OTA; Takumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for OTA; Takumi.The latest application filed is for "tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus".

Company Profile

0.24.34

OTA; Takumi - Tokyo JP
Ota; Takumi - Kanagawa JP
OTA; Takumi - Yokohama Kanagawa JP
Ota; Takumi - Kanagawa-ken JP
OTA; Takumi - Yokohama-shi JP
Ota; Takumi - Yokohama JP
Ota; Takumi - Kawasaki JP
Ota; Takumi - Tottori JP
Ota; Takumi - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Tolerance Error Estimating Apparatus, Method, Program, Reconstruction Apparatus And Control Apparatus App 20220307994 - OTA; Takumi	2022-09-29
Center Shift Amount Estimating Apparatus, Method, And Program App 20220198724 - Ota; Takumi	2022-06-23
Drop recipe creating method, database creating method and medium Grant RE46,901 - Matsuoka , et al. June 19, 2	2018-06-19
Imprint Apparatus, Imprint Method, And Pattern Forming Method App 20170229300 - OTA; Takumi ; et al.	2017-08-10
Pattern forming device and semiconductor device manufacturing method Grant 9,437,414 - Ota September 6, 2	2016-09-06
Imprinting apparatus, imprinting method, and manufacturing method of uneven plate Grant 9,216,539 - Ota December 22, 2	2015-12-22
Template treatment method Grant 9,108,343 - Ota August 18, 2	2015-08-18
Mold Cleaning Apparatus And Mold Cleaning Method App 20150054188 - OTA; Takumi ; et al.	2015-02-26
Imprint method, imprinting equipment, and method for manufacturing semiconductor device Grant 8,906,281 - Hatano , et al. December 9, 2	2014-12-09
Imprinting Apparatus, Imprinting Method, And Manufacturing Method Of Uneven Plate App 20140353863 - Ota; Takumi	2014-12-04
Imprinting apparatus, imprinting method, and manufacturing method of uneven plate Grant 8,826,847 - Ota September 9, 2	2014-09-09
Mold Cleaning Apparatus And Mold Cleaning Method App 20140070437 - OTA; Takumi	2014-03-13
Drop recipe creating method, database creating method and medium Grant 8,560,977 - Matsuoka , et al. October 15, 2	2013-10-15
Pattern Forming Device And Semiconductor Device Manufacturing Method App 20130221571 - OTA; Takumi	2013-08-29
Template Treatment Method App 20130127084 - OTA; Takumi	2013-05-23
Method And Apparatus For Charged Particle Beam Inspection App 20130119251 - Hatakeyama; Masahiro ; et al.	2013-05-16
Template Cleaning Apparatus And Template Cleaning Method App 20130064415 - OTA; Takumi	2013-03-14
Method and apparatus for charged particle beam inspection Grant 8,368,018 - Hatakeyama , et al. February 5, 2	2013-02-05
Imprint Method, Imprinting Equipment, And Method For Manufacturing Semiconductor Device App 20120244719 - HATANO; Masayuki ; et al.	2012-09-27
Template Substrate Processing Apparatus And Template Substrate Processing Method App 20120222700 - OTA; Takumi	2012-09-06
Imprinting Apparatus, Imprinting Method, And Manufacturing Method Of Uneven Plate App 20120207931 - OTA; Takumi	2012-08-16
Patterning method Grant 8,221,827 - Tokue , et al. July 17, 2	2012-07-17
Imprinting Method, Imprinting Apparatus And Medium App 20120129279 - MATSUOKA; Yasuo ; et al.	2012-05-24
Drop Recipe Creating Method, Database Creating Method And Medium App 20120131056 - Matsuoka; Yasuo ; et al.	2012-05-24
Method for forming an imprint pattern Grant 8,142,694 - Tokue , et al. March 27, 2	2012-03-27
Imprint Template And Pattern Forming Method App 20120013042 - OTA; Takumi	2012-01-19
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program Grant 7,985,958 - Nakasugi , et al. July 26, 2	2011-07-26
Pattern Generating Method And Process Determining Method App 20110143271 - KOSHIBA; Takeshi ; et al.	2011-06-16
Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program Grant 7,889,910 - Nakasugi , et al. February 15, 2	2011-02-15
Method For Forming An Imprint Pattern App 20100301508 - TOKUE; Hiroshi ; et al.	2010-12-02
Pattern Formation Method And Computer Program Product App 20100124601 - OTA; Takumi ; et al.	2010-05-20
Patterning Method App 20100072647 - TOKUE; Hiroshi ; et al.	2010-03-25
Method For Forming Pattern, And Template App 20100022036 - YONEDA; Ikuo ; et al.	2010-01-28
Method And Apparatus For Charged Particle Beam Inspection App 20100019147 - Hatakeyama; Masahiro ; et al.	2010-01-28
Template And Pattern Forming Method App 20090315223 - Yoneda; Ikuo ; et al.	2009-12-24
Charged-beam Exposure Apparatus Having An Improved Alignment Precision And Exposure Method App 20090206280 - KOSHIBA; Takeshi ; et al.	2009-08-20
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device Grant 7,482,604 - Nakasugi , et al. January 27, 2	2009-01-27
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device Grant 7,459,705 - Nakasugi , et al. December 2, 2	2008-12-02
System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor device Grant 7,435,978 - Nakasugi , et al. October 14, 2	2008-10-14
Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program App 20070263921 - Nakasugi; Tetsuro ; et al.	2007-11-15
Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device Grant 7,242,014 - Ota , et al. July 10, 2	2007-07-10
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device App 20070114463 - Nakasugi; Tetsuro ; et al.	2007-05-24
Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device Grant 7,202,488 - Ota , et al. April 10, 2	2007-04-10
Optical disk vibration sensing and reproducing device Grant RE39,491 - Ota , et al. February 20, 2	2007-02-20
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device App 20060289805 - Nakasugi; Tetsuro ; et al.	2006-12-28
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program App 20060151721 - Nakasugi; Tetsuro ; et al.	2006-07-13
System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor device App 20060076508 - Nakasugi; Tetsuro ; et al.	2006-04-13
Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device App 20060017013 - Ota; Takumi ; et al.	2006-01-26
Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device App 20050088099 - Ota, Takumi ; et al.	2005-04-28

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