loadpatents
Patent applications and USPTO patent grants for Oshimo; Kentaro.The latest application filed is for "processing method".
Patent | Date |
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Processing method Grant 11,414,753 - Hane , et al. August 16, 2 | 2022-08-16 |
Film forming method and film forming apparatus Grant 11,201,053 - Fukiage , et al. December 14, 2 | 2021-12-14 |
Substrate processing method and substrate processing apparatus Grant 11,171,014 - Hane , et al. November 9, 2 | 2021-11-09 |
Processing Method App 20210130950 - HANE; Hideomi ;   et al. | 2021-05-06 |
Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device Grant 10,900,121 - Fukiage , et al. January 26, 2 | 2021-01-26 |
Film Forming Method And Film Forming Apparatus App 20200294787 - FUKIAGE; Noriaki ;   et al. | 2020-09-17 |
Film forming method and film forming apparatus Grant 10,714,332 - Fukiage , et al. | 2020-07-14 |
Film forming apparatus and operation method of film forming apparatus Grant 10,550,470 - Hane , et al. Fe | 2020-02-04 |
Film forming method, film forming apparatus, and storage medium Grant 10,438,791 - Hane , et al. O | 2019-10-08 |
Film-forming Method And Film-forming Apparatus App 20190292662 - HANE; Hideomi ;   et al. | 2019-09-26 |
Film Forming Apparatus And Operation Method Of Film Forming Apparatus App 20190127849 - HANE; Hideomi ;   et al. | 2019-05-02 |
Film Forming Method, Film Forming Apparatus, and Storage Medium App 20180366315 - Hane; Hideomi ;   et al. | 2018-12-20 |
Substrate Processing Method And Substrate Processing Apparatus App 20180358235 - HANE; Hideomi ;   et al. | 2018-12-13 |
Method for processing a substrate and substrate processing apparatus Grant 10,151,031 - Kato , et al. Dec | 2018-12-11 |
Film Forming Apparatus App 20180237914 - OGAWA; Jun ;   et al. | 2018-08-23 |
Film Formation Processing Method And Film Formation Procesing Apparatus App 20180142350 - Fukiage; Noriaki ;   et al. | 2018-05-24 |
Method of depositing a film, recording medium, and film deposition apparatus Grant 9,777,369 - Kato , et al. October 3, 2 | 2017-10-03 |
Method For Processing A Substrate And Substrate Processing Apparatus App 20170268104 - KATO; Hitoshi ;   et al. | 2017-09-21 |
Film Forming Method and Film Forming Apparatus App 20170271143 - FUKIAGE; Noriaki ;   et al. | 2017-09-21 |
Method for processing a substrate and substrate processing apparatus Grant 9,714,467 - Kato , et al. July 25, 2 | 2017-07-25 |
Method of depositing film Grant 9,136,133 - Oshimo , et al. September 15, 2 | 2015-09-15 |
Substrate processing apparatus and film deposition apparatus Grant 9,136,156 - Enomoto , et al. September 15, 2 | 2015-09-15 |
Method For Processing A Substrate And Substrate Processing Apparatus App 20150225849 - KATO; Hitoshi ;   et al. | 2015-08-13 |
Method Of Depositing Film App 20150011087 - OSHIMO; Kentaro ;   et al. | 2015-01-08 |
Method Of Depositing A Film, Recording Medium, And Film Deposition Apparatus App 20150004332 - KATO; Hitoshi ;   et al. | 2015-01-01 |
Method of depositing a film Grant 8,921,237 - Oshimo , et al. December 30, 2 | 2014-12-30 |
Method of depositing a film Grant 08921237 - | 2014-12-30 |
Film Deposition Apparatus App 20140209028 - OSHIMO; Kentaro ;   et al. | 2014-07-31 |
Method Of Depositing A Film App 20140179104 - Oshimo; Kentaro ;   et al. | 2014-06-26 |
Film Deposition Method App 20130164936 - OSHIMO; Kentaro ;   et al. | 2013-06-27 |
Substrate Processing Apparatus And Film Deposition Apparatus App 20130061804 - ENOMOTO; Tadashi ;   et al. | 2013-03-14 |
Processing device using shower head structure and processing method Grant 7,615,251 - Kakimoto , et al. November 10, 2 | 2009-11-10 |
Processing device using shower head structure and processing method App 20050223981 - Kakimoto, Akinobu ;   et al. | 2005-10-13 |
Method and apparatus for forming a film on an object to be processed Grant 6,454,909 - Matsuse , et al. September 24, 2 | 2002-09-24 |
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