Patent | Date |
---|
Modification method of surface of base, composition, and polymer Grant 11,426,761 - Komatsu , et al. August 30, 2 | 2022-08-30 |
Composition for pattern formation, and pattern-forming method Grant 11,370,872 - Hori , et al. June 28, 2 | 2022-06-28 |
Method and composition for selectively modifying base material surface Grant 11,211,246 - Komatsu , et al. December 28, 2 | 2021-12-28 |
Pattern-forming method Grant 11,195,714 - Osaki , et al. December 7, 2 | 2021-12-07 |
Pattern-forming Method And Radiation-sensitive Composition App 20210318614 - OSAKI; Hitoshi | 2021-10-14 |
Method And Composition For Selectively Modifying Base Material Surface App 20210166935 - KOMATSU; Hiroyuki ;   et al. | 2021-06-03 |
Method and composition for selectively modifying base material surface Grant 10,950,438 - Komatsu , et al. March 16, 2 | 2021-03-16 |
Selective modification method of a base material surface Grant 10,923,342 - Osaki , et al. February 16, 2 | 2021-02-16 |
Pattern-forming Method App 20200402789 - OSAKI; Hitoshi ;   et al. | 2020-12-24 |
Modification Method Of Surface Of Base, Composition, And Polymer App 20200384499 - KOMATSU; Hiroyuki ;   et al. | 2020-12-10 |
Pattern-forming Method And Radiation-sensitive Composition App 20200379348 - OSAKI; Hitoshi | 2020-12-03 |
Pattern-forming method and composition Grant 10,691,019 - Komatsu , et al. | 2020-06-23 |
Method For Forming Cover Film App 20200148845 - OSAKI; Hitoshi | 2020-05-14 |
Pattern-forming Method And Patterned Substrate App 20200118819 - KOMATSU; Hiroyuki ;   et al. | 2020-04-16 |
Modification Method Of Substrate Surface, And Composition And Polymer App 20200087530 - KOMATSU; Hiroyuki ;   et al. | 2020-03-19 |
Selective Modification Method Of A Base Material Surface App 20200051813 - OSAKI; Hitoshi ;   et al. | 2020-02-13 |
Substrate Treatment Method, Substrate Treatment System And Directed Self-assembling Material App 20200013617 - KOMATSU; Hiroyuki ;   et al. | 2020-01-09 |
Pattern-forming method and composition Grant 10,394,121 - Osaki A | 2019-08-27 |
Pattern-forming Method And Composition App 20190235386 - Komatsu; Hiroyuki ;   et al. | 2019-08-01 |
Composition For Film Formation, Film-forming Method And Directed Self-assembly Lithography Process App 20190233561 - KOMATSU; Hiroyuki ;   et al. | 2019-08-01 |
Method And Composition For Selectively Modifying Base Material Surface App 20190198317 - KOMATSU; Hiroyuki ;   et al. | 2019-06-27 |
Method And Composition For Selectively Modifying Base Material Surface App 20190198316 - KOMATSU; Hiroyuki ;   et al. | 2019-06-27 |
Composition, Modification Method And Selective Modification Method Of Base Material Surface, Pattern-forming Method, And Polymer App 20190194365 - KOMATSU; Hiroyuki ;   et al. | 2019-06-27 |
Composition For Pattern Formation, And Pattern-forming Method App 20190135967 - HORI; Masafumi ;   et al. | 2019-05-09 |
Pattern-forming Method And Composition App 20190107777 - OSAKI; Hitoshi | 2019-04-11 |
Pattern-forming method and composition Grant 10,175,575 - Osaki J | 2019-01-08 |
Forming Method Of Contact Hole Pattern App 20180192524 - OSAKI; Hitoshi | 2018-07-05 |
Pattern-forming method Grant 9,847,232 - Osaki , et al. December 19, 2 | 2017-12-19 |
Pattern-forming Method And Composition App 20170351174 - OSAKI; Hitoshi | 2017-12-07 |
Pattern-forming Method App 20170255096 - OSAKI; Hitoshi | 2017-09-07 |
Resist pattern-forming method and photoresist composition Grant 9,594,303 - Osaki , et al. March 14, 2 | 2017-03-14 |
Radiation-sensitive resin composition, method for forming resist pattern, and polymer and compound Grant 9,040,221 - Osaki , et al. May 26, 2 | 2015-05-26 |
Radiation-sensitive Resin Composition, Resist-patterning Method, And Block Copolymer App 20150093704 - OSAKI; Hitoshi | 2015-04-02 |
Resist Pattern-forming Method And Photoresist Composition App 20150010866 - Osaki; Hitoshi ;   et al. | 2015-01-08 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, And Polymer And Compound App 20130122426 - Osaki; Hitoshi ;   et al. | 2013-05-16 |