 2007-01-09 |
Method of producing fluorine-containing synthetic quartz glass
Grant 6,990,836 - Maida , et al. January 31, 2 | 2006-01-31 |
Burner and method for the manufacture of synthetic quartz glass
App 20050132749 - Otsuka, Hisatoshi ; et al. | 2005-06-23 |
Burner for the manufacture of synthetic quartz glass
App 20040187526 - Shirota, Kazuo ; et al. | 2004-09-30 |
Synthetic quartz glass blank
Grant 6,761,951 - Otsuka , et al. July 13, 2 | 2004-07-13 |
Synthetic quartz glass and production process
Grant 6,705,115 - Matsuo , et al. March 16, 2 | 2004-03-16 |
Synthetic quartz glass blank
App 20030138587 - Otsuka, Hisatoshi ; et al. | 2003-07-24 |
Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof
App 20030126889 - Otsuka, Hisatoshi ; et al. | 2003-07-10 |
Synthetic quartz glass substrate for photomask and making method
Grant 6,413,682 - Shibano , et al. July 2, 2 | 2002-07-02 |
Synthetic qurtz glass and method of production
App 20020038557 - Matsuo, Koji ; et al. | 2002-04-04 |
Synthetic quartz glass and production process
App 20010018834 - Matsuo, Koji ; et al. | 2001-09-06 |
Fluorine-containing synthetic quartz glass and method of production
App 20010017042 - Maida, Shigeru ; et al. | 2001-08-30 |
| 