Ota; Kazuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ota; Kazuya.The latest application filed is for "composition, cured product, color filter, method for producing color filter, solid-state imaging element, image display device, and compound".

Company Profile

5.49.26

Ota; Kazuya - Shizuoka JP
OTA; Kazuya - Haibara-gun JP
Ota; Kazuya - Tokyo JP
Ota; Kazuya - Hyogo JP
Ota; Kazuya - Ota-ku JP
Ota; Kazuya - Chiyoda-ku JP
OTA, KAZUYA - OHTA-KU JP
Ota; Kazuya - Setagaya-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Composition, Cured Product, Color Filter, Method For Producing Color Filter, Solid-state Imaging Element, Image Display Device, And Compound App 20200392343 - Mizuno; Akio ; et al.	2020-12-17
Curable Composition, Cured Product, Color Filter, Method For Producing Color Filter, Solid Imaging Element, And Image Display Device App 20200369810 - ITO; Junichi ; et al.	2020-11-26
Composition, Film, Color Filter, Solid-state Imaging Element, Image Display Device, And Method For Producing Compound App 20200299463 - FUKAMI; Yutaro ; et al.	2020-09-24
Coloring Composition, Method For Producing Film, Method For Producing Color Filter, Method For Producing Solid-state Imaging Ele App 20200263037 - TAKISHITA; Hirotaka ; et al.	2020-08-20
Coloring Composition, Film, Color Filter, Solid-state Imaging Element, And Image Display Device App 20200207990 - NAKAMURA; Shoichi ; et al.	2020-07-02
Curable Composition, Cured Product, Color Filter, Method For Producing Color Filter, Solid-state Imaging Element, And Image Disp App 20200142302 - ITO; Junichi ; et al.	2020-05-07
Mask protection device, exposure apparatus, and method for manufacturing device Grant 10,234,766 - Ota	2019-03-19
Particle detection method, particle detection device and particle detection system Grant 10,113,948 - Ichiki , et al. October 30, 2	2018-10-30
Mask Protection Device, Exposure Apparatus, And Method For Manufacturing Device App 20170285484 - OTA; Kazuya	2017-10-05
Particle Detection Method, Particle Detection Device And Particle Detection System App 20170219477 - ICHIKI; Takanori ; et al.	2017-08-03
Mask protection device, exposure apparatus, and method for manufacturing device Grant 9,715,175 - Ota July 25, 2	2017-07-25
Plasma Etching Device App 20150170883 - Yamamoto; Takashi ; et al.	2015-06-18
Mask Protection Device, Exposure Apparatus, And Method For Manufacturing Device App 20150131069 - Ota; Kazuya	2015-05-14
Photocatalyst composition Grant 7,211,543 - Nakabayashi , et al. May 1, 2	2007-05-01
Exposure apparatus and method Grant 7,177,008 - Nishi , et al. February 13, 2	2007-02-13
Photocatalyst composition App 20050227859 - Nakabayashi, Akira ; et al.	2005-10-13
Exposure apparatus and method App 20040233407 - Nishi, Kenji ; et al.	2004-11-25
Exposure method and apparatus, method of making exposure apparatus, device and device manufacturing method Grant 6,813,002 - Ota November 2, 2	2004-11-02
Exposure apparatus and an exposure method Grant 6,798,491 - Nishi , et al. September 28, 2	2004-09-28
Apparatus and method for pattern exposure and method for adjusting the apparatus Grant 6,727,980 - Ota , et al. April 27, 2	2004-04-27
Reduced-stress, electrostatically chuckable reticles for use in extreme ultraviolet and soft X-ray microlithography apparatus and methods App 20040067420 - Ota, Kazuya	2004-04-08
Devices and methods for cooling optical elements in optical systems, including optical systems used in vacuum environments App 20040051984 - Oshino, Tetsuya ; et al.	2004-03-18
Method and apparatus for exposure, and device manufacturing method Grant 6,699,630 - Ota March 2, 2	2004-03-02
Exposure Apparatus And An Exposure Method App 20040032575 - Nishi, Kenji ; et al.	2004-02-19
Exposure method and exposure apparatus Grant 6,645,701 - Ota , et al. November 11, 2	2003-11-11
Micro devices manufacturing method utilizing concave and convex alignment mark patterns Grant 6,641,962 - Mizutani , et al. November 4, 2	2003-11-04
Exposure method and apparatus, method of making exposure apparatus, device and device manufacturing method App 20030169411 - Ota, Kazuya	2003-09-11
Micro Devices Manufacturing Method Utilizing Concave And Convex Alignment Mark Patterns App 20030157416 - Mizutani, Shinji ; et al.	2003-08-21
Exposure apparatus and method Grant 6,590,634 - Nishi , et al. July 8, 2	2003-07-08
Exposure apparatus and an exposure method Grant 6,549,269 - Nishi , et al. April 15, 2	2003-04-15
Exposure apparatus, exposure method and method for manufacturing devices Grant 6,549,270 - Ota April 15, 2	2003-04-15
Exposure method and exposure apparatus Grant 6,483,569 - Ota November 19, 2	2002-11-19
Method and apparatus for exposure, and device manufacturing method App 20020146628 - Ota, Kazuya	2002-10-10
Exposure method for a projection optical system Grant 6,406,820 - Ota June 18, 2	2002-06-18
Exposure method and apparatus, method of making exposure apparatus, device and device manufacturing method App 20020070355 - Ota, Kazuya	2002-06-13
Projection exposure apparatus and method Grant 6,400,441 - Nishi , et al. June 4, 2	2002-06-04
Projection exposure system Grant 6,388,735 - Ota May 14, 2	2002-05-14
Apparatus and method for pattern exposure and method for adjusting the apparatus App 20020041368 - Ota, Kazuya ; et al.	2002-04-11
Exposure apparatus, method for producing the same, and exposure method Grant 6,359,678 - Ota March 19, 2	2002-03-19
Exposure Apparatus And Method App 20020017616 - OTA, KAZUYA	2002-02-14
Exposure apparatus and method Grant 6,341,007 - Nishi , et al. January 22, 2	2002-01-22
Micro devices manufacturing method and apparatus therefor App 20020001761 - Mizutani, Shinji ; et al.	2002-01-03
Position transducer and exposure apparatus with same App 20010046037 - Ota, Kazuya ; et al.	2001-11-29
Exposure method and exposure apparatus App 20010043314 - Ota, Kazuya	2001-11-22
Position transducer and exposure apparatus with same App 20010026357 - Ota, Kazuya ; et al.	2001-10-04
Projection exposure system Grant 6,249,336 - Ota June 19, 2	2001-06-19
Projection exposure system Grant 6,236,448 - Ota May 22, 2	2001-05-22
Exposure method utilizing pre-exposure reduction of substrate temperature Grant 6,228,544 - Ota May 8, 2	2001-05-08
Alignment apparatus in projection exposure apparatus Grant 6,153,886 - Hagiwara , et al. November 28, 2	2000-11-28
Micro devices manufacturing method and apparatus therefor Grant 6,110,021 - Ota , et al. August 29, 2	2000-08-29
Exposure apparatus and positioning method Grant 6,097,473 - Ota , et al. August 1, 2	2000-08-01
Exposure condition measurement method Grant 6,057,908 - Ota May 2, 2	2000-05-02
Projection exposure system Grant 6,018,384 - Ota January 25, 2	2000-01-25
Alignment in a projection exposure method Grant 5,981,116 - Ota November 9, 1	1999-11-09
Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage Grant 5,978,071 - Miyajima , et al. November 2, 1	1999-11-02
Projection exposure apparatus with function to measure imaging characteristics of projection optical system Grant 5,914,774 - Ota June 22, 1	1999-06-22
Alignment method and apparatus Grant 5,721,607 - Ota February 24, 1	1998-02-24
Projection exposure method Grant 5,715,063 - Ota February 3, 1	1998-02-03
Alignment apparatus Grant 5,689,339 - Ota , et al. November 18, 1	1997-11-18
Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening Grant 5,601,957 - Mizutani , et al. February 11, 1	1997-02-11
Method for aligning shot areas on a substrate Grant 5,561,606 - Ota , et al. October 1, 1	1996-10-01
Double-beam light source apparatus, position detecting apparatus and aligning apparatus Grant 5,530,257 - Mizutani , et al. June 25, 1	1996-06-25
Projection scanning exposure apparatus with synchronous mask/wafer alignment system Grant 5,506,684 - Ota , et al. April 9, 1	1996-04-09
Position detecting apparatus Grant 5,489,986 - Magome , et al. February 6, 1	1996-02-06
Double-beam light source apparatus, position detecting apparatus and aligning apparatus Grant 5,488,230 - Mizutani , et al. January 30, 1	1996-01-30
Alignment apparatus Grant 5,477,309 - Ota , et al. December 19, 1	1995-12-19
Method of detecting a position and apparatus therefor Grant 5,416,562 - Ota , et al. May 16, 1	1995-05-16
Substrate aligning device using interference light generated by two beams irradiating diffraction grating Grant 5,347,356 - Ota , et al. September 13, 1	1994-09-13
Adjustable beam and interference fringe position Grant 5,171,999 - Komatsu , et al. December 15, 1	1992-12-15
Diffraction-type displacement detector for alignment of mask and wafer Grant 5,160,849 - Ota , et al. November 3, 1	1992-11-03
Method of determining regularity of a pattern array to enable positioning of patterns thereof relative to a reference position Grant 5,153,678 - Ota October 6, 1	1992-10-06
Substrate alignment apparatus using diffracted and reflected radiation beams Grant 5,118,953 - Ota , et al. June 2, 1	1992-06-02
Position detection apparatus with adjustable beam and interference fringe positions Grant 5,070,250 - Komatsu , et al. December 3, 1	1991-12-03

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