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Patent applications and USPTO patent grants for Oshio; Hidetaka.The latest application filed is for "method for forming and patterning a layer and/or substrate".
Patent | Date |
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Multiple spacer patterning schemes Grant 11,315,787 - Yang , et al. April 26, 2 | 2022-04-26 |
Method for forming and patterning a layer and/or substrate Grant 11,145,509 - Koshizawa , et al. October 12, 2 | 2021-10-12 |
Method For Forming And Patterning A Layer And/or Substrate App 20200373159 - KOSHIZAWA; Takehito ;   et al. | 2020-11-26 |
Highly Etch Selective Amorphous Carbon Film App 20200357640 - PRASAD; Rajesh ;   et al. | 2020-11-12 |
Multiple Spacer Patterning Schemes App 20200335339 - YANG; Tzu-shun ;   et al. | 2020-10-22 |
Multiple Spacer Patterning Schemes App 20200335338 - YANG; Tzu-Shun ;   et al. | 2020-10-22 |
Highly etch selective amorphous carbon film Grant 10,727,059 - Bobek , et al. | 2020-07-28 |
Highly Etch Selective Amorphous Carbon Film App 20190172714 - BOBEK; Sarah ;   et al. | 2019-06-06 |
Method of forming a damascene structure App 20040192051 - Tanaka, Hiroya ;   et al. | 2004-09-30 |
Apparatus for adjustable gas distribution for semiconductor substrate processing App 20040082251 - Bach, Joseph ;   et al. | 2004-04-29 |
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