Ossmann; Jens

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ossmann; Jens.The latest application filed is for "illumination system for euv lithography".

Company Profile

0.15.17

Ossmann; Jens - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination system for EUV lithography Grant 9,671,608 - Endres , et al. June 6, 2	2017-06-06
Catoptric illumination system for microlithography tool Grant 9,588,434 - Ossmann , et al. March 7, 2	2017-03-07
Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus Grant 9,310,692 - Stuetzle , et al. April 12, 2	2016-04-12
Illumination optical system for projection lithography Grant 9,110,378 - Ossmann , et al. August 18, 2	2015-08-18
Illumination optics for microlithography Grant 8,937,708 - Endres , et al. January 20, 2	2015-01-20
Illumination System For Euv Lithography App 20150002925 - Endres; Martin ; et al.	2015-01-01
Illumination optics for EUV microlithography and related system and apparatus Grant 8,587,767 - Fiolka , et al. November 19, 2	2013-11-19
Illumination Optical System For Projection Lithography App 20130250262 - Ossmann; Jens ; et al.	2013-09-26
Catoptric Illumination System For Microlithography Tool App 20120300185 - Ossmann; Jens ; et al.	2012-11-29
Catoptric illumination system for microlithography tool Grant 8,253,925 - Ossmann , et al. August 28, 2	2012-08-28
EUV illumination system Grant 8,227,770 - Endres , et al. July 24, 2	2012-07-24
Illumination optical system for microlithography Grant 8,174,677 - Ossmann , et al. May 8, 2	2012-05-08
Illumination Optics For Euv Microlithography App 20110235015 - Dengel; Guenther ; et al.	2011-09-29
Component For Setting A Scan-integrated Illumination Energy In An Object Plane Of A Microlithography Projection Exposure Apparatus App 20110096317 - Stuetzle; Ralf ; et al.	2011-04-28
Illumination Optics For Euv Microlithography And Related System And Apparatus App 20110063598 - Fiolka; Damian ; et al.	2011-03-17
Illumination Optics For Microlithography App 20100253926 - Endres; Martin ; et al.	2010-10-07
Catoptric Illumination System For Microlithography Tool App 20090323044 - Ossmann; Jens ; et al.	2009-12-31
Euv Illumination System App 20090316130 - Endres; Martin ; et al.	2009-12-24
Illumination system with zoom objective Grant 7,626,770 - Singer , et al. December 1, 2	2009-12-01
Illuminating Optical Unit And Projection Exposure Apparatus For Microlithography App 20090251677 - Endres; Martin ; et al.	2009-10-08
EUV illumination system Grant 7,586,113 - Endres , et al. September 8, 2	2009-09-08
Illumination Optical System For Microlithography App 20090091731 - Ossmann; Jens ; et al.	2009-04-09
Illumination System For Euv Lithography App 20090041182 - Endres; Martin ; et al.	2009-02-12
ILLUMINATION SYSTEM FOR A PROJECTION EXPOSURE APPARATUS WITH WAVELENGTHS LESS THAN OR EQUAL TO 193 nm App 20080278704 - Endres; Martin ; et al.	2008-11-13
Projection Exposure Apparatus For Microlithography App 20080259303 - Ossmann; Jens ; et al.	2008-10-23
Illumination System With A Detector For Registering A Light Intensity App 20080049206 - Ossmann; Jens	2008-02-28
Euv Illumination System App 20070295919 - Endres; Martin ; et al.	2007-12-27
Illumination System With Zoom Objective App 20070236784 - Singer; Wolfgang ; et al.	2007-10-11

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