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Patent applications and USPTO patent grants for Osterheld; Tom.The latest application filed is for "combined slurry dispenser and rinse arm".
Patent | Date |
---|---|
Combined slurry dispenser and rinse arm Grant 6,280,299 - Kennedy , et al. August 28, 2 | 2001-08-28 |
Combined slurry dispenser and rinse arm and method of operation Grant 6,139,406 - Kennedy , et al. October 31, 2 | 2000-10-31 |
Polishing pad having a grooved pattern for use in a chemical mechanical polishing system Grant 5,921,855 - Osterheld , et al. July 13, 1 | 1999-07-13 |
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