Ota; Hirohisa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ota; Hirohisa.The latest application filed is for "transport system and processing system".
- Ota; Hirohisa - Kawagoe-shi JP
- Ota; Hirohisa - Kawagoe JP
- - Kawagoe JP
- Ota; Hirohisa - Saitama-ken JP
- Ota; Hirohisa - Saitama JP
- Ota, Hirohisa - Kawaqoe-shi JP
- Ota, Hirohisa - Kawagoe-shi Saitama-Ken JP
| Patent | Date |
|---|---|
| Transport System And Processing System App 20210184555 - Ota; Hirohisa ; et al. | 2021-06-17 |
| Transport system, processing system and manufacturing method of article Grant 10,965,201 - Ota , et al. March 30, 2 | 2021-03-30 |
| Transport System And Processing System App 20190097515 - Ota; Hirohisa ; et al. | 2019-03-28 |
| Imprinting machine and device manufacturing method Grant 8,834,144 - Nakamura , et al. September 16, 2 | 2014-09-16 |
| Pattern Transferring Apparatus And Pattern Transferring Method App 20140151936 - KASUMI; Kazuyuki ; et al. | 2014-06-05 |
| Pattern transferring apparatus and pattern transferring method Grant 8,616,874 - Kasumi , et al. December 31, 2 | 2013-12-31 |
| Pattern transferring apparatus and pattern transferring method Grant 08616874 - | 2013-12-31 |
| Processing apparatus Grant 8,393,885 - Kasumi , et al. March 12, 2 | 2013-03-12 |
| Processing apparatus and method Grant 7,846,346 - Kawakami , et al. December 7, 2 | 2010-12-07 |
| Processing Apparatus And Method App 20100289190 - Kawakami; Eigo ; et al. | 2010-11-18 |
| Processing apparatus Grant 7,815,425 - Tokita , et al. October 19, 2 | 2010-10-19 |
| Imprinting machine and device manufacturing method Grant 7,815,424 - Nakamura , et al. October 19, 2 | 2010-10-19 |
| Processing method Grant 7,807,065 - Tokita , et al. October 5, 2 | 2010-10-05 |
| Processing apparatus and method Grant 7,789,647 - Kawakami , et al. September 7, 2 | 2010-09-07 |
| Imprinting Machine And Device Manufacturing Method App 20100148397 - NAKAMURA; Takashi ; et al. | 2010-06-17 |
| Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same Grant 7,690,912 - Tokita , et al. April 6, 2 | 2010-04-06 |
| Processing Apparatus App 20080254626 - KASUMI; Kazuyuki ; et al. | 2008-10-16 |
| Processing apparatus Grant 7,381,272 - Kasumi , et al. June 3, 2 | 2008-06-03 |
| Exposure apparatus and device manufacturing method Grant 7,236,231 - Nakamura , et al. June 26, 2 | 2007-06-26 |
| Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration Grant 7,233,383 - Tokita , et al. June 19, 2 | 2007-06-19 |
| Processing Method App 20070132157 - Tokita; Toshinobu ; et al. | 2007-06-14 |
| Fine pattern forming apparatus and fine pattern inspecting apparatus Grant 7,196,321 - Kawakami , et al. March 27, 2 | 2007-03-27 |
| Exposure apparatus and device manufacturing method Grant 7,180,575 - Kasumi , et al. February 20, 2 | 2007-02-20 |
| Pattern transferring apparatus and pattern transferring method App 20060192928 - Kasumi; Kazuyuki ; et al. | 2006-08-31 |
| Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same App 20060192320 - Tokita; Toshinobu ; et al. | 2006-08-31 |
| Imprinting machine and device manufacturing method App 20060157444 - Nakamura; Takashi ; et al. | 2006-07-20 |
| Exposure apparatus and device manufacturing method App 20060087635 - Kazumi; Kazuyuki ; et al. | 2006-04-27 |
| Processing apparatus and method App 20050275125 - Kawakami, Eigo ; et al. | 2005-12-15 |
| Fine pattern forming apparatus and fine pattern inspecting apparatus App 20050269035 - Kawakami, Eigo ; et al. | 2005-12-08 |
| Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance method App 20050248659 - Kasumi, Kazuyuki ; et al. | 2005-11-10 |
| Exposure apparatus, device manufacturing method, pattern generator and maintenance method App 20050237375 - Tokita, Toshinobu ; et al. | 2005-10-27 |
| Processing apparatus App 20050230346 - Kasumi, Kazuyuki ; et al. | 2005-10-20 |
| Exposure apparatus and device manufacturing method App 20050219485 - Nakamura, Takashi ; et al. | 2005-10-06 |
| Processing apparatus App 20050212156 - Tokita, Toshinobu ; et al. | 2005-09-29 |
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